SMC Corporation of America
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or less) Neon bulb LED AC DC Rated voltage (V) Allowable voltage fluctuation Inrush Holding Inrush Holding Apparent power (AC) Standard type Body ported Continuous duty type W/o indicator light Power consumption (DC) W/ indicator light AC DC AC DC Surge voltage suppressor Base mounted Indicator light Base mounted Symbol Body ported At the rated voltage (A)2 (A)2 (R)3 1(P) 3(R) (P)1 VV061

Filtration accuracy (m) 5 10 20 40 74 105 No.

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/

(A + 72 + B) 76.5 (72 + A) 77 (72 + A) Total length 125.5 (A + 114.5 + B) 120 (114.5 + A) 125.5 (A + 114.5 + B) 120 (114.5 + A) 120 (114.5 + A) Port size w C06 (C04) 02 (C04) C08 (C06) 02 (C06) 02 (C08) Port size w C10 (C08) 02 (C08) C12 (C10) 02 (C10) 02 (C12) Model Port size q C04 (C06) C04 (02) C06 (C08) C06 (02) C08 (02) Model Port size q C08 (C10) C08 (02) C10 (C12) C10 (02) C12 (02

AC20-A AC25-A AC30-A AC40-A AC50 VHS20 VHS30 VHS40 VHS50 Single Action Series VHS20/30/40/50 Double Action Series VHS2510/3510/4510/5510 CAT.NAS13-10A Single Action Series VHS20/30/40/50 Double Action Series VHS2510/3510/4510/5510 Single Action Series VHS20/30/40/50 Double Action Series VHS2510/3510/4510/5510 Lightweight Lightweight Resin handle and bonnet is standard. 60% Lighter Resin handle

tubing T0604 (A port) (A port) Refer to the above drawing for DIN terminal dimensions.

Please delete the unnecessary part. 1.4-18 Series CM2 Accessory Dimensions Single Knuckle Joint (mm) Single Knuckle Joint (mm) Applicable bore size 20 25/32 40 Bore size 20 25/32 40 A NDH10 U1 NX1 A NDH10 R1 NX U1 R2 Z Part No.

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

0.3 High flow rate nozzle High flow rate nozzle 0.2 O.D. 6 mm, I.D. 4 mm tube (Length 10 mm) 0.1 0 0 120 40 60 20 80 100 Flow rate [L/min (ANR)] Ionizer 21 Made to Order IZN10E Series Dimensions Energy saving static neutralization nozzle IZN10E-01-X367 (107) 16 92.5 5 9.5 12 Variable nozzle direction 46 3.5 A 18.5 6 11 6 A 12.4 8 5 6 A-A 27.7 40 M3 x 0.5 thread depth 4 (Ground terminal)

C a u t i o n Piston speed should be controlled gradually from low speed to the specified speed with a speed controller fully closed. 2-6. Allowable kinetic energy W a r n i n g Use the actuator with allowable kinetic energy (Table 1) or less. Operation with a kinetic energy over the allowable value can break the product and cause injury or damage to equipment.

extension cable (2.95 m). (6) External antenna set EXW1-EA1 This set includes a whip antenna, a coaxial cable (1.5 m), a bracket and two screws (M2.6 x 8). (7) NFC reader/writer holder EXW1-AB1 (for EX600-W) EXW1-AB2 (for EXW1) -99No.EX-OMZ0016-C Revision history A: Modified errors in text.

Facility having a small installation area (that can not vent the air naturally) Make a forced air exhaust vent on a wall at a high level and an air vent on a wall at a low level.

(A contact) N.O. (A contact) Specifications N.O. (A contact) N.O.

A A A A A Speed Home position A B C Speed no. Time Two pattern combination example (A five point movement of absolute move A and incremental move B) Acceleration no.

D-A9V D-F9V D-F9WV A 22 (20) 5 (7) W B The dimension in ( ) is for D-F9V and D-F9WV. (mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.

A A A A A A A Unit: mm Model A B C D E Fn Fd G H XLF-16 40 103 38 1 30 17 40 XLF-25 50 113 48 1 12 40 26 39 XLF-40 65 158 66 2 11 55 41 63 XLF-50 70 170 79 2 11 75 52 68 XLF-63 88 196 100 3 11 87 95 70 69 XLF-80 90 235 117 3 11 114 110 83 96 XLF-100 108 300 154 3 11 134 130 102 131 XLF-160 138 315 200 3 11 190 180 153 112 9 XL*-OMJ0003-D 5.

Vertical Vacuum Entry: Without Buffer ZPT H-A14 (Male thread) 40 50 ZPT H-B (Female thread) 40 50 1/8 (Rc, NPT, NPTF) M14 x 1 Width across flats 24 Hexagon width across flats 19 28 3 x M3 x 0.5 28 Hexagon width across flats 19 ZA Width across flats 24 3 x M3 x 0.5 ZX A 6 ZR B 3 ZM A 18 B ZMA 18 ZQ ZH ZU ZL C M8 x 1.25 40 ZPT40H-B10 42 M10 x 1.5 Model A 40 ZPT40H-B8 B 42 ZY Model A 40 B 42

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

Rc Rc C4SF-J-A C4SF-A G G C4SFF-J-A NPT C4SF(-Z)-A NPT C4SFN-J(Z)-A B External B appearance drawing and part no. 1/4 HEX. : 17 Option Semi-standard Semi-standard W Port thread Part no. Rc C4SF-W-A G NPT C4SF-W(Z)-A External B appearance drawing and part no. Barb fitting Applicable tube T0604 Option Semi-standard 2 2J Semi-standard 2 Semi-standard 2 Port thread Port thread Part no.