,,: ,.

KQ2C Caps P Plugs Q Cartridge KR Fitting Boot . . . . . . . .6 .7 .7 .7 P .8 .8 .9 .9 o 't0 1 0 1 0 1 1 1 1 1 1 1 2 Spucial [nnlhunilions Page 14 IIU lrlylon lltliltg Page 15 Bmss Phe tittittg$ pase N i p p l e s . . . . . . . . . 1 7 Cdinlinars -. -14 Bushings Aalaolers 1 8 '18 1 q Ts6s .20 .20 Pftr^q 21 SAE 45" Flares . -..22-23 .24 General Assembly..,.. lmoortant Oo's and Dont's Chemical

CLQ

(Rail Mount) 157 245 403 629 982 1559 2514 3927 M5 x 0.8 Rc 1/8 Rc 1/4 Bore size (mm) Bracket no.

Compact Guide Cylinder

robots Part 1:Robots etc.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

socket head taper plug) 2-P (Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 Rc 1/8 Rc 1/4 Model MY2H16G MY2H25G MY2H40G MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5

MTS

7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !

CRQ2

E = mV 2 1 Formula (1) : Kinetic energy : Load mass : Speed Figure 1. Linear motion E m V Rotary actuator I = mr m: Mass (kg) (However, the weight of the L section is ignored) E= I Formula (2) 2 1 = mr 2 1 This indicates the moment of inertia with respect to the rotation axis of a mass "m" which is a distance "r" from the rotational axis.

Compact Cylinder with Solenoid Valve/

26 23.3 7 40 5.4 M6 x 1 5 to 100 46.5 42 0.2 40.5 Note 2) 48.5 Note 2) 10 to 100 64 62 53.4 7.5 M6 x 1 32 29.7 8 50 6.6 M8 x 1.25 50 0.2 46 10 to 100 77 74 59.6 7.5 M6 x 1 38.5 35.4 8 60 9 M10 x 1.5 54 Note 1) The dimensions (A + stroke) and (B + stroke) for 5 mm stroke will be the same as those for 10 mm stroke.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Description Material Body A Elbow body Handle Body B Needle Gasket Seat ring Lock nut U seal Cassette Seal O-ring O-ring O-ring O-ring Spacer Note PBT PBT PBT Brass Brass Stainless steel, NBR Brass Brass(2) PBT PBT Brass Brass Stainless steel, NBR Brass Brass(2) q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 q w e r t y u i o !0 !1 !2 !

Hand Valve Series VH

(R) 1 (P) 1 (P) 25 17 2 4-Rc1/4, 3/8, 1/2 4-Rc3/4 VH43l-02 to 04 (Bottom piping) VH43l-06 (Bottom piping) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc3/4 4-Rc1/4, 3/8, 1/2 3.6-13 Hand Valve Series VH Precautions Be sure to read before handling.

CU

4 q w r !3 !0 !2 i o !5 e y !1 Replacement parts: Seal kits Parts list Seal kit no. No. Description Cylinder tube Bore size Material No. of pcs.

Electro-Pneumatic Proportional Valve Series VEF/VEP

Without sub-plate 1 2 3 Nil 02 03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 2 0.1 to 0.9MPa 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2(A) 1/4 3 3/8 2(A) 2(A) 1(P) 3(R) 1(P) 3(R) 03 04 06 25 3/8

Ejector Valve Unit Series ZYY/ZYX 1

Series ZYX3000 Series ZYY3000 13-8-1 2 Electronic Pressure Switches Precautions 1 Be sure to read before handling. Wiring Design & Selection Warning Warning 1. Confirm wire colors and terminal numbers when wiring is performed.

Speed Controller with

2 t i q o !0 !1 i q o !0 !1 Component Parts No. Description Body A Handle Body B Needle Seat ring Needle guide Material Note No.

CG1

1 !2 !3 !4 !5 !6 !7 !8 !

q"s

P S I : 0 . 1 N d r a ' . k P a : 1 Ambient and lluid temoeralure 0 to 50'C {with no condensation) Enclosure tP65 Hated pressure I Weight tw10trn ADorox. 250 a {without options) tw20t Aoorox. 350 q (without options) tws0 Aoprox. 645 q (without options) R = ='5 Note 1) Please refer to graph 1, relation lo lhe ditferences belween lhe sel pressure and input.

Modular Type Lubricator Series AL

Standard specifications AL30 AL40 AL60 AL10 AL40-06 AL20 AL50 Model Port sizes 1/4, 3/8 1/4, 3/8, 1/2 1 M5 x 0.8 3/4 1/8, 1/4 3/4, 1 Fluid Air Proof pressure 1.5MPa Maximum operating pressure 1.0MPa 1/4: 30 3/8: 40 1/2: 50 Note 1) 1/4: 30 3/8: 40 220 4 50 15 190 Minimum dripping flow rate [L/min (ANR)] Oil capacity (cm3) 55 135 7 135 25 135 135 Recommended lubricant Class 1 turbine oil (ISO

VXR21/22/23

S L, Z S L, Z 1 1 1 1 4 1 2 PB AC 2 Ordering example (Example) Series VXR22, Rc 1 1/4, 200 VAC, Conduit terminal (Part no.)

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

Compact Vacuum Ejector Series ZQ

Refer to How to Order ZQ1R-1-BSB-AS ZQ1L-1-BSB-AS 1 1 End block R 2 End block L 3 ZQ13M-Note) Ejector assembly 4 ZQ-3-005 ZQ-3-009 Ejector body gasket for manifold 5 Exhaust block gasket 6 Note) Refer to page 2 for detailed description of How to Order. How to Order Hexagon Socket Head Cap Screw Working procedure Disassembly Loosen and remove the hexagon socket head cap bolts q.