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Refer to the dimensions on page 20 for the mounting dimensions. (35) (25) 5.5 1.25 L Dimensions No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 23 35.5 48 60.5 73 85.5 98 123 148 173 198 223 248 L dimension 110.5 135.5 160.5 185.5 210.5 235.5 260.5 40 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 273 298 323 348 373 398 423 448 473 498 L dimension 285.5 310.5 335.5 360.5

3 Position Cylinder Series RZQ

90 Bore size (mm) Head side flange style: RZQG FZ L M 4 x FD 32 65 18 34 40 72 18 40 50 90 22 50 63 108 28 60 FV M REA REB REC L B + Full stroke FT FZ FX AH + Full stroke CY CX Double clevis style: RZQD MQ Double Clevis Style (mm) CT Cap bolt RHC Bore size (mm) Hole: CD H10 d9 A B CD CL CT CU CW RZQ 32 130.5 82.5 120.5 10 5 14 20 40 22 142 92 10 132 6 14 50 20 28 160.5 96.5 14 146.5 7 63

ZP

Model Size C10 A 10 ZP10C B 12 C 4 D 13 E F Y 1.7 7.7 7.7 8.2 9.5 9.5 10 13.7 14.7 12 12 12.5 14 14 14.5 18.5 19.5 3.8 ZP10U to 50U C13 13 ZP13C 15 4 13 1.8 C16 16 ZP16C 18 4 13 1.2 C20 20 ZP20C 23 4 15 1.7 C25 25 ZP25C 28 4 15 1.8 C32 32 ZP32C 35 4 15 2.3 C40 40 ZP40C 43 7 18 3.3 C50 50 ZP50C 53 7 18 Deep (D) ZP10D to 40D Model Size U02 A ZP02U B 2.6 C 1.2 D E F Y 2 4 6 8 10 13 16 20 25

CXT

Bore size (mm) 32 40 38.5 42 38 41.5 18 24 18 24 10 13.5 10 13.5 9.5 (10) 17.5 (18) 31.5 35 7 10.5 15 21 34 37.5 10 13.5 18 24 35 38.5 13 (13.5) 23.5 (24) ( ): Denotes the values of D-A72. 8-27-11 12 Series CXT Operating Range (Dimensions) Bore size (mm) 12 Auto switch model 16 20 25 32 40 D-F7, D-F7V D-J79, D-J79C D-F7W, D-F7WV D-J79W D-F7BAL, D-F7BAVL D-F7NTL, D-F79F 6 6 2.5 3 4 4 4 4

Pin Clamp Cylinder Series CKQ/CLKQ

A (L) (H) 17 85 (Same measurement on 2 sides) 40 (M10) 400.05 (8) 40 (M10) 400.05 (8) 15 2 3 3 (t=1 x 1, t=0.5 x 2) Depth 13 2 x 8H7 2 sides x (Same measurement on 2 sides) 40 (when the shims are attached) 2 sides x 2 x M10 x 1.5 40 (M10) 400.05 (8) Depth 15 (Same measurement on 2 sides) With shims 56 10.5 10.5 32 P 71 The head side cylinder port (The clamp side port) 64 P The head side

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGG MGC (mm) MGF Stroke range Bore size (mm) D1 J K M B D C E KA GA GB H MGZ 11 12 22 25 25 25 25 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 39 43 49 59 71 82 106 29 33 38 46 55 66 86 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 20 25 32 40 50 63 80 12.5 18 19.5

Thermo-chiller

When a load is stable 0.1C 22 CH1 Circulating fluid temperature [C] Circulating fluid temperature [C] 21 20 19 8.5 kW load 18 0 kW load 17 0 10 20 30 40 When a load is stable 0.5C 27 CH2 For HRLE090-A-20 26 Outdoor air temperature: 32C Circulating fluid set temperature: 20C/25C (CH1/CH2) Heat load in the customer equipment: 9.5 kW (CH1, 2 total) Power supply: 200 V 60 Hz Circulating fluid

Air Cylinder Series CS1

32 40 8 60 55 34 39 28 4 5 M36 x 1.5 4 x 40 110 86.5 76.5 +0.1 0 0.1 0.3 0.080 0.142 40 50 8 67 70 44 32 4 5 M40 x 1.5 4 x 40 125 94.5 84.5 42.5 CG1 +0.1 0 0.1 0.3 0.080 0.142 40 50 8 67 70 44 40 4 5 115 105 M45 x 1.5 4 x 55 125 180, 200 250 300 42.5 +0.1 0 0.1 0.3 0.080 0.142 50 63 9 86 66 M56 x 2 53 50 5 6 144 132 5 x 65 160 75.5 MB +0.12 0 0.1 0.3 0.100 0.174 63 80 9 71 M64 x 2 66 63

2/3 Port Valve

-40F VND70D-50A VND70D-50F 7 0.7 1 1.3 3.8 5 8 12 13 0.3 1 8 1 4 18 23 70 90 140 220 3 8 0.6 15 1 2 3 4 20 0.9 1.4 2.3 5.5 3.6 7.2 5.7 10.8 25 1 1 4 1 32 18 320 32 1 2 1 28 40 500 40 2 50 43 770 50 Note 1) The companion flange is JIS B 2210 10K (Standard) or its equivalent.

Wedge Cam Operation Gripper Series MHK2

0.4MPa 0.5MPa 0.6MPa 40 20 20 40 0.6MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Holding point L mm Holding point L mm Holding point L mm Holding point L mm Note) Distance to the holding point L of single acting type is shorten by spring return.

SMC Pneumatic Clean Series

30 Up to 1000 58 35 11 32 7 81 18 70 3/8 27 52 20 40 70 9 110 108 178 M18 x 1.5 15 59 35 14 63 17 31 Up to 1000 58 35 11 32 101 7 18 85 3/8 27 64 20 40 86 130 105 116 189 M10 x 1.25 M18 x 1.5 11.5 49 Actuator / Common Precautions 1 Be sure to read before handling.

HRL

fluid outlet 0.5 50 0.3 30 0.4 40 0.3 0.2 30 20 Usable flow rate range 0.2 20 Circulating fluid return port Circulating fluid return port 0.1 10 0.1 10 0 0 0.0 0 0 20 40 60 80 100 120 140 160 180 0 2 4 6 8 10 12 14 16 18 Pump Circulating fluid Pump Circulating fluid head pressure pressure head Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] [m] [MPa] [m] [MPa] 326

HRX-OM-W060

Circulating fluid temperature[] Fig. 8-8 Cooling Capacity (HRL100/200/300-A-20) 8.4 Cooling Capacity HRL Series 8-8 HRX-OM-W060 Chapter 8 Documents 8.5 Pump Capacity 8.5.1 HRL100A20 CH1 0.6 60 0.5 50 Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 Circulating

39

port Nil TN 90 G 105 NPT 120 135 A015 C S CKZT Clamp Arm 40 Mounting hole Bore size 40 80 Equivalent Power clamp cylinder European type D1 H D2 D1 D2 H symbol S B 6 7 16 6 9 25 8 20 8 10.2 10.2 25 Bore size Only S type is available for A015 of 40. 40 80 40 Arm mounting position 80 Equivalent Right D1 D2 Offset H R A015 A045 Offset 15 Offset 45 Center D1 D2 C H Left D1 D2 L H Cylinder Specifications

MHF2

Hmm 0.7MPa 0.3MPa 0.3MPa 60 0.7MPa 60 0.4MPa 0.4MPa 40 40 20 20 100 80 60 40 20 0 80 60 40 20 0 100 Gripping point L mm Gripping point L mm 3 Series MHF2 Confirmation of external force on fingers: Series MHF2 Step 3 L L Mr Mp Fv My L L: Distance to the point at which the load is applied (mm) Maximum allowable moment Allowable vertical load Fv (N) Model Pitch moment Mp (Nm) Yaw moment My(

CXT

Q+Stroke (NA) Cylinder form 12 16 (mm) d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 X 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 X 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 X 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90 54

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

If a bend (R) is used, limit it to R3 or less. 12 Series PFMB7 Dimensions PFMB7201 With bracket/Without flow adjustment valve With bracket/With flow adjustment valve 48 76 36 24 28 28 4 x 3.4 34 26 18 34 26 18 4 x 3.4 36 51.5 (Max. 58.5) 43 43 48 48 18 18 1.2 1.2 DIN rail mounting 18 x n pcs. + 34.4 18 48 43 52.4 1 1 IN 1 IN IN DIN rail is prepared by customer.

High Vacuum Angle Valve

M: Size 16, 25, 40 only.

3 Position Cylinder Series RZQ

Flange (mm) FV M Bore size (mm) AR AH B FD FT FV FX 100.5 108.5 82.5 5.5 56 8 50 32 110 118 92 5.5 62 8 56 40 L B + Full stroke FX FZ AR + Full stroke 118.5 127.5 96.5 6.6 76 9 67 50 130 139 102 9 92 9 90 63 Bore size (mm) Rear flange type/RZQG FZ L M 4-FD 65 18 34 32 72 18 40 40 90 22 50 50 108 28 60 63 FV M M L B + Full stroke FT FZ AH + Full stroke Double clevis type/RZQD (mm) Double

C76

Knuckle Joint/DIN648 Double Knuckle Joint/DIN71751 CJ1 CJP CJ2 CM2 CG1 MB (mm) (mm) MB1 Thread e M10 x 1.5 M12 x 1.75 b 10 12 d 40 48 f 10 12 g 18 23 c 20 24 j 12 15 a 20 24 0 l3 14 16 Model GKM10-20A GKM12-24A Thread d3 M10 x 1.5 M12 x 1.75 h 43 50 d6 20 30 b3 b1 14 16 l 20 22 d7 19 22 Bore 32 40 Model KJ10DA KJ12DA Bore 32 40 dH71 10 12 10.5 12 13 13 CA2 CS1 C76 C85 Floating joint/Series