Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Solenoid Specifications 100, 200 VAC, 50/60 Hz; 24 VDC Coil rated voltage How to Calculate the Flow Rate 15 to +10% of rated voltage Allowable voltage fluctuation For obtaining the flow rate, refer to page 31-10.

VFS1000

VQ4 Electrical entry Body (Pilot exhaust) G: Grommet E: Grommet terminal 20: Individual EXH T: Conduit terminal D, Y: DIN terminal VQ5 VQC VQZ SQ Coil rated voltage 30: Common EXH 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240 VAC (50/60 Hz) 9 Other 3 2 1 VFS 4 VFR 6 5 VQ7 7 Option Manifold only How to Order Pilot Valve Assembly Applicable

ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

Output specifications ZSE ISE 21 NPN open collector 2 outputs without analog output ZSP 22 NPN open collector 2 outputs with analog output (1 to 5 V) PS Positive pressure ISE3 ISA PSE Vacuum ZSE3 IS ISG Suffix Nil None ZSM D For replacement with ZX series Note 3) Compliant with piping specifications OX and OXY only.

Thermo-chiller Series HRZ Fluorinated Fluid Type

VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation 10% 20 14 30 23 30 20 25 60 46 Refer to page 94.

Digital Flow Switch Series PFMB7 2-Color Display ® (200 L type only)

2-Color Display (200 L type only) Digital Flow Switch Series PFMB7 RoHS How to Order PFMB7 201 C8 A M Type Calibration certificate Note 1) Integrated display 7 None With calibration certificate Nil A Rated flow range (Flow rate range) Note 1) Certificate in both English and Japanese Made to Order 2 to 200 L/min 201 Flow adjustment valve Unit specifications Nil S None Yes Unit selection function

Series CJ2 10-/11- 21-/22- Air cylinder / ø6, ø10, ø16

45, 60, 75, 100, 125, 150, 175, 200 Standard Non-lube Double acting Single rod 15, 30, 45, 60 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

Series MHL2 112210, 16, 20, 25, 32, 40 Parallel Type Wide Opening Air Gripper How to Order 11 Vacuum suction type Clean series 11MHL 2 16 D 1 M9N 22MHL 2 16 D 1 M9N Wide opening Number of auto switches 2 pcs. 1 pc. n pcs.

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

/200 to 208 VAC 10% Max. operating current (A) 26 Breaker capacity (A) 30 Communications Serial RS-485 (D-sub 9 pin) and Contact input/output (D-sub 25 pin) Dimensions Note 9) W15 in (380mm) x D26.2 in (665mm) x H33.9 in (860 mm) Weight Note 10) Approx. 220 lbs (100 kg) Approx. 198 lbs (90 kg) Safety standards UL, CE marking, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/ Rod Type Dust-tight/Water-jet-proof (IP65 Equivalent) LEY-X5 (Made to Order) Series LEY25, 32

How to Order 6N 1 1 D B 25 50 LEY X5 R o Made to Order: Dust-tight/ Water-jet-proof q w e r t y u i !0 !1 !2 !

Series NCA1

Mounting B MX0 Basic L MS1 Foot F MF1 Front Flange G MF2 Rear Flange R MS4 Side Tapped D MP2 Double Detachable Rear Clevis T MT4 Center Trunnion C MP4 Single Detachable Rear Clevis X MP1 Double Rear Clevis S MS2 Side Lug U MT1 Rod Trunnion J MT2 Head Trunnion Bore Size 150 200 250 325 400 1.5" 2" 2.5" 3.25" 4" Nil S n Nil J K No. of Switches 2 Pieces 1 Piece "n" Pieces For larger bore

DOC1020530

This wiring is common in each mode. (1) Using 3-phase 200 V AC to 240 V AC power supply for LECSN2-T Note 1. Between P3 and P4 is connected by default. 2. Always connect between P+ and D terminals. (Factory-wired) 4.

IDX-OM-X004

ID205 to 605 / 206 to 606 (200/220V specified) Remove the terminal block cover or the rear cover in the rear of the product, and connect the power (200/220V AC) to the terminal block. Please install it on either of the M4 screws of the IN/OUT piping when you put up the earth. IN OUT Specification of power cable The following power cable is attached.

AMX-OM-Q018E

If they enter the inside of products, they could cause products to malfunction, lower performance or damage the element. d.

New Concept Connector type manifold SV Series

VQC1100 10ms2ms: 200 million cycles VQC2100 20ms2ms: 200 million cycles VQC4100 17ms3ms: 100 million cycles SV VQC Refer to catalog for details.

Dedicated Controller

Model LC1-1-RH Controller/LC1 PC Cable length 022m 044m 033m 055m PC Controller Cable length: 2 to 5m Dedicated communication cable (D-sub) (For NEC PC-98 Series) PC-98 Series is a registered trade mark of NEC Corporation.

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Dimensions H1 (Hexagon width across flats) Applicable tubing O.D. d H2 (Hexagon width across flats) L4 L3 L5 D1 L2 M M L1 Metric Size Inch Size L5 L5 L4 Max. L4 Max. Panel-cut dimensions Panel-cut dimensions L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M D1 d H1 H2 Model Model Min. Max. Min. Max.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Trace the arrow mark, starting with the intersection B to obtain the intersection D on the curved line for the 0.7 MPa pressure characteristics. 3. Trace the intersection D to obtain the intersection E. 4. The intersection E is the dew point under pressure 0.7 MPa with the ambient temperature of 30C and the relative humidity of 60%. Value for E is at 62C. 5.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 200 VAC 800/40 800/50 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. H5 Initial power / Power 100 VAC 200/40 400/70 400/80 200 VAC 800/40 1600/80 1600/80 consumption (W) Note 1) Initial power and power consumption are nominal values.