Air Slide Table Series MXP

MXP8-10 A Piping port Width across flats 5.5 Width across flats1.5 H 12 4 x M3 x 0.5, depth 4 M3 x 0.5 7 (Plug: M-5P) 2 x M5 x 0.8 14.5 6.5 4 3.7 16 15 8.5 3 0 +0.030 depth 2.5 3 0 +0.030 deotg 2.5 17 0.5 A 4 x M4 x 0.7 18 0.05 Pilot hole diameter 3.3 15 W Piping port 2 x M5 x 0.8 0.5 0.05 D B 9 J 3 0 +0.030, depth 1.5 MXP8-20 22 23 3 0 +0.030 , depth 1.5 4.5 8 9.5 4 Section AA 6 x M3 x 0.5

High Purity Chemical Valve

Symbol Body class 2 3, 4, 5, 6 3, 4, 5, 6 Thread type M5 Rc 1/8 NPT 1/8 Nil Variations N LVC20 LVC30 Model LVC40 LVC50 LVC60 Orifice diameter 4 8 10 16 22 Tubing O.D. Inch sizes Metric 3, 4, 6 6, 8, 10 10, 12 12, 19 19, 25 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 Inch Valve type Symbol Type 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Basic type N.C. PB PA PA N.O.

CNG

25 2 104 10 (13) 26 7 8 47 to 300 301 to 800 58.5 12 301 to 800 (mm) Bore size (mm) 20 25 32 40 P J K KA MM NA PG PH PL S TA TB TC WA WB WH WW W XA XB 141 (149) 88 5.5 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 151 (159) M6 x 0.75 98 6 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M5 x 0.8 depth 7.5 154 (162) 99 6 M8 x 1.0 5.5

Guide Cylinder/Compact Type Series MGC

, 125, 150 200, 250, 300 107 19 16 22 75 40 M8 x 1.25 depth 16 37 160 34.5 50 140 8.6 14 depth 10 M10 x 1.5 depth 18 142 25 19 22 110 45 M10 x 1.5 depth 20 42 194 37 80 170 10.5 17 depth 12 M12 x 1.75 depth 21 Bore size (mm) P Note 2) I J K L M N O Q R S T U V W X Y Z WH 20 25 32 40 50 60 80 86 80 25 44 38 25 M6 x 1 M5 x 0.8 21 12 26 12 40 36 30 140 23 30 52 70 95 46 32 M6 x 1 M5 x 0.8 21

Cylinder with Lock Series CNG

25 2 104 10 (13) 26 7 8 47 to 300 301 to 800 58.5 12 301 to 800 (mm) Bore size (mm) 20 25 32 40 P J K KA MM NA PG PH PL S TA TB TC WA WB WH WW W XA XB M5 x 0.8 141 (149) 88 5.5 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 M6 x 0.75 151 (159) 98 6 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M8 x 1.0 154 (162) 99 6 M5

CNG

25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Bore size (mm) 20 25 32 40 W J K KA MM NA PG PH PL S TA TB TC WA WB WH WW XA XB P 30 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6 3 12 25 M8 x 1.0 M5 x

Modular/F.R.L. Units Series AC

AF F F E E B C AR Cross spacer E: 4 x Rc F: Without thread E D A AL A 23 B 16 C 14 D 25 Applicable model AC10 Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 AW AC20 40 40 22 40 AG AC25, AC30 49 43 28 48 AV AC40 60 48 36 54 AF800 AF900 Caution on Mounting AC40-06 72 62 40 62 1.

Wedge Cam Operation Provides

/Long stroke model 18.6 2-M5 X 0.8 thread depth 8 (Mounting thread) 24 4H9 depth1.5 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 X 0.8 thread depth 10 (Mounting thread) 4-M5 X 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through (Mounting hole) 0 -0.1 8 Open 34 +1.2 0 5 13.5 16 0.02 70 68 46 30 32 0 -0.2 Closed 16 32 4H9 depth 4 +0.030 0 18 44.5 20 27.6 0.05 73.5 100 Groove position for

CNG

25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Bore size (mm) 20 25 32 40 W J K KA MM NA PG PH PL S TA TB TC WA WB WH WW XA XB P 30 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6 3 12 25 M8 x 1.0 M5 x

CLQ

VH Q 2 x 2-9 counter bore depth 7 H effective thread depth C 2-5.4 through M5 x 0.8 unlocking port 5.5 (unlocks when pressurized) U I 6.5 VV D M E M5 x 0.8 Rear cylinder port K M E S 3.2 2 x 2-M5 x 0.8 3.2 16 16 Dust cover (manual unlocking unit) W L G B + Stroke A + Stroke Retraction locking LOCK VH1 W1 Dust cover (manual unlocking unit) M5 x 0.8 unlocking port (unlocks when pressurized)

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

02 16 stations y SUP/EXH block assembly 2 stations Symbol Communication connector Number of outputs Specified layout Note 2) (Available up to 32 solenoids) Protocol Nil R Internal pilot External pilot 20 0 QA QB NA NB NC ND VA VB DA DB FA FB EA EB 20 stations Without SI unit 32 16 32 16 32 16 32 16 32 16 32 16 32 16 For 16-output SI unit DeviceNet M12 i Mounting Symbol 02 Stations Note 2

Compact Cylinder with Lock Series CLQ

VH Q 2 x 2-9 counter bore depth 7 H effective thread depth C 2-5.4 through M5 x 0.8 unlocking port 5.5 (unlocks when pressurized) U I 6.5 VV D M E M5 x 0.8 Rear cylinder port K M E S 3.2 2 x 2-M5 x 0.8 3.2 16 16 Dust cover (manual unlocking unit) W L G B + Stroke A + Stroke Retraction locking LOCK VH1 W1 Dust cover (manual unlocking unit) M5 x 0.8 unlocking port (unlocks when pressurized

Series SV

Tie-rod base A 34 pin connector allows up to 16 stations with double solenoids.

Air Slide Table Series MXW

-X = 3.5/14.3 = 0.24 Individual -X 149 Air Slide Table Series MXW How to Order MXW 16 100 B M9BW Made to Order Refer to page 151 for details. Port thread type M thread Rc NPT G 8 to 16 Nil Number of auto switches Nil TN TF 20, 25 2 pcs. 1 pc. n pcs.

MQQ

x 0.8 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F S + Stroke F H ZZ + Stroke (mm) Bore size (mm) A D NN F G1 P G2 MM S I ZZ H J N1 N2 NA M5 x 0.8 16 15 4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16 Rc 1/8 28.5 18 8 13

E-P HYREG ® Series VY1 1

0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

MY1

GR-S-010 (10 g), GR-S-020 (20 g) Technical Data 1353 MY1W Series Dimensions: 16, 20 (LL) L 4 x MM depth M 4 x B counterbore depth C LD through-hole bottom side J depth K PA YW PB QW LW Q+ Stroke PG M5 x 0.8 M5 x 0.8 (Hexagon socket head plug) (Port) W CH LH RR SS NE H RR SS NH HH QQ NC M5 x 0.8 M5 x 0.8 2 x 2 x M5 x 0.8 PP TT UU (Port) This port is not available for use.

MQQ

x 0.8 15 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc

MQQ

ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc 1/8 8 M8 x 1.25 13 25 8.5 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M26 x 1.5 18 Rc 1/8 10 M10 x 1.25 13 30 8.5 102.5 160 34.5 44.5 32 20.5 38 32 For details on rod end nut and mounting nut, refer to page 10-5-24. 10-5-

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

(Inch) N1 N3 N7 N9 N11 M5 02 Symbol M5 thread 1/8" 5/32" 1/4" 5/16" 3/8" thread 1 4 Pressure Specifications VQZ100 2(A) port (2) VQZ100 VQZ200/300 Series VQZ200 Metal seal VQZ300 0.1 to 0.7 MPa (1) External pilot pressure range Note) Metric size of One-touch fittings (C) are also available.