I

Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.

CYPSeries

type snap ring for shaft Aluminum alloy 22 45 NBR Cushion seal O-ring NBR 6 Clean Room Rodless Cylinder Series CYP Dimensions (mm) 1in = 25.4mm E Depth ED 4-MM Thread depth M T Y L T K PA 4-Counter bore dia B Counter bore depth C F 4-LD QW PB N E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction

CYPSeries

type snap ring for shaft Aluminum alloy 22 45 NBR Cushion seal O-ring NBR 6 Clean Room Rodless Cylinder Series CYP Dimensions (mm) 1in = 25.4mm E Depth ED 4-MM Thread depth M T Y L T K PA 4-Counter bore dia B Counter bore depth C F 4-LD QW PB N E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction

3 Port Air Operated Valve

Common exhaust Individual exhaust Accessory for manifold applicable solenoid Valve Model Applicable manifold model Accessories O-ring KA00087 (P8), 4 pcs. round head combination screw DXT010-66-2, 2 pcs. Common/lndividual VOA315 exhaust 7 No.VT315-OMH0004-C Troubleshooting Perform troubleshooting with higher possibility based on the failure phenomenon.

3 Port Air Operated Valve

VZA Common EXH VFA 2(A) port 1/4 1(P) port 1/4 3(R) port 1/4 VFRA 2 to 20 stations VPA300 VV3PA3-42 VPA4 SYJA Individual EXH VZA 1(P) port 1/4 2(A) port 1/4 3(R) port 1/4 VTA VGA VV3PA5-41 VPA VPA VPA3 Common EXH Air operated valve Base mounted 1(P) port 3/8 3(R) port 3/8 2(A) port 3/8 2 to 20 stations VPA500 P. 1569 VV3PA5-42 Individual EXH 1(P) port 3/8 3(R) port 3/8 2(A) port 3/8 VV3PA7

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Note 2) 2 x 3.5 through M5 x 0.8 32 0.5 15.5 25 6 Rod end nut 9 Flat washer 5 9.2 10.5 4 4 10 15.5 27 + Stroke 14 25 8 4 41 + Stroke 16 17.5 5 Note 2) 2 x 2 x 6.5 counterbore 2 x 2 x M4 x 0.7 effective depth 7 2 x M5 x 0.8 (Piping port) M5 x 0.8 (Relief port) 5.5 2 x 3.5 through 38 M6 x 1.0 0.5 20 29 8 Rod end nut 10 Flat washer 11.5 6 12 4

Title not found

3/8 5 AF4000 1/4, 3/8, 1/2 Float style auto drain AF4000-06 3/4 Pressure differential auto-drain 3/4, 1 AF5000 AF6000 1 Mist Separator Series AFM AFM2000 1/8, 1/4 Bracket AFM3000 1/4, 3/8 0.3 Float style auto drain AFM4000 1/4, 3/8, 1/2 Pressure differential auto-drain AFM4000-06 3/4 Micro Mist Separator Series AFD AFD2000 1/8, 1/4 Bracket AFD3000 1/4, 3/8 0.01 Float style auto drain AFD4000

Angular Style Air Gripper Series MHC2/MHCA2/MHCM2

2 t !9 !5 !4 u Component Parts No. Description No.

PFxx-OMX0002

Lead wire with M12 connector (ZS-49-A) M12 female Pin number Description M12 male Pin number 1 L+ 1 2 N.C. or Other 2 3 L3 4 C/Q 4 -97No.PF-OMX0002-B Revision history A: Contents revised in several places. [August 2022] B: Contents revised in several places.

EX510-GMJ1.eng

input and controling GW 24 VDC GW unit 4 2 3 7 8 Accessory No.

Modular Type Regulator Series AR

Proof pressure Maximum operating pressure Set pressure range 5 to 60C (with no freezing) Material Rubber parts FPM Ambient and fluid temperature Main metal parts Applicable models Applicable models Model Model AR25 1/4, 3/8 AR30 1/4, 3/8 AR40 AR40-06 3/4 AR50 3/4, 1 AR60 1 AR20 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 AR40 AR40-06 3/4 AR50 3/4, 1 AR60 1 1/4, 3/8, 1/2 1/4, 3/8, 1/2 Port size Port

Precision Regulator

IR30-OM02-F PRODUCT NAME Precision Regulator MODEL/ Series IR3000 IR3010 IR3020 Contents Safety Instructions 2~3 1. Specifications 4~5 2. Construction and operation principle 6 3. How to order 7 4. Marking on product 7 5. Precautions for handling 8~11 6. Warranty 12 7. Troubleshooting 13 8.

IDX-OM-W038

WEB IDF-S0001 1 C32FP-260S 1 IDF-S1932 1 2 44 IDH Series 4.1 IDX-OM-W038 4 4.2.4 2 4 x 40 x 72 (1) 1.4 (5)( ,) 2.O 3.O 4. 5. 6.4 7. 1 1 OUT IN 4 4 3 3 2 2 5 5 6 IDH*4 IDH*6 1 2 AMH-EL350 3 AMH-EL250 4 O 5 AM-CA250C-D E AM-CA250C-C AM-CA350C-D E AM-CA350C-C 6 45 IDH Series 4.2 IDX-OM-W038 4 (2) 1.4 (5)( ,) 2.O 3.O 4. 5. 6.4 7. 1 1 IN OUT 4 4 3 3 2 2 5 5 IDH*4

SI Unit for Vacuum Manifold

Process data size Vacuum manifold stations Input process data Output process data 4 4 byte 2 byte 8 5 byte 3 byte 12 6 byte 4 byte 16 7 byte 5 byte 4.1. Input process data Table 4-2.

70pvvna

B: Locking slotted type 4 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz 10 5 6 24 VDC 12 VDC 240 VAC 50/60 Hz 7 15 2 9 Other Nil: Non-locking push type 20 3 Option Valve size 5 to 7 25 4 1 1 1 2 32 5 1 4 1 2 40 50 6 7 Note) Air operated only Electrical entry/ With light/surge voltage suppressor E GS G Grommet with surge voltage suppressor Grommet Grommet

REC

24 21 22 41 14 32 16 12.5 50 8 10 56 7 26.5 51 181 247 REC L/Axial foot G H F G Width across flats B2 2-Rc(PT)P K A lNA F AL 2-NN Relieving port M5 X 0.8 Standard port H1 H2 I Width across flats B1 Relieving port D C B 4-LD LH MM 2-4 3.2 N N X X Y S+Stroke Y LX Z LS+Stroke LZ ZZ+Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore size Stroke range 20 M8 X 1.25 18 15.5

MHC2

MHCM2-7S D8.3 205.2 2-M2 x 0.4 thread (Mounting thread) 2-M2 x 0.4 depth 4 (Mounting thread) 2.5 2 1.5 When open 20 When closed 7 10 6 4.5 15 11 7.7 1.8 16.5 6 100.05 (23) M3 x 0.5 (Finger closing port) 2-M2 x 0.4 thread (Attachment mounting thread) 4 0 0.03 3 12-8-23

MHC2

MHCM2-7S D8.3 205.2 2-M2 x 0.4 thread (Mounting thread) 2-M2 x 0.4 depth 4 (Mounting thread) 2.5 2 1.5 When open 20 When closed 7 10 6 4.5 15 11 7.7 1.8 16.5 6 100.05 (23) M3 x 0.5 (Finger closing port) 2-M2 x 0.4 thread (Attachment mounting thread) 4 0 0.03 3 12-8-23

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

F02: G1/4 -C01: Rc1/8 27.7 21.7 8.45 8.45 Piping port TSJ1/4 Piping port URJ1/4 -B2: TSJ1/4 -A2: URJ1/4 736 Series ZSE80/ISE80 2-Color Display Digital Pressure Switch For General Fluids Dimensions ZSE/ISE802L N02L C01L A2L B2L 2 41 25.2 30 20 20 10 30 60.5 (N02L: 61.5) 2 x M3 x 0.5 thread depth 4 ZSE ISE Piping port 02L: R1/4 N02L: NPT1/4 3.5 ZSP PS 8.8 Atmospheric vent port 2.6 ISA PSE IS

XLF Series

C C C C D D D D Valve seal (maintenance part) 4 Body (material: A6063) C C C C E E E E E E E E (K flange ) F F F Fn n n n (KF flange) F F F Fd d d d Heater (option) Auto switch (option) G G G G H H H H B B B B A A A A A A A A Unit: mm Model A B C D E Fn Fd G H XLF-16 40 103 38 1 30 17 40 XLF-25 50 113 48 1 12 40 26 39 XLF-40 65 158 66 2 11 55 41 63 XLF-50 70 170 79 2 11 75 52 68 XLF-63 88