LEC-OM032xx

LED display.31 9. 1 LED display.31 9. 2 Controller IF communication status and LED display.32 10. Mode.33 10. 1 Outline.33 10. 2 Step data input mode .33 10. 3 Numerical data input mode.33 10. 4 Data writing mode.35 11. Memory map .36 11.1 Memory assignment.36 11.2 Controller IF flagIN Data.40 11.3 Gateway unit status flagIN Data.40 11.4 Gateway unit control flagOUT Data.42 12.

Series MLGP

Manual unlocking P14 10. Maintenance P16 10-1. Disassembly/ Replacement 10-2. Maintenance 10-3. Construction 11. Auto switch P19 11-1. Applicable auto switches 11-2. Minimum auto switch mounting stroke 11-3. Auto switch proper mounting position (detection at stroke end) and its mounting height 11-4. Auto switch operating range 11-5.

VXD21/22/23

The allowable voltage fluctuation rate is 10% of the rated voltage value for both AC and DC.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

AS321FE AS331FE AS421FE AS431FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

0.31 0.28 0.31 0.28 U W M5 x 0.8 U W 597 4 Port Direct Operated Poppet Solenoid Valve 10-VQD1000 Dimensions L plug connector: 10-VQD1121-L-M5 M plug connector: 10-VQD1121-M-M5 Directional Control Valves Air Grippers Modular F.

AIR COMBINATION

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model Descriptio For AC10*-A For AC20*-A For AC25*-A For AC30*-A For AC40*-A For AC40*-06-A Note1) Pressure gauge Standard G27-10-01 G36-10-01 G46-10-01 Round type G27-10-01 Note2) G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L Option G36-4-01-L G46-4-01-L

Check Valve Series AK 1

Inch size Metric size Port size 4 04 03 5/32 M5 M5 x 0.8 Thread type 6 06 07 1/4 U10/32 10-32 UNF 8 08 09 5/16 Metric thread (M5) 01 1/8 Nil 10 10 11 3/8 Unified thread (10-32 UNF) 02 1/4 12 12 13 1/2 R 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tubing O.D./Port Size Combinations From male thread to One-touch fitting A Metric size Inch size Applicable tubing O.D.

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Air Pilot Operated

Operator Buna N 10 Recssed Non-Lockihg OPeralor PB 0103 61 l Scrws' Pilot Covers (4) Hold Down Bolt (8.32 x 1 Y'!')

ZL3-OM00601

Vacuum Pressure switch for vacuum with for compound pressure switch energy saving function pressure Rated pressure range [kPa] -101 to 0 -100 to 100 Set / display pressure range [MPa] -101 to 10 -105 to 105 Proof pressure [kPa] 500 Lowest configurable increment [kPa] 0.1 Applicable fluid Air, non-corrosive gas and non-flammable gas Power supply voltage: [VDC] 12 to 24 10%, ripple (p-p), 10%

Air Pilot Operated Series NVSA

Operator Buna N 10 Recssed Non-Lockihg OPeralor PB 0103 61 l Scrws' Pilot Covers (4) Hold Down Bolt (8.32 x 1 Y'!')

Unit Manifold Valve

Stations Fitting Barb fitting One-touch fitting PV060-10-8A PV060-10-7A PV060-10-10A PV060-10-9A 4 stations Connector cable length 8 stations Nil 6 10 300 mm Barb fitting is included. One-touch fitting is mounted on the plate. 600 mm Note 1000 mm Insertion error checking ridge If only the fitting is needed, order with one of the part numbers below. e Fitting Part No.

Clean Regulator/Fluororesin Type

1.2 Weight (kg) 0.10 0.28 1.3 Particulate Generation Characteristics Flow-through Characteristics Particle concentration (particles/mL) Particle diameter: 0.1 m or larger 400 1000 350 Value of specific resistance to that of supplied DI water Resistivity (km) 300 100 250 200 150 10 100 50 0 1 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Time of water flow (min) Measuring time (min) Test method

MHS

10 15 N 1 45 130 204 335 524 g 530 770 1,330 2,300 4,000 1) 0.5MPa MHSH3-32DB MHSH3-40DB MHSH3-50 DB MHSH3-63 DB MHSH3-80 DB mm 5 5 10 10 15 N 6~10 11~15 20~25 29~34 49~59 g 500 740 1,290 2,250 4,000 g 32 40 50 63 80 MHSHJ3-D 430 600 1,020 1,710 3,040 MHSHJ3-DA 550 800 1,380 2,360 4,120 MHSHJ3-DB 520 770 1,340 2,310 4,120 5 3. 3-1. 1 2 3 3-2. 1 .

EXxx-OMU0020EN

(between FE and all accessible terminals) Insulation resistance 10 M or more (500 VDC is given between FE and all accessible terminals) Ambient temperature Operation: -10 C to 50 C Storage: -20 C to 60 C Ambient humidity 35% to 85% RH (non-condensing) 10 Hz to 57 Hz (constant amplitude) 0.75 mm 57 Hz to 150 Hz (constant acceleration) 49 m/s2 2 hours for each direction X, Y and Z Vibration

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

Proper tightening torque (Nm) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) 6, 10 16 20, 25 32 1.08 10% 2.45 10% 5.10 10% 8.04 10% M3 M4 M5 M6 C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187) 172 (209) 194 (231) C(D)U20-D 176 (230) 193 (252) 210 (269) 227 (286) 244 (303) 261 (320) 295 (354) 329 (388) C(D)U25-D 262 (335) 286 (364) 310 (388) 334 (412) 358

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6 30 22 R 1/2 37.6 45.8 49.6 55.6 30 Dimension with cover Reference dimension of R thread after installation.

DOC1020530

Target position: 100.000[mm] (=10 [m] = 186A0h) Target speed: 100[r/min] (=10 [0.01r/min] = 2710h) Acceleration time constant: 100 [ms] (= 64h) Deceleration time constant: 100 [ms] (= 64h) The setup value is as follows.

High-precision Digital Pressure Switch ( compatible)

Display/set pressure range -0.105 to 1.050 MPa -0.105 to 1.680 MPa Display/min. set unit 0.001 MPa Proof pressure 1.5 MPa 2.4 MPa Power supply Used as switch output device 12 to 24 VDC 10% with 10% voltage ripple or less (p-p) voltage Electric spec.

Bernoulli Gripper

or less 8.3 or less 1 or more 10 or less 8.3 or less 1 or more 10 or less 2.5 or more ZNC30 8.3 or less 3.6 or more ZNC(40, 60) 11.3 or less 3.9 or more 11 or less 1.2 or more 11 or less 1.2 or more 11 or less ZNC80 16.8 or less 2.7 or more 15 or less 16.2 or less 4.5 or more 18 ZNC Series Specific Product Precautions 5 Be sure to read this before handling the products.