Function: 2 (2 Position Double), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Pressure Specification: Standard (0.7MPa), Coil Specification: Standard, Voltage: 2 (200VAC 50/60Hz), Lead Wire: G (Grommet Lead Wire 300mm), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: Non-locking Push Type, Port Size: 02 (1/4)

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: TW8 (1/2 Inch Tube Weld), Connections, Outlet: TW8 (1/2 Inch Tube Weld), Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No

Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 5 (Remote Sensor Unit), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: F (G), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: Flow Adj.

Size: 2 (200), Piping and Mounting: 2 (Bottom Ported Body Mount), No.of Positions: 2 (2 Position), Thread: Rc(PT), Port Size: 02 (1/4)

Size: 2 (200), Piping and Mounting: 2 (Bottom Ported Body Mount), No.of Positions: 2 (2 Position), Thread: N (NPT), Port Size: 02 (1/4)

Body Class: 2 (Class 2, Orifice ø4), Valve Type: 2 (Double Acting), Port Size: 02 (1/4, Class 2), Thread: R, Rc, Material: C (Body: PFA, Endplate: PPS, Diaphragm: PTFE), Option: 1 (Flow Rate Adjustment)

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Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316 SS; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: 316 SS), Range Options: A (Sub-atmospheric), Ports: 2P [2 Ports (1-In; 2-Out)], Connections, Inlet: 8 (NPT 1/2 Inch), Connections, Outlet: 8 (NPT 1/2 Inch), Gauge Port, Extra Bottom Outlet: No Gauge Port, Gauge Port, Inlet: No Gauge Port, Gauge

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: Hastelloy® C-22), Ports: 2P [2 Ports (1-In; 2-Out)], Connections, Inlet: 8T (1/2 Inch Compression), Connections, Outlet: 8T (1/2 Inch Compression), Gauge Port, Outlet 3: No Gauge Port, Gauge Port, Outlet 4: No Gauge Port, Pressure Gauge Unit: psig/bar (or None in Case of no Gauge

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: Hastelloy® C-22), Ports: 2P [2 Ports (1-In; 2-Out)], Connections, Inlet: 8 (NPT 1/2 Inch), Connections, Outlet: 8 (NPT 1/2 Inch), Gauge Port, Outlet 3: No Gauge Port, Gauge Port, Outlet 4: No Gauge Port, Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Seat Material:

Type: 2 (2 Port Valve, Cleaning Valve), 2 Port Valve Mountable Number: 02 (2 pcs., color), 3 Port Valve Mountable Number: 00 (No 3 Port Valves Used), Pilot Port Fitting Size: C4 (ø4 One-touch Fitting, Antistatic)

Type: 2 (2 Port Valve, Cleaning Valve), 2 Port Valve Mountable Number: 02 (2 pcs., color), 3 Port Valve Mountable Number: 00 (No 3 Port Valves Used), Pilot Port Fitting Size: C6 (ø6 One-touch Fitting, Antistatic)

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

KPQ/KPG

M M5 M5 x 0.8 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection H/DL L/LL KC Applicable tubing O.D. Same dia. tubing 4 6 8 10 12 04 06 08 10 12 4 6 8 10 12 KK Tubing (rod) connection Different dia. tubing (plug-in reducer) KK130 DM Construction KDM KB KR KA KQG2 KG KFG2 MS KKA M5 type Male connector KP KP Description Material Component Parts LQ No.

Size: 2 (200), Piping and Mounting: 2 (Bottom Ported Body Mount), No.of Positions: 2 (2 Position), Thread: N (NPT), Port Size: 02 (1/4), Rod Handle: R (Handle Position 180° Change)

Stations: 02 (2 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: F (G), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 02 (2 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: F (G), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 02 Stations, Port Size: Top Ported Elbow w/ø1/4" One-touch Fitting, SI Unit: EtherNet/IPâ„¢, 2 Port, End Plate: 2 [Power Supply w/M12 Connector (Max. supplied Current 2 A)], SI Unit Common: -COM, I/O Unit Stations: -, Option 1: -, DIN Rail Length: -, Option 2: -

Stations: 02 Stations, Port Size: w/ø1/4" One-touch Fitting, SI Unit: EtherNet/IPâ„¢, 2 Port, End Plate: 2 [Power Supply w/M12 Connector (Max. supplied Current 2 A)], SI Unit Common: -COM, I/O Unit Stations: None, Option 1: w/DIN Rail, Rail Length Standard, DIN Rail Length: -, Option 2: -