Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N3 (5/32" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

Type of Connector: PH (Flat Cable Connector 10), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: C6 (ø6 One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Enclosure: IP67, SI Unit: EtherCAT - 32 Outputs - Connector M12, SI Unit Output Polarity: -COM, Stations: 4 Stations, P, E Port Entry: Both Sides 2~16 Stations, SUP/EXH Block Assembly: Internal Pilot, Built-in Silencer, A, B Port: ø6 One-touch Fitting, Mounting: DIN Rail Mounting, DIN Rail Option: -

Enclosure: IP67, SI Unit: w/o SI Unit, End Plate Type: None, SI Unit Common: Positive Common, I/O Unit Stations: None, Valve Stations: 4 Stations, P, E Port Location: Both Sides, SUP/EXH Block Assy: Internal Pilot, Built-in Silencer, A, B Port Size: 5/32" One-touch Fitting, Mounting: DIN Rail Mounting, w/o DIN Rail, DIN Rail Option: -

Enclosure: IP67, SI Unit: EtherNet/IPâ„¢, 2 Port, End Plate Type: Power Supply with M12 Connector, Max. Supplied Current 2 A, SI Unit Common: Negative Common, I/O Unit Stations: None, Valve Stations: 4 Stations, P, E Port Location: Both Sides, SUP/EXH Block Assy: Internal Pilot, Built-in Silencer, A, B Port Size: ø4 One-touch Fitting, Mounting: DIN Rail Mounting, w/o DIN Rail, DIN Rail Option

V100

(Inch) N1 N3 N7 N9 N11 M5 02 Symbol M5 thread 1/8" 5/32" 1/4" 5/16" 3/8" thread 1 4 Pressure Specifications VQZ100 2(A) port (2) VQZ100 VQZ200/300 Series VQZ200 Metal seal VQZ300 0.1 to 0.7 MPa (1) External pilot pressure range Note) Metric size of One-touch fittings (C) are also available.

Parallel Style Air Gripper Series MHZ

1 N1 1 N1 MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHZ2-25 MHZ2-25 1 N1 MHZ2-32 2 MHZ2-32 1 MHZ2-40 2 MHZ2-40 1 Specifications and dimensions other than the above are the same as the basic type (including narrow type).

0.4

Cylinder port NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.

High-Precision Digital Pressure Switch

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 piping adapter ZS-46-N1 NPT1/8 piping adapter ZS-46-N2 7 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

1 N1 1 N1 11221122112211222 N2 2 N2 2 N2 2 N2 MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D 1 N1 MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D Specifications and dimensions other than the above are the same as the basic type (including narrow type).

0.4

NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.

ZSM1-115/121

ISG Supply pressure normal Supply pressure drop Supply pressure increase ZSM P1 Set value Vacuum P1 P2 Normal filled pressure Insufficient filled pressure Excessive filled pressure P1 P2 n1 n2 n1 n2 P2 Filled pressure Set value Reverse mode AUTO-SHIFT input n1 n2 Time Normal mode Operating normally Operating normally Operating normally ON OFF Time Time ON When the Auto Shift Function is used

Table of Contents

> Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32")

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

VQC

Note 2) Symbols for inch sizes are as follows: N1: 1/8" N3: 5/32" N7: 1/4" NM: Mixed Note) Leave the box blank for the SI unit COM without input block (SD0).

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

(Station 1) Light/Surge voltage suppressor Side A: Orange Side B: Green 18.9 (DIN rail dimension) (62.4) ON ON 43.5 OFF OFF (7.5) 34.2 Switch (when equipped with switch) Internal pilot manifold L: Dimensions n: Stations (n1 + n2) External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 110.5 100 81 15 L n 2 123 112.5 91.5 16 3 123 112.5 91.5 16 4 135.5 125 102 17 5 148 137.5 112.5

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.

PFxx-OMY0005

(When reversed output is selected, the main screen displays [n1]/[n2]).

Cylinder with Lock

Width across flats KB B C V MM BH1 BH2 BH3 TX D E B1 C B ZZ + Stroke S + Stroke H A K BN N1 N MA MB F AL H1 TT B C B1 C B TY With rod boot d e 10.2 f h 10.2 l [mm] Bore size A AL B B1 BH1 BH2 BH3 BN BP C D E F GA GB GC GD GE GF H H1 J 32 22 19.5 46 46 23 38.5 46.5 59 1/8 32.5 12 30 13 37.5 13 37.5 18.5 4 13 47 6 M6 x 1.0 40 30 27 57 52 28.5 42.5 48.5 73 1/8 38 16 35 13 59.5 14 44.5 19.5 4