MB1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper 80 1400 C95 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

Speed Controller with

Made to Order How to Order 2 F 06 A 200 AS Lubricant: Vaseline -X12 Example) AS2002F-04A-X12 Body size Made to Order Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Push-lock type Example) AS2002F-04A-X21 * Not particle-free Applicable tubing O.D.1 Metric size Inch size 23 3.22

PFxx-OMO0007CN

NPN(1 )+ (15 V) PF2A7--29--X560 NPN(1 )+ (420 mA) 22 PF2A7--68--X560 PNP(1 )+ (15 V) PF2A7--69--X560 PNP(1 )+ (420 mA) / ZS-37-A () 3 m 100 g ZS-37-B (L ) 3 m 100 g ZS-29-T 4 (312 ) 40 g -11No.PF-OMO0007CN (IN ) 1 DC(+) 2 OUT2 3 DC(-) (OUT ) 4 OUT1 INOUT (UP) (SET) (DOWN) LED (OUT1) (OUT2) (OUT1) LED (OUT1) OUT1 ON (OUT2) OUT2 ON (UP) ON/OFF (SET) (DOWN) ON/OFF -12No.PF-OMO0007CN D

Digital Flow Switch (Remote type monitor unit)

D: Contents revised in several places. E: Modified errors in text. F: Contents revised in several places.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Dimensions H1 (Hexagon width across flats) Applicable tubing O.D. d H2 (Hexagon width across flats) L4 L3 L5 D1 L2 M M L1 Metric Size Inch Size L5 L5 L4 Max. L4 Max. Panel-cut dimensions Panel-cut dimensions L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M D1 d H1 H2 Model Model Min. Max. Min. Max.

AF800/900

Dimensions Option B (Without auto drain) Option/Dimensions Model Metal bowl Metal bow with level gauge Without drain cock Drain cock thread piping With drain guide AF800 AF900 409 489 440.5 520.5 393.5 473.5 410 490 406.5 486.5 B (With auto drain) A B C D N.O N.C E Model AF800 AF900 150 200 410 490 33 46 140 170 439 519 472 552 200 260 Precautions Be sure to read before handling.

AMP

Printed in Japan. 1st printing November, 1999 D-SMC.L.A. P-80 (YG)

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Solenoid Specifications 100, 200 VAC, 50/60 Hz; 24 VDC Coil rated voltage How to Calculate the Flow Rate 15 to +10% of rated voltage Allowable voltage fluctuation For obtaining the flow rate, refer to page 31-10.

VFS1000

VQ4 Electrical entry Body (Pilot exhaust) G: Grommet E: Grommet terminal 20: Individual EXH T: Conduit terminal D, Y: DIN terminal VQ5 VQC VQZ SQ Coil rated voltage 30: Common EXH 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240 VAC (50/60 Hz) 9 Other 3 2 1 VFS 4 VFR 6 5 VQ7 7 Option Manifold only How to Order Pilot Valve Assembly Applicable

ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

Output specifications ZSE ISE 21 NPN open collector 2 outputs without analog output ZSP 22 NPN open collector 2 outputs with analog output (1 to 5 V) PS Positive pressure ISE3 ISA PSE Vacuum ZSE3 IS ISG Suffix Nil None ZSM D For replacement with ZX series Note 3) Compliant with piping specifications OX and OXY only.

Thermo-chiller Series HRZ Fluorinated Fluid Type

VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation 10% 20 14 30 23 30 20 25 60 46 Refer to page 94.

Digital Flow Switch Series PFMB7 2-Color Display ® (200 L type only)

2-Color Display (200 L type only) Digital Flow Switch Series PFMB7 RoHS How to Order PFMB7 201 C8 A M Type Calibration certificate Note 1) Integrated display 7 None With calibration certificate Nil A Rated flow range (Flow rate range) Note 1) Certificate in both English and Japanese Made to Order 2 to 200 L/min 201 Flow adjustment valve Unit specifications Nil S None Yes Unit selection function

Series CJ2 10-/11- 21-/22- Air cylinder / ø6, ø10, ø16

45, 60, 75, 100, 125, 150, 175, 200 Standard Non-lube Double acting Single rod 15, 30, 45, 60 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

Series MHL2 112210, 16, 20, 25, 32, 40 Parallel Type Wide Opening Air Gripper How to Order 11 Vacuum suction type Clean series 11MHL 2 16 D 1 M9N 22MHL 2 16 D 1 M9N Wide opening Number of auto switches 2 pcs. 1 pc. n pcs.

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

/200 to 208 VAC 10% Max. operating current (A) 26 Breaker capacity (A) 30 Communications Serial RS-485 (D-sub 9 pin) and Contact input/output (D-sub 25 pin) Dimensions Note 9) W15 in (380mm) x D26.2 in (665mm) x H33.9 in (860 mm) Weight Note 10) Approx. 220 lbs (100 kg) Approx. 198 lbs (90 kg) Safety standards UL, CE marking, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/ Rod Type Dust-tight/Water-jet-proof (IP65 Equivalent) LEY-X5 (Made to Order) Series LEY25, 32

How to Order 6N 1 1 D B 25 50 LEY X5 R o Made to Order: Dust-tight/ Water-jet-proof q w e r t y u i !0 !1 !2 !

Series NCA1

Mounting B MX0 Basic L MS1 Foot F MF1 Front Flange G MF2 Rear Flange R MS4 Side Tapped D MP2 Double Detachable Rear Clevis T MT4 Center Trunnion C MP4 Single Detachable Rear Clevis X MP1 Double Rear Clevis S MS2 Side Lug U MT1 Rod Trunnion J MT2 Head Trunnion Bore Size 150 200 250 325 400 1.5" 2" 2.5" 3.25" 4" Nil S n Nil J K No. of Switches 2 Pieces 1 Piece "n" Pieces For larger bore

DOC1020530

This wiring is common in each mode. (1) Using 3-phase 200 V AC to 240 V AC power supply for LECSN2-T Note 1. Between P3 and P4 is connected by default. 2. Always connect between P+ and D terminals. (Factory-wired) 4.

IDX-OM-X004

ID205 to 605 / 206 to 606 (200/220V specified) Remove the terminal block cover or the rear cover in the rear of the product, and connect the power (200/220V AC) to the terminal block. Please install it on either of the M4 screws of the IN/OUT piping when you put up the earth. IN OUT Specification of power cable The following power cable is attached.