Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

2 32 1 1 MXQ 25 20 0.5 0.4 0.3 0.5 0.4 0.3 25 20 16 MXF 16 12 12 0.2 0.2 MXW 0.1 0 40 60 80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) MXJ Graph (19) Stroke: Up to 100 stroke Graph (15) Stroke: Up to 100 stroke MXP 20 20 10 10 MXY 3 4 5 3 4 5 40 Mass W (kg) Mass W (kg) MTS 40 2 2 32 32 1 1 25 20 0.5 0.4 0.3 0.5 0.4 0.3 25 20 16 16

3

4 4 6 4 12 8 8 0 4.5 (2) 16 12 4 12 4 4 6 4 12 8 8 0 Note 1) ( ): D-A96, A9V Note 2) When setting an auto switch, confirm the operation and adjust its mounting position.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Q x R M8 x 1.25 x 16 M10 x 1.5 x 16 S 176 188 TB 14 14 TC x R W 60 70 X 60 70 ZZ 180 192 Model CY1B50 CY1B63 Mounting Nut/included (2 pcs.)

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

CJ2-Z Series Air Cylinder/10, 16 10-/1121-/22How to Order Cushion Clean series 10 11 Relief type Vacuum suction type Nil A Rubber bumper (Standard) Air cushion 10 D L 16 60 A R C J 2 M9BW Z B 21 D L 16 60 R C J 2 M9BW Z B Number of auto switches Nil Built-in magnet Head cover port location Nil S n 2 pcs. 1 pc. n pcs.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(A) 2 (A) 2 X X 1 (P) 3 (R) 1 (P) 3 (R) 2.2-47

CLS

25 D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5BAL D-F59F 125 135 135 150 150 (n 2) 2 n (Same side) (n 4) 2 (n 4) 2 (n 4) 2 25 + 55 125 + 55 135 + 55 150 + 55 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 CL 2 (Different sides, Same side), 1 155 170 35 145 CL1 D-F5NTL (n 4) 2 (n 4) 2 (n 2) 2 (n 4) 2 155 + 55 170 + 55 35 + 55 145 + 55 MLGC n (Same side) n = 4, 8, 12,

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

CRB2/CRBU2/CRB1

0 0.052 38 10g6 0.005 0.014 11.5 2 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 20 30 2-5.5 through 2-5.5 through 38 20 3 5 5 16 14 (98) 53 B port A port 2-M5 x 0.8 CRB1 15 4.5 10g6 0.005 0.014 CRBU2W40-SE, DE 25h9 0 0.052 63 A port B port 16 2-M5 x 0.8 56 3-5.5 x 17.5L (Circumference divided in 3 equivalents) 43 Series CDRBU2 Dimensions

CNG

(mounted on different sides) 2 pcs. (mounted on same side) 1 pc. 2 pcs. (mounted on different sides) 2 pcs. (mounted on same side) 1 pc.

Plug-in/Plug Lead: Single Unit

Cv 3.4 3.4 3.4 2 position rubber seal VQ5 01 1 2 C [dm3/(sbar)] 16 16 16 4/2 5/3 (A/B EA/EB) 0.33 b 0.33 0.33 4.4 Cv 4.4 4.4 Note) For port size Rc 1/2 Manifold Option Individual EXH spacer VVQ5000-R-1EXH block plate VVQ5000-16A-2 Blanking plate assembly VVQ5000-10A-1 Individual SUP spacer VVQ5000-P-103 04 03 04 Throttle valve spacer VVQ5000-20A-1 SUP stop valve spacer VVQ5000-37A-1 SUP

Compact Guide Cylinder Series MGQ

D-A9V D-M9V 5 2 pcs. 10 1 pc. 15 10 5 D-M9 2 pcs. 15 10 1 pc. 15 10 D-M9W 2 pcs. 15 10 1 pc. 10 D-M9WV 2 pcs. 10 1 pc. D-Z7 D-Z80 10 5 2 pcs. 15 10 1 pc. D-Y59 D-Y7P 10 5 2 pcs. 15 10 1 pc. D-Y69 D-Y7PV 5 2 pcs. 5 1 pc.

Multi-Axis Step Motor Controller

1 ENC x Encoder connector (16 pins) Axis 2: Connect the actuator cable. !2 MOT x Motor power connector (6 pins) !3 ENC c Encoder connector (16 pins) Axis 3: Connect the actuator cable. !4 MOT c Motor power connector (6 pins) !

KK/KK13

/O.D. mm Series Body size 6.5/10 8.5/12.5 5/8 6/9 8/12 11/16 KK3 KK4 KK6 1/8 1/4 1/2 One-touch fitting type Applicable tubing O.D. mm Series Body size 16 8 10 12 4 6 KK3 KK4 KK6 1/8 1/4 1/2 Manufactured by Rectus Series KK13 Series KK13 Applicable hose I.D.

ZSE F/ISE

Item Reference page 16-2-30 Output type Example of internal circuit and wiring 16-2-31 Auto shift function, Anti-chattering function 16-2-32 Measures to be taken when error occurs 16-2-33 16-2-38 15 Series ZSE60F/ISE60 High Precision, Digital Pressure Switch for General Fluids Dimensions Bracket A A 30 20 ZSE ISE 20 PSE 45 Z I SE3 55 4.5 11.5 40 15 PS 4.5 Z I SE1 2 Courtesy of Steven Engineering

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

/Male Thread) ZPT 20/25/32 F-B5-A10 (Without Buffer/Male Thread) M10 x 1 M5 x 0.8 Width across flats 14 Width across flats 12 M5 x 0.8 M8 x 1 5 3 20 D 3 5 Y Width across flats 16 15 D 3 3 F Width across flats 12 Width across flats 12 F Width across flats 10 Width across flats 2 Width across flats 3 3 C C 2 2 A A B B Dimensions A Dimensions A (mm) (mm) B C D F Y B C D F Model Model ZPT10F-B5

MHK2

MHK2 Size: 12, 16, 20, 25 How to Order MHK 2 20 Standard type M9N S D 1 F MHKL 2 20 S D 1 F M9N Long stroke type Number of auto switches Number of fingers Nil S 2 pcs. 1 pc.

MHK2

Note) Be careful for the hysteresis of 2-color indication type D-F9BAL. Refer to Auto Switch Hysteresis on page 12-6-16.

OMU0023

of alarm history 8 D0608 2 Alarm number of alarm history 9 D0609 2 Alarm number of alarm history 10 D060A 2 Alarm number of alarm history 11 D060B 2 Alarm number of alarm history 12 D060C 2 Alarm number of alarm history 13 D060D 2 Alarm number of alarm history 14 D060E 2 Alarm number of alarm history 15 D060F 2 Alarm number of alarm history 16 D0610 2 Alarm number of alarm history 17 D0611

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Note 2) AS231FM type is made of steel. Note 3) Meter-in type is black zinc chromate plated. Note 4) AS131FM(3.2, 4, 6, 1/8", 5/32", 1/4") AS231FM-01(3.2, 4, 6, 1/8", 5/32") is POM. AS131FM(3/16"), AS231FM(3/16", 3/8") is brass. !3 !2 q o !4 !7 !

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

weight 90 100 110 120 20 1.12 (1.17) 1.70 (1.74) 2.63 (2.67) 4.59 (4.74) 6.65 (6.86) Single clevis 100+55 (n4) 2 n=4, 8, 12, 16, 110+55 (n4) 2 n=4, 8, 12, 16, 120+55 (n4) 2 n=4, 8, 12, 16, 20+55 n=2, 4, 6, 8, 90+55 (n4) 2 n=4, 8, 12, 16, (n2) 2 D-A59W n (Same side) 1.16 (1.21) 1.79 (1.84) 2.79 (2.83) 4.88 (5.03) 7.17 (7.38) Double clevis 90 100 110 120 15 1 2 (Dif. / same side(s)),