SI Unit for Vacuum Manifold

Pressure value (Pressure range parameter : -100...200 kPa) bit 15...0 Pressure value[kPa] Note 0x0 0.0 0x0001 0.1 The table on the left shows an example when Pressure range parameter ... ...

Modular Type Lubricator Series AL

AL10, 20 AL30, 40, 40-06 AL50, 60 1 8 Body Zinc die-cast Aluminum die-cast Platinum silver Housing Platinum silver Aluminum die-cast Replacement parts Part no. Material Description No.

Electro-Pneumatic Regulator IT1000/2000/4000

o uss cl63n liltrd an the supPly eurrent 4-wire: Input signal of 0-20(mA) Power supply ot l215(V) Current 4-wire: 0-20 mA Input impedance: 200(c,) quivalent 3 TheAir Filterand Nrist SeDaratorshould be maintained periodically.

Air Suction Filter

Model Symbol Port size A B ZFA100 1/8 18 ZFA200 1/4 20 28 -8- 2) Manifold Model Symbol Port size A B ZFA100 1/8 19 18 ZFA200 1/4 24 28 Model Symbol Single unit Note) Number of manifold stations 2 3 4 5 6 7 8 9 10 L1 38 56 74 92 110 128 146 164 182 200 ZFA100 L2 50 68 86 104 122 140 158 176 194 212 L1 48 76 104 132 160 188 216 244 272 300 ZFA200 L2 60 88 116 144 172 200 228 256 284 312 Note

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

0.25 0.20 IC 0.15 ITVX 0.10 PVQ 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 VEF VEP Flow rate (L/min (ANR)) Inlet pressure (MPa) VER ARP40(K) ARP40(K) Rc 1/2 VEA 0.50 0.25 VY1 0.45 VBA VBAT 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point AP100 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

0.20 0.25 0.20 IC 0.15 ITVH 0.10 ITVX 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 PVQ Flow rate (L/min (ANR)) Inlet pressure (MPa) VY1 ARP40(K) ARP40(K) VBA VBAT Rc 1/2 0.50 0.25 AP100 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600

D-F6N/D-F6P/D-F6B

The maximum detectable piston speed is: Auto switch operating range (mm) Time load applied (ms) x 1000 V (mm/s) = In cases of high piston speed, the use of an auto switch (D-F5NT, F7NT, G5NT, M5NT, M5PT) with a built-in OFF delay timer ( 200 ms) makes it possible to extend the load operating time.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

50.8 43.3 Type A 25 6.5 49 (20) G3/8 [3(R) port] (21) Type E 48.9 LOCK PUSH 4 VP500/700 Series Dimensions VP717 Mounting hole (for M8) Manual override ( Locking type: Press,) then rotate it.

VXZ

L With surge voltage suppressor H 100 VAC J 110 VAC K 200 VAC L 230 VAC M Conduit terminal 24 VDC With surge voltage suppressor N 100 VAC P 110 VAC Q 200 VAC R 230 VAC S Conduit 24 VDC With surge voltage suppressor T 100 VAC U 110 VAC V 200 VAC W 230 VAC Faston terminal Y 24 VDC Z Other voltages For other special options, refer to pages 20 and 21. 24 VAC 48 VAC 220 VAC 240 VAC 12 VDC Special

VNH

Gasket material A B NBR seals FKM seals Rated voltage Nil Air operated 3 2 1 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Valve size Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 8 1 2 3 4 Rc Rc Rc Rc1 10A 15A 20A 25A 1 2 3 4 4

Electric Actuator/Rod Type LEY16, 25, 32 Series LEY Step Motor (Servo/24 VDC) Servo Motor (24 VDC)

LEY25: 200 or less LEY32: 100 or less 3. In case of [Double clevis], use the actuator within the following stroke limit. LEY16: 100 or less LEY25: 200 or less LEY32: 200 or less 4. G Head flange is not available for LEY32. Nil 1 3 5 8 A B C Without cable 1.5 3 5 8 !

to 55 (No freezing)90 or less (No condensation)20 to 65 (No freezing)90 or less (No condensation)Between the housing and SG: 10 (500 VDC)800

to 55 (No freezing)90 or less (No condensation)20 to 65 (No freezing)90 or less (No condensation)Between the housing and SG: 10 (500 VDC)800

ATX-OM-F003E

1612 1038 366 150 1203 276 216 315 264 219 234 305 100 140 66 140 139 6.0 18 2 3/4 1 375 426 HAW75-20 2112 1538 366 150 1703 276 216 315 264 219 234 305 100 140 66 140 139 6.0 18 2 3/4 1 375 426 HAW110-30 1724 950 500 72 1210 365 267 303 356 200 Note 1 70 Note 1 195 8.0 18 3 1 1 1/4 395 459 Note 1) HAW110-30 is 220 HAW Series 6 4 1) Outer dimensions ATX-OM-F003E Water Cooled Aftercooler

Mist Separator Regulator

Tubing for AD27-D: I.D. 2.5 (3/32") or larger, Length 5 m (200 inch) or shorter Tubing for AD37, 47(N)-D: I.D. 4 (3/16") or larger, Length 5 m (200 inch) or shorter Tubing for AD38, 48(N)-D: I.D. 6.5 (1/4") or larger, Length 5 m (200 inch) or shorter Air Source Warning (1) Use clean air.

Ｍ icro Mist Separator Regulator

Tubing for AD27-D: I.D. 2.5 (3/32") or larger, Length 5 m (200 inch) or shorter Tubing for AD37, 47(N)-D: I.D. 4 (3/16") or larger, Length 5 m (200 inch) or shorter Tubing for AD38, 48(N)-D: I.D. 6.5 (1/4") or larger, Length 5 m (200 inch) or shorter Air Source Warning (1) Use clean air.

Compact and Low Profile Design Rodless Cylinder Series MY2H/HT, MY2C, MY3A/3B, CY1F

Allowable moment (Nm) Load weight (kg) m3 40 20 30 20 10 10 0 0 16 25 40 16 25 40 Bore (mm) Bore (mm) MY2C MY1C MY2C MY1C 2 Magnetically Coupled Rodless Cylinder/Low Profile Series CY1F Compact Max. 29% reduction in height (mm) Height Series 10 15 25 CY1F 28 34 46 46 63 CY1H 39.5 CY1H CY1F Short body Max. 31% reduction in overall length Reduction in length is 22% over MY2H cylinder CY1F

•

U~ 01 ,-"" 1/6 7 (09 2(12.7 150 ,,, 12 to 14 17 17.5) 200 31B 221024 19 200 2. Grasp Ihe tube and push it in slowly, inserting it securely all the way into (he filling. 1/2 281030 2423.8) 200 Note} Numbers Inside ( ) are NPT Ihread dlmensJ()ns IN m_ l0 2kgf em 3.Aher fully inserting the tube, pull on il lightly to confirm that it WIll nol come out.

High Pressure Coolant Valve

Pilot Operated Solenoid Valve Specifications VO307D DZ1(-Q) DIN terminal Pilot solenoid valve Electrical entry Coil rated voltage (V) AC (50/60 Hz) DC 100 V, 200 V, Other voltage (Semi-standard) 24 V, Other voltage (Semi-standard) 15 to +10% of the rated voltage Allowable voltage fluctuation Temperature rise 50C or less (When rated voltage is applied.)

Thermo-chiller Series HRZ Fluorinated Fluid Type

steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass 3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation 10% 20 14 30 23 30 20 25 60 46 Refer to page 94.