Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: V [7 μin. (0.18 μm)], Range Options: Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male),

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: SH (Body: 316 SS; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Range Options: Standard, Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316 SS; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Range Options: Standard, Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom

Delivery Pressure: 15 [5 to 150 psig (0.034 to 1.0 MPa)], Material: SH (Body: 316 SS; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Range Options: Standard, Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316 SS; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Range Options: Standard, Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom

Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 3PW [3 Ports (1-In; 2-Out; 4-Gauge Port Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2 MPa

Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No Gauge Port, Pressure Gauge

Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No Gauge Port, Pressure

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: X [5 μin. (0.13 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet: No

IZx-OMV0005

Replacement of the emitter assembly . 22 4-4. Alarm function . 24 5. Performance . 25 5-1.Basic characteristics . 25 6. Dimensions . 28 7. Specifications . 33 8. Troubleshooting . 34 2 Doc. no.IZ-OMV0005 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Fieldbus system Digital unit

. -21No.EX-OMN0036-B (3)EX600-DX E Connector pin assignment Configuration Pin number Signal name 1 Input 0 2 Input 2 3 Input 4 4 Input 6 5 Input 8 6 Input 10 7 Input 12 8 Input 14 9 NC 10 24 V (Control and input) 11 0 V (Control and input) 12 0 V (Control and input) 13 FE 14 Input 1 15 Input 3 16 Input 5 17 Input 7 18 Input 9 19 Input 11 20 Input 13 21 Input 15 22 24 V (Control and input)

MICRO MIST SEPARATOR

Groove of product (body) 30rotation Lock button Bowl assembly 22 11. DISASSEMBLY DRAWING 1) AFD20-A 2) AFD30, 40-A Body Body Tension bolt Tension bolt Element assembly Element assembly Bowl packing Bowl packing Bowl assembly Bowl assembly 23 12.

AHC System Series MA

For mounting tool adapter 3 x M3 x 0.5 depth 4 Hexagon socket head cap screw M3 x 14 (3 included) MHZ +0.022 0 depth 6 MHF 3 x 3 (A, B, C common view) MHL 6 x M2 x 0.4 thread depth 4 (A, B, C common view) MHR View D Open: 16, Closed: 10 Open: 22, Closed 14 MHK 15: MHR2-15-A310 1 2 Use MA3 0-AM3 for the tool adapter.

Precision Regulator

(Option) 30 2 ARJ 2.3 48 Pressure gauge (Option) AR425 to 935 Pressure gauge (Option) ARX 5.5 9.5 M5 depth 7 AMR 9 M5 depth 7 2 x Rc 1/8 15.5 IN 119 Pressure gauge port 83 75 Bleed Bleed IN ARM Exhaust IN OUT(2) Bleed Bleed SUP(1) IN G 2 OUT 144 43 G ARP 76 22 2 x Rc 1/8 Pressure gauge port 50 50 (17.7) 2 x Rc 1/4 Port size IR-A EXH(3) OUT 2 OUT(2) SUP(1) 60 Rc 1/2 Exhaust port 66 2 x Rc

90

AR425 to 935 ARX AMR Winding direction ARM Sealant tape Expose approx. 2 threads ARP Recommended Proper Torque [Nm] Connection thread 1/8 1/4 3/8 1/2 Note) IR-A IR-A Torque 7 to 9 12 to 14 22 to 24 28 to 30 Note) Tightening force for connecting to the EXH port of IR301 2 -A is 8 to 10 Nm. Operating Environment IR Warning IRV 1.

0.5

Sold Separately Page 12 Specifications Page 13 Functions and Indications Page 13 Alarm Page 13 Wiring Page 14 Wiring Circuit Page 14 Operation Chart Page 15 DimensionsPage 16 Fan Type Ionizer IZF10/IZF10R Series Technical Data/Static Neutralization Performance q Installation Distance and Discharge TimePage 20 w Static Neutralization RangePage 20 How to Order Page 21 Accessories Page 22

Nozzle Type Ionizer

x 0.5 thread depth 4 (Ground terminal) 40 27.7 L-L Applicable tubing O.D. d A 86.4 [mm] Model d A IZN10E-01 02m06 6 3.5 IZN10E-01 02m07 1/4" 7 34.7 26 2 x M3 x 0.5 thread depth 10 11 291 *1 Dimension of the resin part in described in the Mounting Warning note 3 (page 24). 18.31 One-touch fitting (Elbow) IZN10E-mm 16 17 D B C Applicable tubing O.D. d 180 [mm] Model d B C D IZN10E-mm16 6 22

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Conductor area 0.15 mm2 (AWG26) Model M5 01 N01 Port size M5 x 0.8 R1/8 NPT1/8 Insulator O.D. 1.0 mm Color Brown, Blue, Black (3-core) Sheath Finished O.D. 3.4 Sensor pressure receiving area Silicon Piping port (Common) PBT, CB156, Heat-resistant PPS, O-ring: HNBR Piping port C3604 (Electroless nickel plating), Stainless steel 304, NBR Materials of parts in contact with fluid Weight Body 22

Compact Cylinder

264 53 79 106 132 158 185 25 10 OUT 491 98 147 196 245 295 344 IN 412 82 124 165 206 247 289 32 12 OUT 804 161 241 322 402 483 563 IN 691 138 207 276 346 415 484 40 14 OUT 1257 251 377 503 628 754 880 IN 1103 221 331 441 551 662 772 50 18 OUT 1963 393 589 785 982 1178 1374 IN 1709 342 513 684 855 1025 1196 63 18 OUT 3117 623 935 1247 1559 1870 2182 IN 2863 573 859 1145 1431 1718 2004 80 22

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

5 16 1 4 1 4 3 8 17.46 26 17 33.5 22.23 7 17.9 30.5 25.0 3 8 31.5 22 21 33.9 Applicable tubing Reference dimensions after NPT thread installation.