Compact Rotary Actuator Rack & Pinion Style Series CRQ2 How to Order CRQ2B S 20 90 Without auto switch CDRQ2B S 20 90 M9BW With auto switch Built-in magnet Number of Shaft type auto switches S Single shaft 2 pcs. Nil W Double shaft S 1 pc. ∗ Refer to p

Symbol Specifications/Content Applicable shaft type Mass Shaft type variation X, Y, Z, T, J, K (g) S, W XA1 to XA24 Shaft pattern sequencing I Size Standard mass X, Y, Z, T, J, K XA31 to XA59 Shaft pattern sequencing II 90 180 360 XC7 S, W, X, T, J Reversed shaft 10 120 150 200 XC8 to XC11 Change of rotating range 15 220 270 380 Change of angle adjustable range (0 to 100) XC12 to XC15 20

VEX1

12) DL12-03 VEX3 2 3 4 D AS420 AN400 SGP elbow 90 1 2 B SGP B 1 2 E AS420 AN400 90 elbow F G AS500 AN500 AN600 SGP B 90 elbow 90 elbow 90 elbow VEX350 3 4 SGP1B SGP1B AS600 VEX30 Port VEX31 VEX32 External pilot External pilot H AS600 AN600 I VEX370 External pilot Pilot exhaust Pilot exhaust SGP1 B 90 elbow 90 elbow 90 elbow 1 4 SGP1 B SGP2B AS700 AS800 AS900 AN700 AN800 AN900 P1 Plug 1 2 J

FSQ seies

r e\ " f = ; C ; i r _ , i o q m l r a 6 d . t o a d J o r . \\.:j+_ | aq6 oe.orr qredrasa I | -! swirch stumedoFF,and _ .";i I I Ta u! oardvrs,k. \_, 1_l Whe. 1wo switchos ar6 ANDcoiiecled.loadma f uncl o may r6urt b@use oJ flie toad voll aged@Pwhe. the swilchs ae luffed ON. l?piLl lanp lighls wh6n hlo swilches a turned ON Eran0e P$s!

17

MY1B MY1B MY1H E A B MY1B C D MY1M (mm) MY1C A 61 70 87 B C D E F G H J Part no.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

C11.2 1218 MY1H Series Mechanically Jointed Rodless Cylinder Linear Guide Type Side Support Side support A MY-SA 2 x G F 2 x H E C D A B Side support B MY-SB MY1B 2 x J MY1H MY1H MY1B E A B C D MY1M MY1C (mm) MY1H Part no.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

(N) CB 1 mm or less Non-locking style, Locking style Back rush Manual release CV/MVG Allowable Kinetic Energy CXW 20 25 32 40 Bore size (mm) CXS Allowable kinetic energy (J) Rubber bumper 0.27 0.4 0.65 12 Effective cushion length(mm) CXT 11.0 11.0 11.0 11.8 Air cushion Cushion sectional area(cm2) 2.09 3.30 5.86 9.08 MX Absorbable kinetic energy J 0.54 0.78 1.27 2.35 MXU Standard Stroke Long

Low-Speed Compact Rotary Actuator Rack & Pinion Type CRQ2X Series Size: 10, 15, 20, 30, 40

Symbol Specifications/Content Applicable shaft type Shaft type variation X,Y,Z,T,J,K S,W XA1 to XA24 Shaft pattern sequencing I X,Y,Z,T,J,K XA31 to XA59 XC7 Shaft pattern sequencing II Weight S,W,X,T,J Reversed shaft XC8 to XC11 Change of rotating range (g) Change of angle adjustable range (0 to 100)" Size Standard weight XC12 to XC15 90 180 S,W,Y Change of angle adjustable range (90 to

Refrigerated Thermo-chiller

Specific heat C: 0.96 x 103 J/(kgK) (at 20C) Refer to page 79 for the typical physical property values by circulating fluid.

155

62 5.5 48 30 31 1 90 74 44 22 135.9 144.5 151 40 36 72 6.5 60 35 39.5 External pilot solenoid type (Conduit terminal) P Pilot port 2 x 1/8" (Back side PE: Filter standard installation) J N I Manual override 2.3 12 Bracket G O L M F E 4 x K 2 1 D C H (2 locations) Main port A B A B C D E F G H I J K L M N O P Main port Model SGC2lll-ll10 SGC2lll-ll15 SGC3lll-ll20 SGC4lll-ll25 3/8 63 49.6

Series VS

OUT 9 TERM P10=OUT 9 TERM P4=OUT 3 TERM P4=OUT 3 TERM P22=ITV_IN1 TERM P22=ITV_IN1 TERM P17=OV TERM P17=OV TERM P11=OUT 10 TERM P11=OUT 10 TERM P5=OUT 4 TERM P5=OUT 4 TERM P18=OV TERM P18=OV TERM P6=OUT 5 TERM P6=OUT 5 TERM P12=OUT 11 TERM P12=OUT 11 13 Series VS R8b S MANIFOLD M12 CONNECTORS L2 L1 MANUAL OVERRIDE INDICATOR LIGHT 1/8-4 PORTS PILOT PORTS NOTE #1 C SMC SMC SMC SMC H B I I J

Air Cylinder CP Series Cylinder Positioner Assembly

Parenlneses CPA1 BN do Boot with Boot' BORE D E G'GB J K M MM N P H z.

Electric Actuator Triple Axis P&P Unit

Brake 400W without brake Symbol G *Standard strokes are available in 50 mm increments. 400W with brake H 400W without brake J Matsushita Electric Industrial Co., LTD 400W with brake K Caution When X, Y and Z axes are combined, Y axis attachment bracket is supplied as standard.

Air Cylinder RSQ Series Stopper Cylinder

r e\ " f = ; C ; i r _ , i o q m l r a 6 d . t o a d J o r . \\.:j+_ | aq6 oe.orr qredrasa I | -! swirch stumedoFF,and _ .";i I I Ta u! oardvrs,k. \_, 1_l Whe. 1wo switchos ar6 ANDcoiiecled.loadma f uncl o may r6urt b@use oJ flie toad voll aged@Pwhe. the swilchs ae luffed ON. l?piLl lanp lighls wh6n hlo swilches a turned ON Eran0e P$s!

212

140.5 LVR50-V19 22 80 120 169 C F E Breathing port M5 x 0.8 J Tube extensions 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Breathing port M5 x 0.8 Model A B C D E LVR20-T07(06) 40 40 49.3 68 20.1 LVR40-T11(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator

Series 10-, 21- AF-A Air Filter

Air Filter Series 1021AF-A How to Order * "J" must always be selected. Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Model P1 P2 A B Note 1) C D F J K ARP20(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Model P1 P2 A B Note 1) C D F J K ARP20(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Head flange Mounting 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease Grease Cleanliness class (ISO class) 10-: Class 4, 21-: Class 5 11-/22-: Class 3 3.40 1.54 4.90 1.54 2.00 0.91 3.40 0.91 1.20 0.52 1.80 0.52 0.28 0.11 0.41 0.18 0.66 0.29 5.90 2.71 9.90 4.54 Male rod end Female rod end Male rod end Female rod end Rubber bumper Air cushion Allowable kinetic energy (J)

Coolant Valve

Applicable cable O.D. 6 to 8 Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) E Pilot port 12(P1), 10(P2) Port size: refer to table below C K (External pilot solenoid) P1 P2 J J B (Air operated) D 4 x 2 x 18 mouting hole 32 H F A Applicable flange Port 1, 2 Pilot port 12(P1), 10(P2) A Model B C D E F H J K Note) VNC5-32F VNC6-40F VNC7-50F 1 8 1 4 1 4 32 40

AFF

Inlet pressure (MPa) 14-20-9 2 Series AFF How to Order AFF2B to AFF75B AFF 8B 03 J B Option Body size J Drain guide B female thread R IN-OUT reversal direction T Element service indicator 1 4 2B 4B 8B 11B 22B 37B 75B Standard 1 8 Standard 1 4 Standard 3 8 Standard 1 2 Standard 3 4 Accessory (Option) Symbol Description Bracket Nil B 1 Standard 11 2 Standard N.C. auto-drain C N.O. auto-drain