Table of Contents

, Tool required L plug connector Locking type (Manual) Single Locking type Closed center Double Exhaust center Pressure center Grommet Plug-in 12 V 24 V DC 100 V 110 V AC 200 V 220 V AC 50/60 Hz 50/60 Hz 4/2 5/3 (A/B R1/R2) 3 position Closed center Double Single Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal VQ130 0.73

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

(same side) D-Z73, Z76, Z80 Reed switch 1 pc., 2 pcs. (different sides) 20 2 pcs. (same side) 60 D-Y59A(B), Y69A(B) Y7P(V) 1 pc., 2 pcs. (different sides) 20 2 pcs. (same side) 70 D-Y7NW(V), Y7PW(V) Y7BW(V) Solid state switch 1 pc., 2 pcs. (different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.

SI Unit for Vacuum Manifold

Designation Content 1 SV24 V (PWR(V)) +24 V for valves 2 SV0 V (PWR(V)) 0 V for valves 3 SI24 V (PWR) +24 V for logic/sensors 4 SI0 V (PWR) 0 V for logic/sensors Fig. 2-4 Pin allocation of M12 4 pin plug A-coded connector Power-supply line for valves and power-supply line for logic/sensors operation are isolated. Be sure to supply power respectively.

ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 Cuts air consumption by operating the return stroke at a reduced pressure.

PSxx-OMG0001CN

(A/D ) ( ) 6 2030 20 80 mA (Er1,2) () ( (Er4,6,7,8) ) DC1224 V DC1224 V Er1,2) Er4,6,7,8) 7 (HHH) "HHH" "LLL" Er3) (LLL) (Er3) 7F.S. -27No.PS-OMG0001CN-H No. DC1224 V DC1224 V 8 DC(+) DC(-) DC1224 V DC1224 V DC(+) 9 DC(-) / / 10 ( ) 11 / 5m / 12 2030 20 -28No.PS-OMG0001CN-H No.

Fieldbus system PROFINET compatible SI Unit

Power connectors Pin Remarks 1 24 V (US1) 2 0 V (US1) 3 24 V (US2) 4 0 V (US2) 5 FE View of Push Pull connector (XD1/XD2) Fig. 3-6 Pin allocation of Push Pull connector (24 Volt) for EX245-SPN1A/SPN2A Pin Remarks 1 0 V (US2) 2 0 V (US1) 3 FE 4 24 V (US1) 5 24 V (US2) View of 7/8 inch 5 pins plug connector (XD1) View of 7/8 inch 5 pins socket connector (XD2) Fig. 3-7 Pin allocation of 7/8

PSxx-OMS0004CN

OUT() DC(-) DC(+) PSE57--28 420 mA N.C. 500 (24 V ) 100 (12 V ) OUT() DC(-) -13No.PS-OMS0004CN-D (A/D ) () 20 2030 -14No.PS-OMS0004CN-D PSE570 PSE573 PSE574 01MPa -100100 kPa 0500 kPa 3.0MPa 600 kPa 1.5MPa oC) oC) (25 ) 2F.S.(050 3F.S.(050 oC) oC) 3F.S.(-1060 4F.S.(-1060 PSE57PSE57--28 DC1224 V1010% 10 mA 420 mA 15 V 1 k 500 (24 V ) 100 (12 V ) (25 oC) 1.0F.S. 0.5F.S. oC)

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(Example) D-r7A1L o (.) Most sensitive position/Operatinq range incn (mm) i i . : i l i . . , : i r i r r i . r r i , , I i I i r I i i ] i : I I i I I i I I i . i D-H7A2 ( ) D-H7B ( + ) Solid slale swilch* ar ihlerchMgable with Ed 6wilches. D C7 lype D-HT lype I SERIES NCDJ2 D-C73c, D-C80C Band Mounted Reed Type Soecifications & ]J -v -rtF !F .

Air Cylinder NCJ2 Series Miniature Stainless Steel Body

(Example) D-r7A1L o (.) Most sensitive position/Operatinq range incn (mm) i i . : i l i . . , : i r i r r i . r r i , , I i I i r I i i ] i : I I i I I i I I i . i D-H7A2 ( ) D-H7B ( + ) Solid slale swilch* ar ihlerchMgable with Ed 6wilches. D C7 lype D-HT lype I SERIES NCDJ2 D-C73c, D-C80C Band Mounted Reed Type Soecifications & ]J -v -rtF !F .

Plate Cylinder: Double Acting, Single Rod ø25, ø32, ø40, ø50, ø63 Series MU

12 V IC circuit Reed auto switch Solid state auto switch 12 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Relay, PLC Grommet Yes 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PA M9PAV M9BA M9BAV 12 V Magnetic field resistant (2-color indication) P3DW Note 2) 3-wire (NPN equivalent) A96V A96 5 V 12 V IC circuit Yes Relay, PLC 24 V Grommet

ZL3-OM00601

(mg/m3) 0.1 d 0.5 0.5 d 1.0 1.0 d 5.0 point() 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 Not specified 90,000 1,000 3 -20 3 1 4 Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 3.3.2 Air pressure 1) Operation with a pressure exceeding the maximum operating pressure leads to breakage of the product.

4 Port Solenoid Valve Series VQD1000

V 4 Q D 1 5 Clean series Manifold type 2 Body ported 5 Base mounted Valve stations 02 2 stations 20 20 stations (Maximum) Port size M5 M5 x 0.8 C4 4 cassette Note) 1(P), 3(R) ports: Rc1/8.

53

IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 134 Thermo-chiller Inverter Type HRSH090 Series Circulating Fluid Temperature

New

D-G

HRS100/150

as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 97 Thermo-chiller Standard Type HRS100/150 Series

MXH Series Compact Slide

D-F9 D-F9 W B W 20 (22) A D-A9 V D-F9 V D-F9 WV W B Dimension inside ( ) is for model D-A9 V.

ISO Standard (15552) Air Cylinder: Standard Type Double Acting, Single/Double Rod ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 CP96 Series

5 V, 12 V M9NW V V V v v IC circuit 3-wire (PNP) M9PW V V V v v 2-wire 12 V M9BW V V V v v Relay, PLC 24 V Yes 3-wire (NPN) 5 V, 12 V M9NA*1 v v V v v IC circuit 3-wire (PNP) M9PA*1 v v V v v 2-wire 12 V M9BA*1 v v V v v Water-resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 V V IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 V V V V Relay, PLC

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

Reed switch Solid state switch 5 V IC circuit Z76 Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Y es Relay, PLC 24 V 2-wire 100 V, 200 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V 100 V, 200 V 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication

VNB

G E C T D DL S Z L 1, 2, 3, 4 (Only G)(Except G) 5, 6, 7 (Except DL)(Only T) (Only T) 17-4-13 2 Series VNB How to Order Seal material Body option Nil V Standard Vacuum pilot A B C NBR seals FKM seals EPR seals Thread type Bracket (valve size: 1/2/3/4.)

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Mounting dimensions of extension fitting One-touch Fittings (KQ2H/KQ2S/KQ2L/KQ2W/KJH/KJS/KJL/KJW) Auto switch model D-M9(V) D-M9W(V) D-F8 D-M9A(V) 5.9 S 10 O Width across flats 5 12 19.5 Interference between the auto switch and the fitting When mounting extension fittings, first, tighten it by hand, then give it an additional 1/4 turn with a wrench. 924 Air Gripper MHZ2 1122Dimensions L