0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.050.5 or less150/30605 to 4090 or less (No condensation)430365 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
Port sizes range from 1/8 to 3/4 with Rc(PT), NPTF & G(PF) thread types available. Various options also available.
Port sizes range from 1/8 to 3/4 with Rc(PT), NPTF & G(PF) thread types available. Various options also available.
0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.051.0 or less150/30605 to 4090 or less (No condensation)610750 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1551
0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.050.5 or less150/30605 to 4090 or less (No condensation)585520 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
0.050.5 or less150/30605 to 4090 or less (No condensation)410345 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
0.050.5 or less150/30605 to 4090 or less (No condensation)410345 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.050.5 or less150/30605 to 4090 or less (No condensation)430365 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
0.050.5 or less150/30605 to 4090 or less (No condensation)430365 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
0.050.5 or less150/30605 to 4090 or less (No condensation)585520 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
0.050.5 or less150/30605 to 4090 or less (No condensation)585520 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
output pressure (MPa) Valve output pressure (MPa) Valve output pressure (MPa) 0.9 0.9 0.9 0.7 0.8 0.9 0.6 0.7 0.8 0.9 0.9 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.8 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.6 0.1 0.2 0.3 0.4 0.5 0.5 0.1 0.2 0.3 0.4 2000 4000 6000 0 0 0 200 400 600 800 1000 1000 2000 Flow rate (/min (ANR)) Flow rate (/min (ANR)
42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%36/13?61?
0.050.5 or less150/30605 to 4090 or less (No condensation)430365 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4