ASR

(-F20) ASR530F-03-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S(-F20) ASQ530F-02-10S(-F20) ASQ530F-02-12S(-F20) ASQ530F-03-06S(-F20) ASQ530F-03-08S(-F20) ASQ530F-03-10S(-F20) ASQ530F

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.8 90.2 91.8 90.2 91.8 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3

XG_-OMV0028

XGT311-50336A1-1A XGT31*-50336-*A A ASSY XGT311-50336A1-1C XGT31*-50336-*C A XGT311-50336A1-1F XGT31*-50336-*F A ASSY XGT300-2-1S O FKM XGT300-9-10S AS568-273 FKM XGT300-9-9S XGT31*-50336-1* AS568-271 O Kalrez R 4079 XGT300-9-11S XGT31*-50336-2* AS568-271 O (FKM) XGT300-9-7S AS568-177 XGT300-4-9S XGT300-2-5S ASSY 6 XGT300-50AS XGT31*-50336-*C 9 D XGT300-50DS XGT31*-50336-*F XGT0402-9-12S

! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

L4 A * M ASP330F-01-06S-X369 R1/8 M5X0.8 12 8 14.2 20.4 27.5 13.6 38.6 35.2 13.5 6 11.6 ASP430F-02-06S-X369 25.2 34.4 18.3 16.8 R1/4 17 18.5 48.7 42.4 ASP430F-02-08S-X369 27.2 36.4 18.4 18.5 Rc1/8 12 8 15.2 ASP530F-03-08S-X369 29.7 41.2 18.7 R3/8 19 23 21 56.2 50 ASP530F-03-10S-X369 31.6 43.1 20.8 10 18.5 ASP630F-04-10S-X369 33.6 47.9 25.6 20.8 R1/2 Rc1/4 24 17 28.6 70.3 61.8 ASP630F-04-12S-X369

Wedge Cam Operation Provides

distance (mm) (L1) Open distance (mm) (L2) Opening/Closing stroke (mm) (L2_L1) Bore size (mm) Weight (g) Model MHZ2 MHK2-12D 12 External hold: 15 Internal hold: 16 4 9 13 75 MHZJ2 External hold: 31 Internal hold: 36 External hold: 46 Internal hold: 56 External hold: 80 Internal hold: 86 MHK2-16D 16 6 14.6 20.6 113 MHQ Double acting MHK2-20D 20 10 16 26 235 MHL2 MHK2-25D 25 14 19 33 440 MHK2-12S

MHK2

Internal Grip External Grip MHK2-12S MHK2-12C 20 15 Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) 15 10 0.5 MPa 0.5 MPa 10 0.4 MPa 0.4 MPa 5 5 0.3 MPa 0.3 MPa F F 0 0 10 20 30 40 50 10 20 30 40 50 Note) In case of single acting type, the value is for stroke center.

MHK2

Internal Grip External Grip MHK2-12C MHK2-12S 20 15 Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) 15 10 0.5 MPa 0.5 MPa 10 0.4 MPa 0.4 MPa 5 5 0.3 MPa 0.3 MPa F F 0 0 10 20 30 40 50 10 20 30 40 50 Note) In case of single acting type, the value is for stroke center.

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

operating frequency (c.p.m) Mass (g) Effective gripping force per finger (N) Action Model Bore size (mm) External grip: 15 Internal grip : 16 External grip: 31 Internal grip : 36 External grip: 46 Internal grip : 56 External grip: 80 Internal grip : 86 MHK2-12D 12 4 9 13 75 Double acting Single acting MHK2-16D 16 6 14.6 20.6 113 MHK2-20D 20 10 16 26 235 MHZ MHK2-25D 25 14 19 33 440 MHK2-12S

Slit Valve

Description Part number Material Corresponding model XL XGT22-32XGT0101-2-1S Gate 1 A6063 XGT22-46236XGT0402-2-1S XLQ FKM XGT200-9-13S XGT22-32XM XY Kalrez 4079 XGT200-9-14S O-ring (Gate) 2 FKM XGT200-9-7S XGT22-46236Kalrez 4079 XGT200-9-9S DXGT22Wiper 3 XGT200-4-9S O-ring (Body opening side) 4 FKM XGT200-9-12S XSA XGT22O-ring (Bonnet assembly) 5 XGT200-9-11S XGT22Holding bolt 6 Stainless

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Model L5 D3 T2 13.7 18.7 16.8 18.7 18.7 20.8 20.8 21.8 34.6 33.9 11.8 39.6 38.9 22.9 28.2 25.2 28.2 28.2 32.6 32.6 34.4 11.6 15.2 12.8 15.2 15.2 18.5 18.5 20.9 38.4 44.7 43.4 46.4 51.3 54.1 64.2 66 14 15.8 18 19.7 20.3 23.1 32 35 65 68 107 110 212 215 6 8 6 8 8 10 10 12 ASP330F-01-06S ASP330F-01-08S ASP430F-02-06S ASP430F-02-08S ASP530F-03-08S ASP530F-03-10S ASP630F-04-10S ASP630F-04-12S

Dual Speed Controller with One-touch Fitting Series ASD

83 20.9 22 55.9 34.4 6 ASD530F-03-06S 74 17 12.8 48.3 25.2 20.3 8 ASD530F-03-08S 93 18.5 15.2 51.3 28.2 41.9 46.9 46.5 41.5 19.8 14 23 R 3/8 19 40 35 10 ASD530F-03-10S 98 21 54.1 32.6 18.5 23.1 12 ASD530F-03-12S 101 22 55.9 34.4 20.9 10 ASD630F-04-10S 177 21 64.3 32.6 18.5 57.3 64.8 57.6 50.1 18.6 R 1/2 49.6 42.1 26.5 28.6 25.9 24 12 ASD630F-04-12S 179 22 66.1 34.4 20.9 Reference dimensions

XL

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

Wedge Cam Operation Gripper Series MHK2

Holding Force MHK2-12C MHK2-12S 20 15 Pressure 0.6MPa Pressure 0.6MPa Holding force N Holding force N 15 10 0.5MPa 0.5MPa 10 0.4MPa 0.4MPa F F 5 5 0.3MPa 0.3MPa Note) In case of single acting type, the value is for stroke center. 0 0 10 20 30 40 50 10 20 30 40 50 1N = 0.2248 lbf = 0.102 kgf 1MPa = 145 psi = 10.2 kgf/cm2 Holding point L mm Holding point L mm MHK2-16S MHK2-16C O.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

22 25.2 48.3 6 17 12.8 ASD530FG-03-06S 20.3 28.2 51.3 8 18.5 15.2 ASD530FG-03-08S 23 19.8 46.9 41.9 48.8 43.8 19 R 3/8 14 40 35 32.6 54.1 10 21 18.5 ASD530FG-03-10S 23.1 34.4 55.9 12 22 20.9 ASD530FG-03-12S 32.6 64.3 10 21 18.5 ASD630FG-04-10S 28.6 26.5 25.9 64.8 57.3 57.6 50.1 24 R 1/2 18.6 49.6 42.1 34.4 66.1 12 22 20.9 ASD630FG-04-12S Reference dimensions of M5 x 0.8, R threads after

High Vacuum Angle Valve, XL Series

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

20.9 17 74 25.2 48.3 6 ASD530FG-03-06S 12.8 20.3 18.5 93 28.2 51.3 8 ASD530FG-03-08S 15.2 46.9 41.9 45.4 40.4 23 19.8 19 R 3/8 40 35 14 21 98 32.6 54.1 10 ASD530FG-03-10S 18.5 23.1 22 101 34.4 55.9 12 ASD530FG-03-12S 20.9 21 177 32.6 64.3 10 ASD630FG-04-10S 18.5 64.8 57.3 56.7 49.2 28.6 26.5 25.9 24 R 1/2 49.6 42.1 18.6 22 179 34.4 66.1 12 ASD630FG-04-12S 20.9 Note 1) Reference dimensions

Table of Contents

MIN. 1 2 Note 1) d Note 2) L3 Note 3) L4 ASR430F-02-06S,-F20 ASR430F-02-08S,-F20 ASR430F-02-10S,-F20 ASR530F-02-06S,-F20 ASR530F-02-08S,-F20 ASR530F-02-10S,-F20 ASR530F-02-12S,-F20 ASR530F-03-06S,-F20 ASR530F-03-08S,-F20 ASR530F-03-10S,-F20 ASR530F-03-12S,-F20 ASR630F-03-10S,-F20 ASR630F-03-12S,-F20 ASR630F-04-10S,-F20 ASR630F-04-12S,-F20 89 111 17 34.9 57.7 6 63.7 21.5 20 17 R1/4 93 114

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 25.7 23.3 25.7 23.3 25.7 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2

AS-FG/ASD-FG

25.2 48.3 6 17 12.8 ASD530FG-03-06S 20.3 28.2 51.3 8 18.5 15.2 ASD530FG-03-08S 23 19.8 46.9 41.9 48.8 43.8 19 R(PT) 3/8 40 14 35 32.6 54.1 10 21 18.5 ASD530FG-03-10S 23.1 34.4 55.9 12 22 20.9 ASD530FG-03-12S 32.6 64.3 10 21 18.5 ASD630FG-04-10S 28.6 26.5 64.8 57.3 57.6 50.1 24 R(PT) 1/2 25.9 49.6 18.6 42.1 34.4 66.1 12 22 20.9 ASD630FG-04-12S Reference dimensions for M5 x 0.8 and R(PT)

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

ASG22F-M5-04 ASG22F-M5-06 ASG32F-01-04S ASG32F-01-06S ASG32F-01-08S ASG42F-02-06S ASG42F-02-08S ASG42F-02-10S ASG52F-03-08S ASG52F-03-10S ASG52F-03-12S ASG62F-04-12S 4 10.6 23 28.8 11.6 25.2 18.2 M5 x 0.8 8 15.8 37.2 33.7 33.7 30.2 6 13 23.6 30.6 14 34.4 18.8 4 10.6 24.8 32 14.3 39.4 18.2 1/8 12 18.6 44 39 40 35 6 13 25.4 32.6 14.3 42.4 18.8 8 15 27.5 35.5 16 52.4 20.9 6 13 27.3 36.2 17.9