SMC Corporation of America
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M4 x 14 (4 pcs.) 15 20 24 25 Additional Installation Unit of Electrical Contact Point Part no.

6 Single acting, spring return Piston seal CQ2B12-S-PS Rod seal NBR 12 16 20 25 32 40 50 CQ2B12-S-PS CQ2B16-S-PS CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS CQ2B16-S-PS Gasket CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS Left no. !4. Seal kit includes !4. Order the seal kit, based on each bore size.

6 Single acting, spring return Piston seal CQ2B12-S-PS Rod seal NBR 12 16 20 25 32 40 50 CQ2B12-S-PS CQ2B16-S-PS CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS CQ2B16-S-PS Gasket CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS Left no. !4. Seal kit includes !4. Order the seal kit, based on each bore size.

60 1 2 100 VAC, Hz 200 VAC, Hz 50 60 50 60 3 4 5 6 110 VAC, Hz 220 VAC, Hz 24 VDC 12 VDC 7 240 VAC, Hz 50 60 Port size 50 60 Note 1) CE-compliant: Electrical entry is applicable only for the DIN terminal.

psig (0.34 MPa) 60 0.41 30 0.21 50 0.34 25 0.17 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 40 0.28 20 0.14 30 0.21 15 0.10 20 0.14 10 0.07 10 0.07 5 0.03 0 0.00 0 0.00 0 20 40 60 80 100 120 Flow rate (slpm, N2) 0 4 8 12 16 20 24 28 32 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Switch Characteristics How to Order Contact point configuration Maximum contact point capacity Operating voltage: AC, DC 1a 2 VA(AC), 2 W(DC) 100 V or less 30 X201 IS1000M 12 V to 24 VAC, DC : 50 mA 48 VAC, DC : 40 mA 100 VAC, DC : 20 mA Body size Accessory Maximum operating current Pressure switch X201 Lead wire length: 3 m Regulating pressure range: 0.1 to 0.6 MPa 20 30 40 For ACG20 X202

Adjustment length 26 to 89 M5 x 12 Hexagon socket head cap screw Depth 15 4 x M6 x 1 At lever length 38.1 mm 50 T.T. 30 O.T. 20 P.T. 20 N F.O.F. 4 x 5.1 mounting hole 3 x 1/8 Adjustable rod lever VM830-01-14 Symbol 3.2 stainless steel rod (OUT) 2 10 12 Max. 141.2 M8 x 8 Hexagon socket head set screw 3 (N.C.) 1 (N.O.)

30 40 50 75 100 125 150 175 200 250 300 Reed switches: D-Z7, Z8 Solid state switches: D-Y5, Y6, Y7 Female threads Male threads 180 Single rod Double acting CQ2 200 Double rod New 180 and 200 Compact cylinder variations A wide range of 15 sizes from 12 to 200 Bore size (mm) Compact cylinder series 12 16 20 25 32 40 50 63 80 100 125 140 160 180 200 CQ2 Large bore CQ2 CQS Refer to N320 "CQ2

) EH5 kPa EH5 kPa EPL:25kPa EPH:50kPa -46No.PS-OMT0001CN-E 4 (1)(100 kPa200 kPa) (2) () (1) OUT1 (2) OUT1 1 () (3) OUT2 (4) [F 2](52 ) OUT [EPH] OUT [EPL] (5) -47No.PS-OMT0001CN-E 4 2 [F 0] [F] 2 [Function ][]] F 0(Unit) [ PA] kPa 49 ISA3-F[ 20] ISA3-G[ 50] ISA3-H[ 50] F 1(oUt1) OUT1 50 ISA3-F[ 3] ISA3-G[ 20] ISA3-H[ 20] [ SoG] ON OFF out2[ Ewin] OUT 2ot[ 2_P] F 2

Hygienic Design Cylinder/Basic Type Construction Series HYQ Replacement Procedure is 20, 25, 32 40, 50, 63 P.297 Hygienic Design Cylinder/Basic Type Hygienic Design Cylinder/Basic Type Hygienic Design Cylinder/Basic Type Series HYQ Series HYQ Series HYQ Replacement Procedure is Replacement Procedure is Replacement Procedure is 20, 25 32 to 63 20, 25, 32 40, 50, 63 20, 25, 32 40, 50, 63 20

Hygienic Design Cylinder/Basic Type Construction Series HYQ Replacement Procedure is 20, 25, 32 40, 50, 63 P.297 Hygienic Design Cylinder/Basic Type Hygienic Design Cylinder/Basic Type Hygienic Design Cylinder/Basic Type Series HYQ Series HYQ Series HYQ Replacement Procedure is Replacement Procedure is Replacement Procedure is 20, 25 32 to 63 20, 25, 32 40, 50, 63 20, 25, 32 40, 50, 63 20

D. 9 to 11:P368010-27 At accessory H: (with external scale plate) 100 44 46 IP8100-01 (With terminal box) OUT2.Rc1/4 110 38 192 251 110 40 35 58 218 OUT1.Rc1/4 SUP.Rc1/4 23.5 43 23.5 38 39 11 9 39 OUT2 MPa 0% 50 42 20 162 117 25% MPa 65 A 15 122 ELECTORO PNEUMATIC IP8100 P O S I T I O N E R DA 50% 22.5 75% 100% 125 View A 12 168 8 2 x M8 x 1.25 depth12 Female thread for side mounting 2 x

1/2: 0.62 3/4: 0.78 4 0.60 14 0.73 1.3 5 0.85 20 0.47 0.7 VCW4 3.0 4 7 1.4 33 0.22 0.3 10 2.1 50 0.12 Note 1) Refer to page 17-2-52 in model selection regarding port size and orifice size combinations.

D. 9 to 11:P368010-27 At accessory H: (with external scale plate) 100 44 46 IP8100-01 (With terminal box) OUT2.Rc1/4 110 38 192 251 110 40 35 58 218 OUT1.Rc1/4 SUP.Rc1/4 23.5 43 23.5 38 39 11 9 39 OUT2 MPa 0% 50 42 20 162 117 25% MPa 65 A 15 122 ELECTORO PNEUMATIC IP8100 P O S I T I O N E R DA 50% 22.5 75% 100% 125 View A 12 168 8 2 x M8 x 1.25 depth12 Female thread for side mounting 2 x

~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC Material Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Courtesy of Steven Engineering, Inc. !

20 20 0.5 MPa 0.7 MPa 0.7 MPa 0.7 MPa 10 10 10 0 0 0 5 10 15 0 0 10 20 30 40 60 50 0 10 20 30 40 50 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC33/3B 4, 5/32" ZFC53/5B 4, 5/32" ZFC54/5D 6, 1/4" 0.3 MPa 0.3 MPa 0.3 MPa 30 30 30 0.1 MPa Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 0.1 MPa 0.1 MPa 20 20 20 0.5 MPa 0.5 MPa 0.5 MPa 0.7 MPa 0.7 MPa

valve 17. (2) Loosen the hexagon socket head cap screws to remove the sub-plate 18 19 and the pipe 20.

0.1 3 0.35 8.4 2.0 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 1/4 : 0.58 3/8 : 0.55 1/2 : 0.62 3/4 : 0.78 4 0.60 14 1.1 5 0.85 20 0.7 VCL4 2.0 4 7 1.4 33 0.3 10 2.1 50 0.12 Note 1) Refer to page 17-2-32 in model selection regarding port size and orifice size combinations.