35 37 80 150 150 72 190 390 575 893 1038 1538 950 35 35 138 170 276 276 365 203 203 266 324 324 324 473 83 83 212 258 366 366 500 1 2 1 2 1 1 2 2 3 1 1 1 1 1 1 4 267.3 18
" x 3/8" 1/2" x 3/8" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 50 to 95 F (10 to 35C) (no condensation) Temperature Wetted parts material FEP , Stainless steel 304, Stainless steel 316 Facility water Max. operating pressure 73 psi (0.5 MPa) Tube size IN/OUT: FEP tube 3/8" x 1/4" Flow rate 1.3 to 2.6 gpm (5 to 10 L/min) Ambient temperature/humidity Temperature: 50 to 95F (10 to 35C), Humidity: 35
34 47 47 2.3 2.3 2.3 2.3 3.2 3.2 40 53 70 70 90 90 8.4 13 12.5 12.5 13 13 5.4 6.5 8.5 8.5 11 11 22 23 26 25 35 35 27 35 52 52 66 66 30 41 50 50 70 70 20 26.7 35.5 35.5 45 47.5 25 35 40 40 30 30 30 38.4 38.4 20 26.7 35.5 35.5 45 47.5 9.8 14 18 20 24 24 91.4 121.9 153.9 155.9 226.9 240.9 40 53 70 75 90 95 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1070 A
(mm) Model CXS15-10 S SS ZZ Z 10 77.5 96.5 25 20 87.5 106.5 25 30 97.5 116.5 35 40 107.5 126.5 35 21-/2210-/11-/12CXS15-20 CXS15-30 CXS15-40 CXS15-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 117.5 136.5 45 21-/2210-/11-/12856 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS20, CXSL20 10-/11221221ZZ S 12 12 SS 25 Z 2 x 5.5 through 6 30 1 M8 x 1.25 x 6 L (Hexagon socket set screw
AP502 AP506 0.1 0.4 psig (0.0028 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop AP510 Option Other Parameters HF Cv Supply pressure effect Wetted Parts Material Flow Characteristics AP500 100 psig (0.69 MPa) Inlet pressure: 30 psig (0.21 MPa) S SH Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat 316L SS secondary remelt Electropolish + Passivation 35
L 1.25 P=12.5 5.25 7.5 25 35 5.5 1.5 L Dimension L=12.5 x n+10.5 No. L dimension 1 23 2 35.5 3 48 4 60.5 5 73 6 85.5 7 98 8 110.5 9 123 10 135.5 No. L dimension 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 No. L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.
+ 30 (n 2) 10 35 100 Note) For cylinders with two D-A93/M9/M9W auto switches.
Other Parameters HF Cv Supply pressure effect 0.15 0.75 psig (0.0052 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Wetted Parts Material Flow Characteristics AZ1000HF 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) S SHP Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat 316L SS Electropolish + Passivation 0 5 10 15 20 25 30 35
MK(2) 14.5 mT Magnetic field resistance Symbol Specifications 10.8 to 13.2 VDC (Power supply ripple: 1% or less) Power supply RS Q G -XC18 NPT finish piping port 40 mA Current consumption RS H A 0.1 mm/pulse Resolution Model Note) 0.2 mm Accuracy RZQ Open collector (Max. 35 VDC, 80 mA) Output type Bore size (mm) Rod Action Action Series Type A/B phase difference output Output signal MI W
.~--' ) 10 26.5 25 26.5 D-G5 K5 type G 35+30(n-2) 35 100 100+ loo(n2) i D-A31ype 1><>3 ' K3 type 50.5 ~Hs 38 43.5 1.5 1.5 A 0 DA3 type 24.5 24.5 23 B 35+3O (n2) 5O+5O(n 2) 35 55 D-A4 type D-G3K3 type !:; HS 71 .5 77 84 1.5 0 1.5 A 24.5 23 24.5 B DA4 type o 82.5 95 ~ H s 88 c==.
Stroke (mm) 20 45 25 51 31 Auto switch operating range Auto switch operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 11-/22-MXP12 11-/22-MXP12 3 5 11-/22-MXP16 11-/22-MXP16 832 Air Slide Table MXP/MXPJ6 11221122Dimensions: MXPJ6 5 C 11-/22-MXPJ6-5 depth 2.5
+ 30 (n 2) 10 35 100 Note) For cylinders with two D-A93/M9/M9W auto switches.
10 62 35 66 39 65 190 10 30 10 68 39 72 43 50 190 10 24 10 83 49 87 53 Operating angle m: Value of the operating range of single auto switch (Lm) as represented by rotation angle for shaft Hysteresis angle: Value of the auto switch hysteresis as represented by angle Note) Since the above values are only provided as a guideline, they are not guaranteed.
70 23 82 35 82 Mounting pattern w B2 A2 5 40.5 99.5 28.5 111.5 40.5 111.5 Note 1) Adjust the auto switch after confirming the operating conditions in the actual setting.
Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N
10.5 22 40 35 10 M5 56 75 2.3 30 6.5 10.5 31 37 VXS24 1/2 28 70 37.5 94 35 14 22 48 35 14 M5 56 75 2.3 34 6.5 10.5 35 41 VXS25 3/4 33.5 71 38.5 105.5 40 17 24.5 62 33 15.2 M6 70.5 92 2.3 39 6.5 10.5 43 46 VXS26 1 42 95 49.5 111.5 40 20 24.5 66 37 17.2 M6 70.5 92 2.3 41 6.5 10.5 45 48 13.5 Electrical entry Grommet DIN terminal Conduit terminal Conduit Q R Q R S Q R S T Q R VXS23 1/4, 3/8
35 138 170 276 276 365 270 480 704 1056 1203 1703 1210 35 35 37 80 150 150 72 395 83 83 212 258 366 366 500 190 390 575 893 1038 1538 950 1 2 1 1 2 1 1 1 1 2 2 3 1 1 1 4 14-15-8
Note 3) Clevis pins and snap rings are included with the double clevis type. 63 80 100 2 Series RQ Weights Basic weights Additional weights Unit: g Unit: g Bore size (mm) Magnet Double end tapped Bore size (mm) Standard stroke (mm) 25 6 12 8 181 180 171 127 32 11 6 26 17 143 180 165 151 100 35 45 175 116 40 13 6 27 17 155 214 198 196 20 5 6 4 159 143 137 92 50 14 6 53 32 243 373 348 393
MK(2) 14.5 mT Magnetic field resistance Symbol Specifications 10.8 to 13.2 VDC (Power supply ripple: 1% or less) Power supply RS Q G -XC18 NPT finish piping port 40 mA Current consumption RS H A 0.1 mm/pulse Resolution Model Note) 0.2 mm Accuracy RZQ Open collector (Max. 35 VDC, 80 mA) Output type Bore size (mm) Rod Action Action Series Type A/B phase difference output Output signal MI W
38 34 27 29 26.5 Data 40 44 35 36 42 38.5 41.5 37.5 30.5 32.5 30 50 50 41 42 48 44.5 47.5 43.5 36.5 38.5 36 63 56.5 47.5 48.5 54.5 51 54 50 40 42 39.5 10-10-13 14 Series RZQ Mounting of Auto Switch Follow the procedures below to mount auto switches.