0.01

Dimensions: Centralized Wiring Type With bracket L1 60 3 38 L2 38 5 LED level meter Terminal block box EXH port End plate R End plate L 3 0 3 0 3 0 P P P T T T U U U E E E L L L S S S L L L 81 6 9 6 9 6 9 Setting dial 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 Pressure gauge 12 12 21 Bracket 24 5.5 Rc, NPT, G 1/8 SUP port L3 6.5 36 24 OUT 3 36 OUT 2 OUT 4 n Stations

LVQ

Pilot port LQ1 integral fitting 1/8 (3), (4) PAX Pilot port Rc 1/8 (NPT 1/8) R PB Sensor (breathing) port Rc 1/8 (NPT 1/8) Pilot port LQ1 integral fitting 1/8 (3), (4) Pilot port Rc 1/8 (NPT 1/8) A B A B SMC SMC LVQ -S Dimensions (N.O. valve, double acting valve) 2 1 (mm) A B C D E F G H J K L M N P Q R W Model LVQ2 -S LVQ3 -S LVQ4 -S LVQ5 -S LVQ6 -S 2 1 25.5 46 31.5 58 33.6 81 12 77 21.8

KK/KK13

O-ring seal construction for outstanding air tightness and durability Variations Plug P Socket S Male thread type Male thread type Port size Part no. Port size Part no. R 1/8 R 1/8 KK13S-01M KK13P-01M R 1/4 R 1/4 -02M -02M R 3/8 R 3/8 -03M -03M R 1/2 R 1/2 -04M -04M Female thread type Female thread type Part no. Port size Part no.

ZSM1-115/121

output mode Ripple E P. 878 Ejector Extended analog output P. 876 F S F.S.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

Thread R(PT) Part No. L4 L1 L2 L3 M d O.D.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

R.

VCS

P: PTFE F: FKM For VCS30 OR-2380-130P P: PTFE F: FKM For VCS40 OR-2600-180P P: PTFE F: FKM Manifold For VCS20 e OR-1400-178P P: PTFE F: FKM OR-2670-178P r P: PTFE F: FKM Wave washer For VCS30, 40 When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r.

5 Port Solenoid Valve Series SQ1000/2000

1.TURN B 74.5 28 5.5 35 13 Approx. 10 2-M4 clamping screw Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) Triangle mark indicator position EXH. outlet Approx. 9 D side U side Station 1 2 3 4 5 6 7 8 n 37 60 Approx. 9 Release for switching connector direction C8: R(EXH) port C8: P(SUP) port For top ports 4 4 4 4 4 4 4 4 R 3 2 2 2 2 2 2 2 2 P 1 13 29.5 26 2n-C3,

C95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

LEY-OM007

SVRE ON 2 /P.9,10 2.1 /LEY /P.13,14 3.1 /LEYG SV0.8* 1.RESET SVRE ON 2.SETUP SV10 No. -50- 1 /P.9,10 2.1 /LEY /P.13,14 3.1 /LEYG 2 /code1-196 2 /P.9,10 2.1 /LEY /P.13,14 3.1 /LEYG 3 /P.9,10 2.1 /LEY /P.13,14 3.1 /LEYG / 4 / P.41 7.2 / P.42 7.2 5 6 /P.35 5. 7 8 0 () /P.21 4.3[] 9 /P.21 4.3[] /P32 4.4 INC/ /P.21 4.3[] 11 /P.44 7.3 12 /P.45 7.3 No. 2 / 1 -

Environment

How to Order S 2 B P H S4 200 LEY 63 A2 w y !0 i o e r t q u !1 !2 !3 !

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

High Vacuum L Type Valve

, 3(R) Rc1/8: Port1(P), M5: Port3(R) Weight kg 0.33 0.52 1.2 1.8 3.2 5.2 Note 1) Conductance is molecular flow measured with an elbow pipe which has the same dimension as each applicable flange.

Series VS

SIDE U SIDE D n 3 STATION 2 1 4 NOTES: 1) SIZE 1 1/4, 3/8,1/2 SIZE 2 3/8, 1/2,3/4 SIZE 3 3/4,1 6 PORTS,1,3, 5 PORTS 2) SIZE 1 1/4, 3/8,1/2 SIZE 2 3/8, 1/2,3/4 SIZE 3 1/2, 3/4,1 2 PORTS,2,4 PORTS 3) ALL DIMENSIONS ARE IN MILLIMETERS SMC SMC BB BB CC CC 2 2 2 2 AA AA Q R 4 4 4 4 S T U X Y Z V W PITCH NOTE #2 Q 81 R 49 5.5 S 20.5 I J K L M N 22 O P 52 T 79.5 52.5 48.5 E 58.5 F 108 96.5 87 G

High Vacuum L Type Valve

, 3(R) Rc1/8: Port1(P), M5: Port3(R) Weight kg 0.34 0.54 1.3 1.9 3.3 5.8 Note 1) Conductance is molecular flow measured with an elbow pipe which has the same dimension as each applicable flange.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Floating Joint Center of sphere M M U U D H G B F P C E R A (mm) Max. operating tension and compression N Center of sphere R Model Max. screw-in depth P Allowable eccentricity U M A Applicable bore size Weight (kg) B C D E F G H Nominal size Pitch Compression Tension JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 20, 25 32 40 50, 63 80 8 10 16 20 22 29 35.5 47.5 59 71.5 1.25

KB

1 8 Air Supply Port: KBE, KBH, KBB, KBS, KBL (P. 15-3-114, 115) 6 KBH2-R3S KBH3-R2S KBH3-R3S KBH3-R4S KBH4-R3S KBH4-R4S R 1 2 R 3 8 R 1 2 R 3 8 R 1 4 R 3 8 R 1 4 KBE2-08 KBE2-10 KBE3-08 8 10 10 8 2 Applicable tubing KBE3-10 KBE3-12 KBE4-12 12 R1 KB 1 H S Model With sealant (Male thread only) Standard specifications Female Connector Elbow Union: KBL Tube size/Connection thread size Body size

TA301

DXT060-27A Flow Characteristics/Weight Weight (kg) Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Valve model b Cv Grommet Port size b Cv b Cv C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] b Cv 0.63 0.30 0.16 0.59 0.30 0.15 0.59 0.32 0.15 0.65 0.30 0.16 0.11 (With bracket: 0.13) 0.66 0.28 0.16 0.60 0.29 0.15 0.61 0.32 0.15 0.66 0.30 0.16 0.34 0.26 0.084

V

D E R (N)ZM V A C U U M E J E C T O R (N)ZM D I M E N S I O N S W I T H VA C U U M S W I T C H D I M E N S I O N S B A S I C T Y P E N O Z Z L E D I A M E T E R 05 0.5mm 07 0.7mm 10 1.0mm 13 1.3mm T Y P E 2 Body Ported 4 Manifold Type-Common SUP 6 Manifold Type-Individual SUP S U P P LY P R E S S U R E H 5 Bar M 3.5 Bar P O R T T H R E A D Nil PT* Remove (N) when ordering T NPTF S W I T C