MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.

Air Slide Table Series MXP

) 40 8 8 8 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.03 0.04 MXP8-10 MXP8-20 MXP8-10 MXP8-20 0.06 MXP8-10 MXP8-20 MXP8-10 MXP8-20 0.05 MXP8-10 MXP8-20 MXP8-10 MXP8-20 0.03 0.02 0.04 0.02 0.03 0.02 0.01 0.01 0.01 0 0 0 20 40 60 Load (N) 20 40 60 Load (N) 20 40 60 Load (N) 10 10 10 L = 100 mm L = 100 mm L

VZ3000

actuation VFN VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 Bore size Series CA1 Pressure 0.5 MPa Load factor 50% Stroke 400 mm Average speed (mm/s) Series 100 40 50 63 80 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 800 700 600 500 400 300 200

•

(DiH erEffl surfaces 110 100 105 15 Same surfOlce), W~h 1 pc D-A90 10 41 15+ 40 (0 2) 100 + 40(1\ 2 4) 110 -+ 40 1 05+40~ 2 2 2 With n pes. (n:: 4. 8, 12, 16 .j (n :: 4, 8, 12. 16 .. ) (n = 4, 8. 12. 16) (n:: 2, 4. 6. 8 ) W ith 2 pes. (Dilferem surfaces 85 75 80 ' 0 Same sunacg).

90

Vacuum pressure [kPa] 80 Vacuum pressure 60 Suction flow (Silencer exhaust) 40 Air consumption 20 Port exhaust Silencer exhaust 0 0 10 20 30 40 Suction flow [L/min (ANR)] ZK210 Flow-rate Characteristics Exhaust Characteristics 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 0 10 20 30 40 50 60 70 80 90 100 100 Vacuum pressure [kPa] Vacuum pressure [kPa] 80

New

48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14 15 15 22.2 19 15 22.2 19 18 18 22.2 20.6 18 22.2 20.6 6.4 6.4 7.6 6 6.4 7.6 6 27 29.5 29.5 29.5 32 32 32 44 54 52.5 53.5 58 56.5 57.5 30 32.5 32.5 32.5 35 35 35 30.5 40 38.5 39.5 44.5 43 44 2 11 9 9 3 11 Conduit terminal DIN terminal Size Port size P Q R S Q

Rotary Gripper Series MRHQ

0.25MPa 0 20 40 60 80 100 0 20 40 60 80 100 MHY Gripping point L mm Gripping point L mm MHW MRHQ25S MRHQ25C 140 -X Pressure 0.7MPa Pressure 0.7MPa 80 120 Pressure 0.7MPa Pressure 0.7MPa 0.6MPa 0.6MPa MRHQ 100 0.6MPa 0.6MPa 0.6MPa 60 Gripping force N 0.5MPa 0.5MPa Gripping force N 80 MA 0.5MPa 0.5MPa 0.5MPa 0.4MPa 0.4MPa 40 60 0.4MPa 0.4MPa D0.3MPa 0.3MPa 40 0.3MPa 0.3MPa 20 0.25MPa 0.25MPa

RLQ

RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

Pilot Operated

Operating Fluid and Ambient Temperature Tightness of Valve (Leakage Rate) Leakage rate (With oil pressure) 1 4 to 1 32A to 50A Operating fluid temperature (C) Solenoid valve option Ambient temperature (C) Seal material Power source A, H D, N 5 to 100 FKM 0.2 cm3/min or less 1 cm3/min or less 10 to 60 10 to 40 5 to 60 5 to 40 AC DC Note 1) Dynamic viscosity: 50 mm2/s or less Note 2) Since

Transfer

10 20 30 40 50 100 200 300 Fs Fs + mgs Fsmgs 400 500 Absorbed energy E W2 max.

Rotary Actuator

Size: 30, 50, 63, 80, 100 Size: 30, 50, 63, 80, 100 90, 180 90, 180, 100, 190 90, 180 90, 180, 100, 190 30 50 to 100 30 50 to 100 Rotating angle Lightweight body by changing the body and the cover shape.

Microspeed Cylinder

, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Rubber bumper (

Table of Contents

Series CQ2 Compact Cylinder: Long Stroke Type Double Acting, Single Rod 32, 40, 50, 63, 80, 100. How to Order . Precautions. Specifications. Construction. Dimensions . Series RQ Compact Cylinder with Air Cushion 20, 25, 32, 40, 50, 63, 80, 100. Features. Series Variations. Series RQ Compact Cylinder with Air Cushion Double Acting, Single Rod 20, 25, 32, 40, 50, 63, 80, 100 .

End Lock Cylinder Series CBG1

, 50, 63 10 3 Thread tolerance JIS class 2 M5 x 0.8 x 40 or more 80, 100 24.5 3 Cushion Remove the bolt during normal operation.

Rotary Table/

A Displacement MSQ10 MSQB1A MSQB10 (Basic type) 100 Displacement m Displacement m 400 90 80 350 10 20 30 40 MSQA10 (High precision type) 70 60 0 6 5 4 3 2 1 0 5 10 15 20 25 30 Load N Load N MSQ20 MSQB2A 300 100 MSQB20 (Basic type) Displacement m Displacement m 250 80 10 20 30 40 190 200 60 MSQA20 (High precision type) 40 0 0 10 20 30 40 50 10 8 6 4 2 Load N Load N MSQ30 MSQB3A MSQB30 (Basic

CNS

500 400 300 200 100 100 500 400 300 200 100 CNA Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 3000 3000 CLQ 2000 2000 MLGP 160 140 RLQ 1000 1000 Load weight: m (kg) Load weight: m (kg) 700 800 900 700 800 900 125 MLU 600 600 160 500 500 ML1C 400 400 140 320 125 300 300 D200 200 -X 280 20100 100 100 500 400 300 200 100

Series MLGP

to 100 Series MLGPM Series MLGPL 63 40 to 63: Over 100 stroke 50 to 100 80, 100: Over 200 stroke Type F Type B (Extension locking) (Retraction locking) Section B-B Section B-B Section A-A *Above figure show the unlocked state.

V

(i) Side Entry Single Sub-base for use with the Base Mounted Valve (Type 40). (ii) 2-10 Station Type 20 Mmanifold for use with the Body Ported Valve (Type 20). (iii) 2-10 Station Type 40 Side Entry Manifold for use with the Base Mounted Valve (Type 40). (iv) 2 10 Station Type 40 Bottom Entry Manifold for use with the Base Mounted Valve (Type 40).