HRX-OM-X084

. 9-5 9.2 Outline dimensions . 9-6 9.2.1 HRR010-A-10/20. 9-6 9.2.2 HRR010-W-10/20. 9-7 9.3 Flow Chart . 9-8 9.3.1 HRR010-A-10/20. 9-8 9.3.2 HRR010-W-10/20. 9-8 HRR Series HRX-OM-X084 Contents 9.4 Cooling capacity . 9-9 9.4.1 HRR010-A -10. 9-9 9.4.2 HRR010-W-10. 9-9 9.4.3 HRR010-A -20. 9-10 9.4.4 HRR010-W-20. 9-10 9.5 Heating capacity . 9-11 9.5.1 HRR010-A-10. 9-11 9.5.2 HRR010-W-10. 9-11

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Output pulse [pulses/rev] Resolution per servo motor revolution Set value For instance, set "8" to Parameter No.PA15, the actually output A/B-phase pulses are as indicated below. 4194304 4 1 A B-phase output pulses 131072[pulse] 8 5 10 5.

42

) 96.2 71.7 96.2 71.7 58.2 VFR 1/8" External pilot port 44 106 9 9 91 44 106 49.7 58.2 Station number 1/8" External pilot port 49.7 9 9 U side entry (LU) VQ7 D side U side D side n n U side 8 8 Manual override 7 7 A B A B A B A B A B A A A B A B A B A B A B A A B B B A A A A A A A 6 6 5 5 215 P = 25 44 L1 L2 L1 L2 4 4 B B Indicator light 3 3 2 2 P = 25 1 1 27 38 50.5 27 38 50.5 44 Stations

Compact Cylinder Series CQS

A B 32 32 41 44 F 7.5 7.5 9 11 L A B 22 22 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 A B 17 17 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 12 16 20 25 45.5 13.5 25.5 5 to 30 5 to 30 5 to 50 5 to 50 35 to 200 35 to 200 75 to 200 75 to 300 6 8 7 12 6 8 10 12 25 29 36 40 M4 x 0.7 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 20.5 M3 x 0.5 32 38 47 52 5 6 8 10 15.5 20 3.5 3.5 5.4 5.4 45.5 13.5 25.5 34 M4 x 0.7

2/3 Port Valve

VX233 0 2 MaterialO 1 4 3 8 , 6 VX234 0 2 1 4 3 8 , 8 VX2350 Body Seal Brass, Stainless steel NBR, FPM, EPR, PTFE 10 VX2360 3 8 1 2 , 1 4 , 4.1-1 VX21/22/23 Energized Open (N.C.)

CL

AL B1 BC BN BP BQ BZ CD CX F GA GB GC GD GK GL GQ D E Bore size (mm) 0 0.033 0 0.033 0 0.033 0 0.039 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 20 20 73.5 55 3.5 10 Up to 300 57.5 13 18 9 8 15.5 8 6 13 38 80 4 8 CNS 25 26 83.5 64.5 4 10 Up to 300 69 13 22 9 9 19.5 10 9 17 45 90 7 8 32 8 26 83.5 64.5 4 10 Up to 300 69 13 22 9 9 19.5 12 9 17 45 90 7 CLS 40 11 32 90.5 70 4 15 Up to 300 76 16 24 10 8 21

MGP

) e 22.5 30 Bore size (mm) 80 100 d 8 10 c 12 13.5 b 20.3 23.3 a 13.3 15.3 6H7 5 10 Section XX Section XX detail WB WA Z Section XX 4-MM depth ML Bottom view HA: T-slot for hexagon bolt 4-OA through L Z WA 4-NN through 4-OB depth of counter bore 8 Section XX X 0.02 X 0.02 DA VB VA R H U T X PW DB 6H7 depth 10 GC 6H7 depth 10 2-Rc 3/8 PB GB GA 2-Rc 3/8 Q 10 (Plug) PA + Stroke JA JB S J K FA

CATALOG VC10

DIA DIA DIA .468 (11.9) 7/8 (22.2) 7/16 (11.1) A B A B 7/16 (22.2) 7/8 (11.1) .939 (23.9) .935 (23.8) .437 (11.1) 13/64 (5.2) .255 (6.5) .200 (5.1) #10-32 UNF x 5/16 (7.9) THD 2 places .468 (11.9) A CAVITY PORT 1 19/32 (40.5) .127 (3.29) .125 (3.18) DIA. x 7/32 (5.6) DEEP 2 PLACES 2 7/8 (73) B ORIFICE PORT 76 SOLENOID VALVES . . .

Micro Mechanical Valve Series VM1000

Color: Red, Black, Green, Yellow Front matter 1 A Mechanical Valve Variations Model Number of ports Valve construction Piping direction Port size (Rc, NPT, G) Page Best Pneumaticsz-2 VM1000 2 port 3 port Side ported (A) 2 (A) 2 4 Hose nipple Poppet 12 10 12 10 Bottom ported 1 (P) 3 (R) 1 (P) Side ported 1/8 VM100 2 port 3 port (A) 2 (A) 2 Page 1 Bottom ported M5 x 0.8 12 10 12 10 1 (P) 3

•

Flat wi1h rib mm Model ;A ;B .c F:M5 x O .8 F:M6 x l F: }l 1 Y Model ;A ;B c F:M 6x l F :lJllxl251 F: ~ E Y D E . G .D. E G D E 0 D ..1 D Flat Flat wit. h rib ZPTIOg 10 ! 12 I 12 5 21 8 6 21 8 6.2 27 ZPT40g 40 43 18.5 6 8 6.2 32 6.5 3.3 2PTSOl!

Electric Actuator with Integrated Guide

Allowable Moment (Nm) Allowable dynamic moment LTF8 Model Mounting orientation Load movement direction 300 200 L1 (mm) L3 (mm) a=1000 a=2000 a=3000 Pitching Rolling Vertical Vertical m a 100 L1 Mep 0 2 10 8 6 4 Transfer load m (kg) 300 200 a=1000 a=2000 a=3000 100 a L3 Mey 0 2 10 8 6 4 Transfer load m (kg) m : Transfer load (kg) a : Work piece acceleration (mm/s2) Me: Allowable dynamic moment

0.4

Drawing shows a SC case. 4 x M5 mounting hole 10.6 D side U side n Stations 8 7 6 5 4 3 2 1 C10 [3(R) EXH port] C10: 10 one-touch fitting EXH EXH R DIN rail clamp screw R 24.5 9.5 B B B B B B B B P X X P 31.6 49 16 A A A A A A A A (12) P = 16 41 23 C10 [1(P) SUP port] C10: 10 one-touch fitting C4, C6, C8 [4(A), 2(B) port] C4: 4 one-touch fitting C6: 6 one-touch fitting C8: 8 one-touch fitting

C95

8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

SYJ300/500/700

P and R port Type 40R Applicable solenoid valve SYJ514RSYJ524RHow to Order SS3YJ5 40R 05 01 R port 1/8 X port (External pilot type) Applicable blanking plate assembly SYJ500-10-3A P, R port thread type P port 1/8 R Stations A port size + + + + M5 x 0.8 02 : 20 2 stations : 20 stations P port 1/8 M5 01 M5 x 0.8 Nil Rc G NPT NPTF P A A X F N T 1/8 R P A port M5 x 0.8, 1/8 R port 1/8 Note) For

10

B A B A B A B A B A B A B A B A B A B 32 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 5.5 3.5 3.5 1 40 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 6 3.5 3.5 1 50 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 63 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 80 14 12.5 10 8.5 10.5 9 15.5 14 4 2.5 8 6.5 4 2.5 7.5 6 9.5 8 7 5.5 100 14 12.5 10 8.5 10.5 9 15.5

TABLE OF CONTENTS

DIA DIA DIA .468 (11.9) 7/8 (22.2) 7/16 (11.1) A B A B 7/16 (22.2) 7/8 (11.1) .939 (23.9) .935 (23.8) .437 (11.1) 13/64 (5.2) .255 (6.5) .200 (5.1) #10-32 UNF x 5/16 (7.9) THD 2 places .468 (11.9) A CAVITY PORT 1 19/32 (40.5) .127 (3.29) .125 (3.18) DIA. x 7/32 (5.6) DEEP 2 PLACES 2 7/8 (73) B ORIFICE PORT COAST PNEUMATICS 8055 E.

Aluminum High Vacuum Angle Valve

1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Possible to transfer a workpiece at low-speed.

Y = L2 = X = L1 = (mm) (mm) L2 6 (9 Y) to Y 7 (10 Y) to Y Y 3 to 9 3 to 10 L1 {10 (18 X) } to (X 2) {10 (20 X) } to (X 2) X 8 to18 10 to 20 Size 10 15 Size 10 15 Symbol: A11 Symbol: A12 Symbol: A13 The long shaft can be further shortened by machining a double-sided chamfer on to it. Since L1 is a standard chamfer, dimension E1 is 0.5 or more.

CNG

A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 18 15.5 13 38 93 1/8 50.5 14 8 12 2 85 10 18 5.5 6 4 8 5 26 Up to 200 20 to 200 22 19.5 17 45 103 1/8 59 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31 Up to 300 20 to 300 22 19.5 17 45 104 1/8 64 20 12 18 2 97 10 25 6.5 9 7 10 6 38 Up to 300 20 to 300 30 27 19 52 112 1/8 72.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 500

CG1

MM B1 KA AL Up to 125 Up to 200 Up to 200 Up to 200 5 5.5 5.5 6 26 31 38 47 5 6 6 8 35 40 40 50 10 10 10 10 12 12 12 13 2 2 2 2 12 14 18 25 1/8 1/8 1/8 1/8 8 10 12 16 24 29 35.5 44 14 16.5 20 26 M8 M10 X 1.25 M10 X 1.25 M14 X 1.5 13 17 17 19 6 8 10 14 18 22 22 30 15.5 19.5 19.5 27 M4 Depth 7 M5 Depth 7.5 M5 Depth 8 M6 Depth 12 S 1 to 50st 51 to 100st 101 to 125st 126 to 200st Bore (mm) 20