CY1F

Centralized piping on right L R R L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.

HRX-OM-W069

Both ends of the communication connection (the end nodes) need to be connected to the higher level computer. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

VK300

A) 2 1 (A P) Flow characteristics Weight (g) Operating pressure range (MPa) 1 2 (P A) 2 3 (A R) Port size Valve model C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv Grommet 0.44 0.40 0.40 0.44 0.40 0.41 0.63 0.63 0.41 0.63 0.13 0.10 0.10 0.13 0.10 0.20 0.14 0.14 0.20 0.14 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.47 0.38 0.38 0.47

Stainless Steel 316

(In case of R) 8 20.9 21.6 45 25.9 27.4 15 1/4 14 24.9 L1 Applicable tubing 56 27.9 29.1 3/8 M 69 27.7 30.7 1/4 10 23 35.2 18 17 27.8 D 73 29.7 32.4 3/8 A 94 30.7 35.1 3/8 L2 12 24.8 50.2 20.8 31.3 H 121 34.7 37.2 22 1/2 Connection thread (with sealant) Reference dimensions after installation of R thread Note 1) D is maximum diameter.

Coolant Valve

) Nil B Note) Note) Only valve sizes 1, 2, 3 and 4.

ISO Standard Hydraulic Cylinder

D-A59W D-Z7/Z80 D-M9/M9W D-M9A Bore size (mm) Bore size (mm) D-Z7/Z80 D-A5/A6 A B A B A B A B A B A B Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs 40 50 63 80 100 40 50 63 80 100 11.5 8.5 8 5 13 10 5 2 27 28.5 27 34 35.5 28.5 29 27 13 8 9.5 4.5 14.5 9.5 6.5 1.5 33 33.5 33 38.5 39.5 34.5 33 33 4.5 0 8.5 3.5 47.5 38.5 14.5 9.5 11 6 16 11 8 3 38.5 38 38.5 43.5 45 38.5 28 37 8.5 3.5 12.5 7.5 54

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD.

XLF Series

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. 3.

Lock unit

Use an electric circuit for control and solenoid valve with high response. b. Keep the lock release solenoid valve and lock release port as close as possible. c. If b is difficult, install a rapid exhaust valve between the lock release solenoid valve and lock release port. Piston speed is the most significant factor in stopping accuracy.

VT325

VS Flow Characteristics/Weight VFN Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Grommet Valve model C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 0.58 kg (For AC) 0.63 kg (For DC) VO325 4.1 0.24 1.0 4.4 0.18 1.0 4.5 0.15 1.0 4.3 0.23 1.0 VO325V (Vacuum spec. type) Precautions Warning Changing from N.C. to N.O.

76

Air dryer model IDF100FS-30-R IDF125FS-30-R IDF150FS-30-R Breaker capacity 20 A 30 A Sensitivity current: 30 mA Corrosion is not covered under warranty. Option symbol V With a timer controlled solenoid valve type auto drain Option symbol Float type heavy duty auto drain is changed to the solenoid valve type auto drain.

CP95

auto switch CP95KD B 32 100 W S Z76 With auto switch Number of auto switches Auto switch Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

ZSM1-115/121

How to Calculate the Set Value A = Max. pressure value in auto preset mode B = Tentative min. pressure value in auto preset mode P1 = A (A B)/4 P2 = B + (A B)/4 Manual adjustment is possible after finishing in the auto preset mode. Ex.) When an error count (number of the failure predict) (EC) is set to be 3.

CP95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

rep-modular-e

5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

MX MTS MY Centralized piping on right CY MG CX R R L DL -X R L Slide table actuation direction 20Centralized piping on left Data R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

MX MTS MY Centralized piping on right CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX L R R DL -X R L Slide table actuation direction 20Centralized piping on left Data R L L R R L Slide table actuation direction 4.

EX500

24VDC/650mA 16 VOLTAGE INPUT US C TYPE1 IP CODE IP65 R C US R R R R R R R US C US C US C US C US C US C US C SERIAL NO.

MNB

9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !2 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Component Parts No. Description Material Note No.