8.4 NO X X PE NC 30.5 30.5 116.1 98.6 91.6 91.6 2(A) 3(R) 66.8 57.6 1(P) 43.8 43.8 34 34 71 (P port) Rc 1/2, 3/4, 1 (R port) Rc 1/2, 3/4, 1 (A port) Rc 1/2, 3/4, 1 5-5-12
11.5Nm 2) RNPT 23 R,NPT Nm EXH.
Contents q Cover L (1 pc.) w Cover R (1 pc.) e Top covers (2 pcs.) r Hexagon head bolts (4 pcs.) t Flat washers (4 pcs.) y Cover mounting bolts (8 pcs.)
Accessories Table spacerParallel motor only Model Part name QTY EQFS25(L/R) Table spacer 1 EQFS32(L/R) EQFS40(L/R) Optional parts (sold separately) Power supply cable Parallel I/O cable Communication cable USB cable Setup software Refer to 9 Optional parts (sold separately) for details of optional parts. 28 - Installation and Initial Setting .
4 e y q w r !3 @2 !7 !2 !7 u A A A-A (LEL25LT-n) A-A (LEL25MT-n) !9 !9 t @0 @1 !0 !6 !8 !5 o Component Parts Description No.
Note 4) M5 fittings for M5 thread are attached without being incorporated.
Note 4) M5 fittings for M5 thread are attached without being incorporated.
SMC PRESSURE SWITCH PD PV 57 1 67 1 32.4 109 Approx. 300 Ejector RESET SET Supply valve Release valve V 21.2 Manual override Suction filter 1 2-4.6 (mounting hole) 1 5.6 1 8 1 10.2 123 1 4.6 1 8 SOL. c SOL. a Silencer SOL. b Interface A Light Suction filter Manual override Interface B Digital vacuum pressure switch M5 port PE (pilot valve exhaust port) M5 port PD (vacuum breaking pressure
G NPT NPTF R External pilot F N T Ambient and fluid temperature 10 to 50C (No freezing.
q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.
4 20: M5 x 0.8 x 6 25, 32: M6 x 1 x 6 40: M8 x 1.25 x 8 Nickel plated Carbon steel Hexagon socket head cap screw !5 20, 25: M5 x 0.8 x 6 32, 40: M6 x 1 x 8 Carbon steel Hexagon socket head set screw !6 Nickel plated !7 Plate Special resin !8 Cushion seal NBR !9 Piston seal Replacement Parts Resin @0 Wear ring NBR Bore size (mm) Kit no.
AW-OMS0038-C PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2. APPLICATION 7 3.
AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.
(Example) 23-R Nil N F Option Combinations Available Not available Accessary, Option Option Symbol 1 1S-1 1S-2 2 3 6 8 R -1 -1S-1 -1S-2 -2 -3 -6 -8 -R 1000 cm3 tank 1000 cm3 (With switch) Bottom limit ON 1000 cm3 (With switch) Bottom limit OFF Metal bowl Lubricator with drain cock Nylon bowl Metal bowl with level gauge Flow direction: Right Left Note) -1, -1S-1 and -1S-2 are with metal bowl
External pilot type is not available. 1 SYJ3 2 5 M M3 Body ported SYJ3 4 5 M 1 Base mounted Port size 3 port Nil: Without sub-plate M5: M5 port With sub-plate Coil specifications Nil Standard With power saving circuit (24, 12 VDC only) T Power saving circuit is not available in the case of W type.
OUT IN q r w e Air Supply Caution 1. Install a mist separator (Series AFM) as a preliminary filter on the inlet side of the micro mist separator to prevent premature clogging. 2. Do not install on the inlet side of the dryer as this can cause premature clogging of the element. Drain M5 x 0.8 AFD30/40 Maintenance Float type auto-drain Warning 1.
IC VBA Drain M5 x 0.8 AFM30/40 VE OUT IN VY1 Float type auto-drain Maintenance N.C. N.O. q Warning 1. Replace the element every 2 years or when the pressure drop becomes 0.1 MPa, whichever comes first, to prevent damage to the element. G e PPA w r AL Design Caution 1. Design the system so that the mist separator is installed in a pulsation-free location.
2 i t w q r w !0 3-Color Display Digital Flow Monitor for Water PF3W3 w w y e u w Component Parts No.
(Example) 23-R Nil N F Option Combinations Available Not available Accessary, Option Option Symbol 1 1S-1 1S-2 2 3 6 8 R -1 -1S-1 -1S-2 -2 -3 -6 -8 -R 1000 cm3 tank 1000 cm3 (With switch) Bottom limit ON 1000 cm3 (With switch) Bottom limit OFF Metal bowl Lubricator with drain cock Nylon bowl Metal bowl with level gauge Flow direction: Right Left Note) -1, -1S-1 and -1S-2 are with metal bowl
(Example) 23-R Semi-standard Combinations Available Not available Accessory, Semi-standard Option Symbol 1 1S-1 1S-2 2 3 6 8 R -1 -1S-1 -1S-2 -2 -3 -6 -8 -R 1000 cm3 tank 1000 cm3 (With switch) Bottom limit ON 1000 cm3 (With switch) Bottom limit OFF Metal bowl Lubricator with drain cock Nylon bowl Metal bowl with level gauge Flow direction: Right to left Note) -1, -1S-1 and -1S-2 are with