EX120/121/122

Wiring 7.8 M12 SPEEDCON Plug connector pin assignment B-coded (Reverse key) Fieldwireable connector Plug Socket 3 PCA-1557659 For DeviceNetTM PCA-1557617 For CC-Link 7 PCA-1557701 For PROFIBUS DP 12 PCA-1557620 For CC-Link 4 PCA-1557662 For DeviceNetTM 8 PCA-1557714 For PROFIBUS DP 13 60 58 19 17 17 19 A-coded (Normal key) B-coded (Reverse key) A-coded (Normal key) B-coded (Reverse key)

TL/TIL

Refer to pages 17-5-127 through 17-5-129 regarding tubing connection and special tools. 2. Tighten the nut until it touches the end surface of the body, and then tighten it an addition 1/8 turn. As a guide, refer to the proper tightening torques shown below.

Low Profile Slide Table Series MXF

Model Maximum allowable load mass Average speed Va (mm/s) A2 10 11 12 17 A3 6 10 10 11 A4 21 23 28 34 A5 21 23 28 34 A6 10 11 12 17 A1 6 10 10 11 MXF8 MXF12 MXF16 MXF20 0.6 1 2 4 Note) Note) MXF8 MXF12 MXF16 MXF20 1.0 Note) 16 mm for MXF8-10 only. 0.7 Table (4) Maximum Allowable Moment: Mmax (Nm) 0.5 0.4 Model Stroke (mm) 100 18.27 75 7.96 13.70 50 3.34 5.69 9.14 30 0.98 2.22 3.41 6.66

AC Servo Motor Driver (MECHATROLINK-II type)

PAO /PAO 17 18 Phase-A signal Encoder output pulse signals for two-phase pulse train with PBO /PBO Phase-B signal 90 phase differential 19 20 PCO /PCO 21 22 Phase-Z signal Origin pulse output signal Signal ground Connects to the 0 V pin on the control circuit of the PC or PLC ... etc.

IDX-OM-W011

IDF8E Rc3/4 300 IDF11E Rc3/4 IDF Series 6-3 6 3 IDX-OM-W011 6 IDF15E1 mm 603 41 54 300 16 C R 1 C R 1 87 578 [AC200V] [AC200V] 396 0.8m (10, (:10, :0.8m) 43 15 270 13 4x 380 101 258 314 [AC100V] (:1.9m [AC100V] [AC200V] [AC200V] ( 17) (17) 1.9m 6-4 IDF1E3E ILS 3 PTC (50/60Hz) AC100/100,110V 2 1 (BK) (WH) 1 SYMBOL DESCRIPTION M 2 1 S 5 CM 2 (GR) CM COMPRESSOR MOTOR PC OLR C

Digital Pressure Switch ( compatible)

No.PS-OMX0002-A PRODUCT NAME Digital Pressure Switch ( compatible) MODEL / Series / Product Number ZSE20C(F)-L ISE20C(H)-L Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 11 Definition and terminology 13 Mounting and Installation 17 Installation 17 Piping 20 Wiring 22 Outline of Settings [Measurement mode] 24 Pressure Setting 25 3 Step

Digital Flow Switches

l/min 5 l/min 40 l/min PF2W540 PF2W540T 45 l/min 3.5 l/min 10 l/min 100 l/min PF2W511 110 l/min 7 l/min Rated flow range of sensor Set flow rate range of sensor 41 Series PF2A/PF2W Specific Product Precautions 5 Be sure to read before handling.

Sine Rodless Cylinder Series REA

SN-032B SN-040B Applicable bore size (mm) 25, 32 40 8 M26 x 1.5 32 37 11 M32 x 2.0 41 47.3 H B 6

LG1H

Do not perform the operation or setting of the product 17. When a surge generating load such as a relay or solewith wet hands. It may cause an electric shock. noid valve is directly driven, use a product that incorporates a surge absorption element. 3. Product with damage or the one lacking of any components should not be used. It may cause an electric shock, fire, or injury.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Do not perform the operation or setting of the product 17. When a surge generating load such as a relay or solewith wet hands. It may cause an electric shock. noid valve is directly driven, use a product that incorporates a surge absorption element. 3. Product with damage or the one lacking of any components should not be used. It may cause an electric shock, fire, or injury.

Plug-in Unit

A (+) () () (+) 17 17 Station 9 Station 9 SOL. B SOL. B (+) () () (+) 18 18 SOL. A (+) () 19 COM (+) () 19 Station 10 SOL. B (+) () 20 COM (+) () 20 SOL. A (+) () 21 Negative COM. spec. Positive COM. spec. Station 11 SOL. B (+) () 22 SOL. A (+) () 23 Station 12 SOL. B (+) () 24 COM () (+) 25 Special Wiring Specifications (Option) COM () (+) 26 Positive COM. spec. Negative COM. spec.

Lubrication Equipment

Below this flow rate, the pressure differential cannot be set to 0.05MPa. 1.17-17 D.P.Lube ALD600/900 Construction Precautions ALD600 Be sure to read before handling. Refer to p.0-26 and 0-27 for Safety Instructions and common precautions on the products in this catalog, and refer to p.1.0-1 and 1.0-2 for precautions on every series.

MHK2

562 -X Switch groove (Both-side type) 90 12 9 11 9 20 105 MHKL2-12S Normally open Normally closed Without magnet MRHQ 16 17 14 14.6 28.6 165 MHKL2-16S EPDM seal/Fluorine grease 20 32 18 16 34 314 MHKL2-20S Fluorine grease MA 25 53 22 19 41 565 MHKL2-25S Finger: Side tapped mounting 12 11 11 9 20 105 MHKL2-12C DFinger: Through-hole mounting 16 22 14 14.6 28.6 166 MHKL2-16C Dust cover adhesion

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

(mm) U H I J K L O Z M N P S A C D E F B Bore size (mm) 32 31.5 M10 x 1.5 60 4.5 14 8.5 9 depth 7 14 34 5.5 Rc 1/8 58.5 73.5 12 16 45 20 65 40 35 M10 x 1.5 69 5 14 8.5 9 depth 7 14 40 5.5 Rc 1/8 66 75.5 12 16 52 22 67 50 41 M12 x 1.75 86 7 18 11 11 depth 8 19 50 6.6 Rc 1/4 80 87 15 20 64 25 76 63 47.5 M12 x 1.75 103 7 18 11 14 depth 10.5 19 60 9 Rc 1/4 93 91 15 20 77 27 80 80 57.5 M16 x 2

Rotary Cylinder Series MRQ

The standard angle adjustment range of 5 (one side) is changed to in this type. + 5 95 (mm) E Mounting screw Q Stroke 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 Size Y 58.5 ( 5 Stroke)/2 61 ( 10 Stroke)/2 61 ( 15 Stroke)

PFxx-OMO0004CN

[cm] -70No.PF-OMO0004CN-E PFMB7201-02 PFMB7201-N02 17 2x Rc1/4 NPT1/4 -71No.PF-OMO0004CN-E PFMB7201-02L PFMB7201-N02L 2x Rc1/4 NPT1/4 17 -72No.PF-OMO0004CN-E PFMB7201S-02 PFMB7201S-N02 2x Rc1/4 NPT1/4 -73No.PF-OMO0004CN-E PFMB7201S-02L PFMB7201S-N02L 2x Rc1/4 NPT1/4 17 -74No.PF-OMO0004CN-E PFMB7201-F02 21 2x G1/4 -75No.PF-OMO0004CN-E PFMB7201-F02L 2x G1/4 21 -76No.PF-OMO0004CN-E PFMB7201S-F02

CEx-OMI0064

NO. 19 NO. , 26 , 41 - 10-2 CEU5 , ROM , , ,SMC RAM , ,SMC 2ROM E ,, , , 2ROM E 2ROM 80 E , , ,SMC , 42 -

Compact Rotary Actuator

Table 3 Specification-3 Size Weightg Internal capacitycm 90 180 360 90 180 360 10 120 150 200 1.2 2.2 4.3 15 220 270 380 2.9 5.5 10.7 20 600 700 1000 7.1 13.5 26.3 30 900 1100 1510 12.1 22.9 44.7 40 1400 1600 2280 20.5 39 76 -17- 1-2 Effective output Fig.1 Effective output 1-3 Rotation range When pressurized from the Port A, the shaft will rotate clockwise.

Low-Speed Rotary Actuator

Fig.16 Adjust bolt assembly Seal washer Size 10,15 Hexagon nut Size 20,30,40 Small hexagon nut Hexagon socket head set screw (Adjust bolt) Fig.17 -34- End cover assembly Gasket End cover gasket End cover Adjust bolt assembly Size 1015 Size 203040 Fig.18 (2) Insert the piston Assembly to the body.

MRQB-OM0002

No.MRQB-OM02 / / / / / / / / MRQ MRQ MRQ MRQ 1 1. 1. 1. 1. 11 1-1. 11 1-2. 11 1-3. 11 2. 2. 2. 2. 12 3. 3. 3. 3. 14 3-1. 14 3-2. 14 4. 4. 4. 4. 15 4-1. 15 4-2. 16 4-3. 17 4-4. 17 4-5. 18 4-6. 18 5. 5. 5. 5. 19 5-1. 19 5-2. 21 5-3. 22 6. 6. 6. 6. 24 6-1. 24 6-2. 24 6-3. 25 7. 7. 7. 7. 26 8. 8. 8. 8. 27 9. 9. 9. 9. 28 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power