Ionizer

(c)When a sensor is not connected.

XL

1 1 1 1 2 (a) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

JXCx-OMU0004

P.16 6.4 I/O P.23 12. P.65 ONOFF 2.2 P.7 OFF OFF OFFLED ON STOP ON OFF 79 No.JXC-OMU0004-A 12. P.65 4. P.16 6.4 I/O P.23 3.4 P.14 3.1 P.11 CP.38 2.2 P.7 ALARM ON STOP ON OFF 10 ALARM ALARM ON ON 80 No.JXC-OMU0004-A 16.2 () 2.2 P.7 4.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Note 6) For an actuator with lock, add the power consumption for the lock. 23 - 3.2 How to Order 24 - 3.3 Construction LEFB25 Parts list A A Auto switch mounting bracket A-A * Motor bottom mounting type is the same. A-A No. Description Material Note No.

High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

MY1

Seal guide B Slide plate Spacer 21 22 Side seal unit MYMK-16-A MYMK-16-A MYMK-25-A MYMK-25-A MYMK-25-A 23 24 Hexagon socket head cap screw Chromated Chromium molybdenum steel 25 Replacement Parts: Seal Kit 20 40 50 25 32 63 16 No.

Digital pressure switch for energy-saving control ejector

This can be prevented by inserting a noise filter, such as a line noise filter and ferrite core, between the switch-mode power supply and the product, or by using a series power supply instead of a switch-mode power supply.

Solid State Auto Switches

Please contact SMC when the AC welding current exceeds 16000 A.

MXW

: M-5P) 74 36 59 5 32 8 Operating port M5 x 0.8 33 34 33 (Y) (Y) Operating direction (B) 6H9 +0.030 depth 5.5 0 39 125 (Plug: M-5P) Operating direction (A) 10.5 (B) 9.5 10 20 20 18 A 10.5 43 31 23 21.5 Z A 3 Cross section AA 4-M6 x 1 thread depth 12 3 x H G Bottom through-hole 5.1 H 7 depth 5.5 6H9 +0.030 0 F E 6H9 +0.030 depth 5.5 0 (mm) Model Z E F G H MXW16-75 270 83 112 71.5 45 MXW16-

Multi-Axis Step Motor Controller

A B-1 A A-1 B B-2 B A-2 COM-A/COM B-3 COM-B/ A-3 Cable type Nil Robotic cable (Flexible cable) S Standard cable Cable color Connector D terminal no.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

38 35 42 40.5 A 33 32.5 34 31 38 36.5 49.5 48.5 A B A B A B A B 20 25 32 40 50 63 80 100 B 24 (32) 24.5 (32.5) 25 (33) 27 (36) 32 (44) 33.5 (45.5) B 14.5 (22.5) 15 (23) 15.5 (23.5) 17.5 (26.5) 22.5 (34.5) 24 (36) 29 (43) 30 (44) B 20 (28) 20.5 (28.5) 21 (29) 23 (32) 28 (40) 29.5 (41.5) B 16 (24) 16.5 (24.5) 17 (25) 19 (28) 24 (36) 25.5 (37.5) 30.5 (44.5) 31.5 (45.5) Hs 27.5 30 33.5

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Use 0.3 to 0.7 times the thrust (differs depending on the operating speed) as a guide for actual use. g: Gravitational acceleration Dynamic moment Mounting orientation Dynamic load FE Horizontal Ceiling Wall Vertical Z M 1.4 100 x a x mn x g 1 3 a a ME x FE x Z Dynamic moment ME Dynamic moment ME does not occur. 1 3 mn x g ME M3 ME x FE x Y mn x g ME FE FE Note) Regardless of the mounting

Clamp Cylinder with Lock Series CLK1

Hs 71.5 77 84 A B 0 1.5 1.5 D-A4 23 24.5 24.5 Approx.

Air Slide Table Series MXQ

14 16.5 1.0 Allowable moment coefficient 0.7 0.5 Note) For A, A, A and A, there is no difference in the corrected values due to the stroke.

LEY-OM007

INP 1 INP ON 0.50 2 INP ON a bINP ON < / [mm/sec] [mm/sec] 1 4 30% 1 4 40% 5 20 35% 5 20 60% LEY*16** 21 50 60% 85% LEY*16*A* 21 50 80% 95% 1 4 20% 1 4 40% 5 20 35% 5 20 60% LEY*25** 21 35 50% 65% LEY*25*A* 21 35 80% 95% 1 4 20% 5 20 35% LEY*32** 21 30 60% 85% -41- LEY*16** LEY*25** LEY*32** LEY*16*A* LEY*25*A* A B C A B C A B C A B C A B C [kg] 1 1.5

MHC2

Use this as a standard when mounting, etc. Misc.

MHC2

Use this as a standard when mounting, etc. Misc.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

Hs Auto switch 12 15 Reed switches D-B5, D-B6 22.5 B A 33 113 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW Proper auto switch mounting positions (mm) D-F5F D-A5, D-A6 D-A3, D-A44 D-G39, D-K39 D-A59W D-F5, D-J5 D-F5W, D-J5W D-F5BAL D-F5NTL D-B5, D-B64 Auto switch types D-B59W Bore size (mm) A A A B A A A B A B B B B B 40 21 10.5 14 11.5 14.5 17 22 23 11

Coolant Valve

Water Hammer Characteristics VNC1 (N.C. 0.49 MPa) Conditions: Piping 30 m Steel tube, total pressure 0.49 MPa VNC4 (N.C. 0.97 MPa) Conditions: Piping 30 m Steel tube, total pressure 0.97 MPa 2.5 15A Peak pressure at valve closed (MPa) Peak pressure at valve closed (MPa) 8A 25A 2 1 20A 32 A F 15A 20A 40 A F 32 A F 1.6 0.8 25A 40 A F 50 A F 65F 50 A F 1.2 0.6 80F 65F 80F 0.8 0.4 0.4 0.2 0 1

LEF-OM006xx

.38 5.3 <> NPNPNP LEFS16A-100 NPN -14- 2.4. 16/25/32 40 22 21 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 -15- 1 14 2 15 3 16 4 17 5 18 6 19 NBR 7 20 8 21 9 A 22 10 23 11 24 12 25 13 -16- 3. 3.1. 1 I/O LEC-CN5-* / PLC 1 2 DC24V