Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, threaded type valve , Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.) , Normally closed (N.C.) , Port size: 01 (1/8), 02 (1/4), 03 (3/8), 04 (1/2), Pilot port thread: Rc, NPT HIGH PURITY CHEMICAL VALVE, HAND OPERATE.

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, threaded type valve , Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.) , Normally closed (N.C.) , Port size: 01 (1/8), 02 (1/4), 03 (3/8), 04 (1/2), Pilot port thread: Rc, NPT HIGH PURITY CHEMICAL VALVE, HAND OPERATE.

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, threaded type valve , Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.) , Normally closed (N.C.) , Port size: 01 (1/8), 02 (1/4), 03 (3/8), 04 (1/2), Pilot port thread: Rc, NPT HIGH PURITY CHEMICAL VALVE, HAND OPERATE.

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, threaded type valve , Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.) , Normally closed (N.C.) , Port size: 01 (1/8), 02 (1/4), 03 (3/8), 04 (1/2), Pilot port thread: Rc, NPT HIGH PURITY CHEMICAL VALVE, HAND OPERATE.

Size: 01(Size 26mm), Stations: 12 Stations, A, B Port: 02 (Side, 1/4), Port Thread: T (NPTF), SI Unit: SDZEN (EtherNet/IPâ„¢), End Plate: w/o SI Unit/End Plate, SI Unit COM: N (-COM), Number of Input Blocks: 3 Input Blocks, Type of Input Block: 2 (M12, 4 Inputs), Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: S (Direct Exhaust w/Built-in Silencer)

Size: 02 (Size 18mm), Stations: 6 Stations, A, B Port: 01 (Side, 1/8), Port Thread: T (NPTF), SI Unit: SD0 (EX250/500 Serial Kit w/o SI Unit), End Plate: w/o SI Unit/End Plate, SI Unit COM: +COM, Number of Input Blocks: w/o SI Unit/Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: S (Direct Exhaust w/Built-in Silencer)

.: 01 (ø1/8"), Port Size/Applicable Tubing O.D.: 02 (R1/4), Thread Material/Surface Treatment: A (Brass), Sealant: P (Face Seal)

AS

Rod O.D.Applicable tubing O.D. 10 20 25 30 M5 standard 01 standard 02 standard 03 standard 04-04 06-06 08-08 10-10 4 4 6 6 8 8 10 10 wBring up the body, while holding it down. w eTake the finger off the release ring and remove the speed controller from the One-touch fitting.

AME

B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Made to Order Specifications (For details, refer to page 14-20-55.) 01 B 06 B 1 8 3 4 1B 02 03 10 14 B 1 4 B 3 8 04 B 1 2 Note) Refer to How to Order Bowl Assembly on page 14-20-59. 1 B 1 2 20 2B Caution Accessory/Option Combinations Available Not available Depends on model Be sure to read before handling.

AMH

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Accessory Option specifications C C D -J -R D J T AMH150 R AMH250 AMH350 AMH450 Applicable model Accessory (Option) AMH550 AMH650 AMH850 Port size N.C. auto-drain N.O. auto-drain Drain guide 01 B 06 10 14 B 3 4 1B 1 8 Accessory 02 03 B 1 4 B 3 8 04 B

MLU

. +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 9 11 13 16 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 142.5 150.5 8 10 10 14 9 11 13 16 159 169 CD-MU03 171 181 CD-MU04 205.5 221.5 CD-MU05 Single clevis (Double clevis bracket) Double clevis (Single clevis bracket) DX -01 -03 CX -02 -04 DY+0.4 +0.2 R (CJ) R (DJ) CDH10 DDH10 2-DT 2-CT DZ 2-DR CZ 2-CR DH CH DI CI DE

RLQ

Description RLQ40 RLQ50 RLQ63 Compact Cylinder with Air Cushion and Lock PT elbow Restrictor PT tee 32, 40: AS2200-(N, F)01-S 50, 63: AS2200-(N, F)02-S 32, 40: KRL06-01SW2 50, 63: KRL06-02SW2 TRB0604W KR-06C 2 Metal speed controller 5 2 Male elbow By-pass tubing Spatter cover 6 1 2 7 8 9-12-18 19 Series RLQ Compact Cylinder with Air Cushion and Lock Accessory Bracket Dimensions Single knuckle

Size: 01, 02 standard, Control Method: Meter-out, Thread Size: 1/4, Tube Size: Ø6, Sealant: 01,02,03,04 w/Sealant, Option: Nickel Plated, Lock Nut: -

Size: 01, 02 standard, Control Method: Meter-in, Thread Size: 1/8, Tube Size: Ø6, Sealant: 01,02,03,04 w/Sealant, Option: None, Lock Nut: Round

Series 10-, 21- AF-A Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size a Mounting Nil Without mounting option B Note 3) With bracket + Option r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

Body Size: 20, Backflow: K (w/Backflow Function), Thread: Rc, IN Port Size: 02 (1/4), OUT Port Size: 01 (1/8), Options: J (Right Angle Square Type Pressure Gauge w/Limit Indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Available in standalone or manifold configurations.Vacuum ejector, Stations: 01, 02, 03, 04, 05, 06, 07, 08, Right, left, or both side vacuum supply, "Manifold, VACUUM EJECTOR