Plug-in/Plug Lead: Single Unit

(B) 2 (A) 4 (B) 2 VQ5 VQZ 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD q w e q w VQ5251 (A) 4 (B) 2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w r q w e VQ5350 VQ5450 VQ5351 VQ5451 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5550 VQ5551 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (

Vacuum Unit Ejector / Vacuum Pump System

Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 -18No.

EXxx-OMS0026CN

07 Byte1 byte1 07 Byte2 byte2 815 SEN3(1) Byte3 byte3 1623 Byte4 2431 Byte5 Padding 4 byte 6 byte -59No.EX-OMS0026CN <2> 0 1 2 3 4 5 AXA DYB DYB DXB DXD SEN3 SI 4 byte 1 byte 2 byte 1 byte 1 byte 4 byte (0)(EX600-AXA)4 byte (3)(EX600-DYB)1 byte (4)(EX600-DYD): 2 byte (1)(EX600-DYB)1 byte (2)(EX600-DYB)1 byte (5)SI (EX600-SEN3)4 byte Diagnostic mode 0 (LSB-MSB) 1 Lo byte DYB(1) 07 Byte0

Vacuum Unit Ejector / Vacuum Pump System

Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 -19No.

PSE200

CAT.ES100-41 A Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 1 A single controller monitors up to 4 pressure sensors. 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 1 A single controller monitors 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 Space saving 1 40mm MPa kPa OUT1 76% OUT2 CH 1 2 3 4 PRESSURE

PSE530/200

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Data 1 A single controller monitors up to 4 pressure sensors. 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 16-3-1 2 A single controller monitors up to 4 pressure sensors. 1 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 ZSE

100

4 Component Parts No.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Basic style: MGGB 20 to 50 4-F through, counterbore G Bottom 4-H M N HR HN (MAX.)

PA3000/5000/PAX1000

Type PA3000 115 68 85 105 4-7 7.5 FLUID OUT Rc 3/8 5.5 AIR SUP (P1) Rc 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (P1) Rc 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN Rc 1/2, 3/4 Rc 1/4 10

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Cylinder port size Options 2 4 U side With One-touch fitting for 4 With One-touch fitting for 6 With One-touch fitting for 8 Mixed and with port plug Elbow top ported With One-touch fitting for 4 Elbow top ported With One-touch fitting for 6 Elbow top ported With One-touch fitting for 8 Elbow bottom ported With One-touch fitting for 4 Elbow bottom ported With One-touch fitting for 6 Elbow

LEF-OM002xx

Before machinery /equipment is restarted, take measures to prevent unexpected operation and malfunction. 4.

Guide Cylinder Series MGG

x F through, counterbore G Bottom 4 x H N M 4 x O C D Bracket (Refer to the table below.)

Magnetically Coupled Rodless Cylinder

Models suitable to satisfy the requirement of 100 (N) are CY332 or CY340. 300 100 200 50 100 20 30 40 50 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10111213 7 8 9 1 01 11 21 3 1 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Useable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance

PFA/PFW

) 4 3 42 2 1 4 Connector pin numbers 43 2-3.4 Pin name Pin No.

Electric Actuator Miniature Rod Type Miniature Slide table Type

/See Example of step data entry(4) on p.26 4 Positioning repeatability is out of specified range. 1) It shifts to the next operation by receiving the "INP" output signal.

Soft Start-up Valve

v*4 v*4 v*4 *1 The 110 VAC and 115 VAC are interchangeable.

Soft Start-up Valve

v*4 v*4 v*4 *1 The 110 VAC and 115 VAC are interchangeable.

Electric Actuator / Guide rod Slider

100 100 900mm 1000mm 0 0 0 1 2 3 4 5 0 1 2 3 4 5 Workload[kg] Workload[kg] 300 300 Overhang direction:L3[mm] Overhang direction:L3[mm] 250 250 600mm stroke L3 m 200 200 500mm or less 150 150 600mm stroke or less 100 100 50 50 0 0 0 1 2 3 4 5 0 1 2 3 4 5 Workload[kg] Workload[kg] 300 300 250 250 Overhang direction:L4[mm] L4 m Overhang direction:L4[mm] 600mm stroke 200 200 600mm stroke or

High Power Cylinder Series RHC

500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm] 10 1/4,3/8 20 2000 6 10 1/4, 3/8 2500 7.5 =0.7 10 1/4, 3/8 0.5 3000 9 10 0.1 0.3 6 1/4,3/8 500 2.5 8 1/4, 3/8 1000 5 0 10 1/4, 3/8 1,000 2,000 3,000 25 1500 7.5 Maximum speed Vmax [mm/s] 10 1/4

AWG

Flow Mechanism Series AWGK AWG20K 1/8, 1/4 AWG30K 1/4, 3/8 AWG40K 1/4, 3/8, 1/2 Pages 34 to 38 30 Filter Regulator with Built-in Pressure Gauge Series AWG20/30/40 How to Order 03 30 AWG G1 AWG20 AWG40 Option Body size Description 0.02 to 0.2 MPa setting Metal bowl Nylon bowl Metal bowl with level gauge With bowl guard With drain guide Non-relieving Drain cock with barb fitting: 6 x 4 nylon