SMC Corporation of America
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C: 0.80 dm3/(sbar) (Passage 2 3) Compact: Width 18 x Length 63 (mm) Low power consumption 4 W DC (Standard type) 2 W DC (Low wattage type) Suitable for use in vacuum applications 101.2 kPa Suitable for use in copperfree applications The portions that come in contact with fluids do not contain copper, thus enabling the standard product to be used as is.

. 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 5 . 5-1 IDFB Series 1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3 6-4 . 6-5 6-5 . 6-7 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 R 9-1 . 9-1 9-2 . 9-1 9-3 . 9-1 10 S 10-1 . 10-1 10-2 . 10-1 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-3 12 V 12-1 . 12

(D NVZs000 Bdse Mounted Tvpe with subplate / 2 Positipn Douhk soletwid inch(r|m) Grommet/Nvzs240-OG NVZ5240-oH Dlll connector (D)/ N\rzs24coDoo8lT -9 E Er; -l v E L e ' n 6 e : 6 S'J --?

(D NVZs000 Bdse Mounted Tvpe with subplate / 2 Positipn Douhk soletwid inch(r|m) Grommet/Nvzs240-OG NVZ5240-oH Dlll connector (D)/ N\rzs24coDoo8lT -9 E Er; -l v E L e ' n 6 e : 6 S'J --?

to 1000 up to 1000 up to 1000 102.5 122 1.7-28 Low Friction Series MBlQ With Mounting Bracket Front flange/(F) Front flange (mm) Port Cushion valve 4-FD Bore size (mm) Stroke range Fd FZ FY FX FT FE FD B 32 40 50 63 80 100 25 31 38.5 39.5 45.5 54 79 90 110 120 153 178 32 36 45 50 63 75 64 72 90 100 126 150 10 10 12 12 16 16 3 3 2 2 4 4 7 9 9 9 12 14 up to 700 50 55 70 80 100 120 up to 800

Plug: Without check valve Socket: Without check valve KKA4S-02M-1 KKA4P-02M-1 40.2 KKA KKA KKA6S-04M-1 KKA6P-04M-1 76.0 KP How to Order LQ KKA 4 P M 02 MQR Built-in check valve Body size With check valve Nil -1 Socket/Plug designation 1/8 1/4 1/2 3/4 1 1 1/4 3 4 6 7 8 9 T Without check valve P S Plug Socket Note) KKA7/8/9 is not available without a check valve.

, 3/4-2 port 3, 5 port 30 (42) 30 (42) 3/8, 1/2, 3/4 1 port 3/8, 1/2, 3/4 1 port Dimension inside is for rubber seal.

When the master is programmed, refer to page 3-9 "3.9 Identification Code List and 3.10 ASCII Code List. 3.2 Content of Communication The content that can be communicated is as follows: 1) Reading of measured temperature 2) Setting and reading of target temperature 3) Setting and reading of offset value 4) Storage of set value 5) Setting and reading of control mode [Tips] All set values input

Number of step data (Points) I/O cable length [m] 2 2 stroke end points/ 12 intermediate points (Programless) Nil 1 3 5 Without cable 1.5 3 5 Parallel I/O type N P NPN PNP The controller is sold as single unit after the compatible actuator is set. Confirm that the combination of the controller and the actuator is correct.

adjustment bolt 2-6.6 through 72 13 Adjustment: Max. 10.3 6 2-M5 x 0.8 2 8 A port 1 B port +0.030 0 3-4H9 long groove depth 3 ( A , B , C ) 8g6 0.005 0.014 16h9 0 0.043 4-M6 x 1 depth 11 50 0 0.074 53.5h9 48 9 Rotary Table High Precision Type Series MSUA These drawings indicate the condition when the B port is pressurized.

9 NBR Piston seal Set of left nos. !8, !9. 6 cannot be repaired. Seal kit includes !8, !9. Order the seal kit, based on each bore size. Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.

9 NBR Piston seal Set of left nos. !8, !9. 6 cannot be repaired. Seal kit includes !8, !9. Order the seal kit, based on each bore size. Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.

However, if no leakage, the workpiece will not detach because the vacuum state is maintained even when the valve is turned ON. To release, an external 2 port valve (vacuum valve) must be provided. Application: The supply pressure is controlled by the external 2 port valve (vacuum valve) and releasing is also effected by the extermal 2 port valve.

Incorrect wiring Correct the wiring. 9 Part of the display is missing. Power saving mode Check if the power saving mode is selected. Reset the function settings. Product failure Replace the product. (1) Correct the wiring (2) Correct the wiring (1) Check the power supply wiring. (2) Check if there is bending stress 10 Display is flashing.

The warranty period of the product is 1 year in service or 1.5 years after the product is delivered, whichever is first.2) Also, the product may have specified durability, running distance or replacement parts. Please consult your nearest sales branch. 2.

The warranty period of the product is 1 year in service or 1.5 years after the product is delivered, whichever is first.2) Also, the product may have specified durability, running distance or replacement parts. Please consult your nearest sales branch. 2.

Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction. 2) Vacuum pads are excluded from this 1 year warranty. A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.

0 I/O cable length [m]*9 *5 When the driver type is selected, the cable is included. Select cable type and cable length. Example) S2S2: Standard cable (2 m) + Driver (LECSS2) S2 : Standard cable (2 m) Nil : Without cable and driver LEC S Nil Without cable H Without cable (Connector only) 1 1.5 *9 When Without driver is selected for driver type, only Nil: Without cable can be selected.

Note 2) Auto-shift function is not available when analog output option is selected. Also, analog output option is not available when auto-shift function is selected.

A 5 1 1 9 9 2 2 6 Valve element B B port 3 Port valve 2 Port valve Working Principle Component Parts When the pilot operated solenoid valve !