Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: w/o Lead Wire, Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: w/o Lead Wire, Bracket: A2 (Bracket B, Horizontal Mounting), Operation Manual: K (Operation Manual, Calibration Certificate)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: w/o Lead Wire, Bracket: A1 (Bracket A, Vertical Mounting), Operation Manual: K (Operation Manual, Calibration Certificate)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: w/o Lead Wire, Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: w/o Lead Wire, Bracket: B (Panel Mount Adapter)

The ZSE2 series is a compact, pressure switch (for vacuum pressure) and can be integrated with ZX or ZR vacuum systems. The ZSE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple. 3 SCREEN HI PRECISION DIG PRESS SWITCH. N63. 73.00000 lb. VACUUM SWITCH, ZSE30, ZSE30A.

Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

240

Time [s] LEC SS-T T1 T2 T3 T4 T1 = V/a1 [s] T3 = V/a2 [s] LEC Y T2: Constant speed time can be found from the following equation.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

WA WB View E NN F GB GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Piping port 2 x M5 x 0.8 Cover surface D LY LB LH LT LZ LX LT S + Stroke H NA A NB Y X Y X 4 x LC Mounting hole LS + Stroke Z + Stroke WW C B 0 0.3 B 0 0.3 Drawing of view E (mm) Z S WW WB WA NB NA NN MM H GB GA F D C B A Y X 91.5 92.5 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 LT 14 14 LH 5.5 5.5 LC

MHZ

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G MM L J K C D B A W MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 26 55 115 235 420 4.45 5.8 7.45 8.9 14.8 17.7 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 3 5 6 8

MHZ

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G A W B C D J K MM L MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 2 2.45 3.05 3.95 4.9 7.3 8.7 5 1 1.4 1.4 1.6 2 3 3 4 5 8 10 12 15 18 3.5 6 8 10 12 20 24 7.2 5.2 8.3 10.5 13.1 18 22 7.5

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Description Material Note Component Parts Heat treated Stainless steel Body q Heat treated Table Stainless steel w u q w i o y !3 !2 !

Series 10-, 21- AW-B Filter Regulator

Please contact SMC regarding the connection thread NPT and pressure gauge supply for psi unit specifications. 1080 A 1021-AW-B Filter Regulator Dimensions J J D M N T AW20-B 1021Bracket (Option) S U Panel fitting dimension F Y R Applicable tubing 6/4 W C Q V BB IN OUT OUT K H IN Z P2 Plate thickness 10-/21-AW20-B: Max. 3.5 Pressure gauge (Option) (Pressure gauge port size) B 2 x P1 (Port

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

WA WB View E NN F GB GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Piping port 2 x M5 x 0.8 Cover surface D LY LB LH LT LZ LX LT S + Stroke H NA A NB Y X Y X 4 x LC Mounting hole LS + Stroke Z + Stroke WW C B 0 0.3 B 0 0.3 Drawing of view (E) (mm) Z S WW WB WA NB NA NN MM H GB GA F D C B A Y X 91.5 92.5 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 LT 14 14 LH 5.5 5.5 LC

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K AA BB H J M N P1 P2 A B Note 1) C D 10-/21-AR20K-B 2 Note 2) 1/8, 1/4 20.5 30 1/8 11 34 40 43.9 44 67.4 5.4 65.5 26.5 15.4 28.5 55 M28 x 1 2.3 28.5 24.7 28.5 14 6 10-/21-AR25K-B

AR20-B to AR60-B

Standard specifications Optional specifications Square type pressure gauge Digital pressure switch Round type pressure gauge Round type pressure gauge (with color zone) P1 P2 A B Note 1) C D F J K H J H J H J H J AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 AR20(K)-B 1/8, 1/4 1/8 40 67.4 26.5 28.5 M28 x 1 28.5 2 Note 2) 28 29.5 27.8 40 37.5 65 37.5 66 AR25(K)-B 1/4, 3/8 1/8

CQS

Description Minimum operating pressure 0.07 0.07 0.05 0.05 Standard stroke Stroke range Bore size Allowable Kinetic Energy (J) Stroke range 1 to 29 12, 16 20 25 12 16 Bore size (mm) 1 to 49 20, 25 Standard 0.055 0.09 0.022 0.038 Part no.: CQSWB25-47D CQSWB25-50D with 3 mm width spacer inside. B dimension is 79 mm.

XLAQ/XLDQ

Note 2) Vacuum grease (Fluorine-based, Y-VAC2) is applied to the external seal of the vacuum components.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

I 4-N through 0.2 D E M L B + Stroke K 0.2 A + Stroke M E 25, 30, 40 H effective thread depth C 2-Rc1/8 (NPT1/8, G1/8) F Q Y 2 x 4-OB Depth of counterbore RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E (mm) Bore size (mm) Stroke range (mm) Note) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6( 5.8) 29 5.5 M3 x 0.5

Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: NPT 1/8, Option 1: w/o Lead Wire, Option 2: None, Option 3: w/o Operation Manual, w/o Calibration Certificate