Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

55.6 28.6 24 R 1/2 52.5 102 109 25 38.2 20.9 Note 1) Reference dimension for threads after installation Note 2) 1 is the weight for type AS21FPQ (brass + electroless nickel plated), 2 is the weight for type AS21FPG (SUS304). 4

Compact Electric Actuator Series LG1

/ Construction 9 5 bn bn 4 8 1 3 2 bs A A' bl bq br bm bt bo bp bk 7 View A-A' 6 Material Note Parts list Material Note Parts list No.

VEX-OMY0001

NXT013-3 VO307K-1 2) 3) VEX322 VEX342 Rc A 1/8 1/4 F G VVEX2 VVEX4 B 1/4 3/8 N NPT ( ) VEX1-17 VEX4-5 C 1/2 T NPTF 11 No.VEX-OMY0001 (2) () 3 2(A) 23(P2) 12(P1) a,b 12(P1),23(P2) (2) a 12(P1) 1(P)2(A)3 3(R) 3(R) b 23(P2) 2(A) 2(A)3(R)1 1(P) 1(P) 12(P1) 1 2 3 23(P2) 4 5 6 7 8 POM 9 -12No.VEX-OMY0001 () () 3(R) 2(A) 1(P) 1(P) 2(A) 3(R) () a b P1P2 2(A) 1(P)

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Note 2) Intermediate strokes are available as a special order. Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

XLG Series

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. 7 XL*-OMI0010-E 3. Specifications 3-1.

Clean Room Rodless Cylinder Series CYP ø15, ø32

adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20

ZSM1-115/121

It may result in a malfunction or damage. 2. Operating fluids are either air or inert gas exclusively.

XLGR Series

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of DuPont Performance Elastomars. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. Grease for maintenance Part no.

XMC/XYC Series

XYC series / Straight Valve 8 XM-OMP0002-A 4-2.

KC

thread installation. 19.5 1 8 1 4 1 8 1 4 3 8 1 4 3 8 3 8 1 2 6 6.8 6.8 19 Width across flats 8 <R> 14 K 21.5 13.1 8 16.2 M5 x 0.8 17 <R> Applicable tubing M 24 20.4 10 25.6 17 19 22 H 25.5 30.4 12 35.4 D MS Connection thread (With sealant) Male Elbow: KCL T H (width across flats) Applicable A M Effective area (mm 2) Nylon Urethane 1.9 1.9 6 11 7 13 21 16 24 37 29 38 63 81 Connection thread

XMA/XYA Series

Note2) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of Dupont Co.,Ltd. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. Note3) MITSUBISHI CABLE INDUSTRIES, LTD. 3.

Heavy Duty Stopper Cylinder

2 i !3 @7 !8 !9 !5 u o !4 t #8 @2 @1 y q #9 $0 Single acting (TL, TM) Double acting spring type (BL, BM) !0 r #7 @5 !1 !

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

(mm) 4 6 8 10 12 (1) AS221FE-01 AS231FE-01 20, 25, 32 R 1/8 AS221FE-02 AS231FE-02 20, 25, 32, 40 R 1/4 AS321FE-03 AS331FE-03 40, 50, 63 R 3/8 AS421FE-04 AS431FE-04 63, 80, 100 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.

High Vacuum L Type Valve

Barrel Perfluoro R is a registered trademark of Matsumura Oil Co.,Ltd. Kalrez R is a registered trademark of E.I. du Pont de Nemours and Company or its affiliates. Chemraz R is a registered trademark of Greene, Tweed Technologies,Inc. ULTIC ARMOR R is a registered trademark of Nippon Valqia Industries, Ltd. 6 XL*-OMJ0005-C 3. Specifications 3-1. Valve specifications 3-2.

XMH/XYH Series

Note2) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of Dupont Co.,Ltd. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. Note3) MITSUBISHI CABLE INDUSTRIES, LTD. 5 XM-OMP0005-A 3.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

in a manifold.

VT325

Series VT325 Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Valve model Grommet Port size C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT325 VT325V (Vacuum spec. type) VT325 VT325V (Vacuum spec. type) 0.55 kg (For AC) 0.60 kg (For DC) Note) Values for a single valve unit.

Micro-Mist Separator with Prefilter Series AMH

3/8 1/2 3/4 1/2 3/4 1 3/41 1 1 1/2 1 1/2 2 Port size 1/8 1/4 3/8 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. ftow capacity at a pressure of O.7MPa{7.1 kgflcm').

XL-OMY0002

B2401-G155 ** S XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A XLD63-2-9-1A ** XLD80-2-9-1A ** XLD100-2-9-1A ** XLD160-2-9-1A ** AS568-020V AS568-020 ** 1) FKM:No.1349-80** AS568-030-XN1 2) 5 P11 3) 7 XL-OMY0002 Barrel ULTIC ARMOR Perfluoro Kalrez Chemraz VMQ FKM for R R R R EPDM PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1