Size, Body, Valve Type: 10F (Size: 1; Body Mat'l: Aluminum; Port Size 1/4; Orifice Dia: 5, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 3V (24VAC; DIN Terminal w/Surge Voltage Suppressor w/o DIN Connector)
Size, Body, Valve Type: 10F (Size: 1; Body Mat'l: Aluminum; Port Size 1/4; Orifice Dia: 5, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2A (24VDC; DIN Terminal w/Surge Voltage Suppressor & Light), Other Options: Z (Oil-free, Rc Thread)
Size, Body, Valve Type: 10F (Size: 1; Body Mat'l: Aluminum; Port Size 1/4; Orifice Dia: 5, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 1S (12VDC; Conduit w/Surge Voltage Suppressor), Other Options: B (NPT Thread)
Size, Body, Valve Type: 10F (Size: 1; Body Mat'l: Aluminum; Port Size 1/4; Orifice Dia: 5, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: Z (Oil-free, Rc Thread), Bracket Interchangeable with Old Type: XB
Size, Body, Valve Type: 10F (Size: 1; Body Mat'l: Aluminum; Port Size 1/4; Orifice Dia: 5, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2C (110VAC; DIN Terminal w/Surge Voltage Suppressor & Light), Other Options: None, Bracket Interchangeable with Old Type: XB
Size, Body, Valve Type: 10F (Size: 1; Body Mat'l: Aluminum; Port Size 1/4; Orifice Dia: 5, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2A (24VDC; DIN Terminal w/Surge Voltage Suppressor & Light), Other Options: E (Oil-free, NPT Thread), Bracket Interchangeable with Old Type: XB
Series VG342 is a 3 port pilot poppet solenoid valve and can be used as a selector or divider valve (external pilot). Actuation is changeable between N.C., N.O., or external pilot types. VG342 is possible to use in vacuum or under low pressures. No lubrication is required. 3 port pilot operated poppet valve , Material restriction type , Low power consumption: 4.8W DC (standard type); 2W
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Series: 3 (VQZ3000), Configuration: 3 (3 Position Closed Center), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: Y (DIN Terminal), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: N7 (1/4" One-touch Fitting), Thread: T (NPTF), Foot Bracket: None, CE Compliant: Q (CE Marked)
Series: 3 (VQZ300), Composite Symbol: 3 (Rubber Seal N.C.), Function: R (External Pilot), Coil Voltage: 3 (110VAC 50/60HZ), Lead Wire: Y (DIN Terminal), Manual Override: Non-locking Push Style, IP65 Compliant: None, Port Size: 02T (NPTF1/4), Option: None, CE Compliant: Q (CE Marked)
Symbol: 15R3 (2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Standard w/Power Saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: 1U (1/4-28UNF, PVDF), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)
1 w r u y e t !5 !2 !4 q !0 !3 i Component Parts No.
0 06, 08, 10 Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] i q y !2 !1 !3 Number of needle rotations Number of needle rotations AS3201F, AS3211F AS4201F, AS4211F r Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Component Parts No.
None Float type auto-drain 00 11 q Replacement Parts AU100 has no auto-drain type. Element Bowl guard Material Model Port size Description No.
Example of a Basic Circuit Diagram Two Hand Control Valve Push button operated valve Cylinder Air operated valve Push button operated valve 1682 Two Hand Control Valve VR51 Series Construction q t !1 i !8 y e !0 P1(11) port u R(4) Exhaust port r !5 o !7 A(2) port P2(12) port w !2 !6 !4 !
Fluid Seal material NBR, FKM, EPDM Manifold body, Base (2) Aluminum Air Liquid Non-leak, Vacuum q 106 Pam3/s or less (1) 1 cm3/min or less 0.1 cm3/min or less Valve assembly NBR, Polyacetal Aluminum FKM/EPDM w Note 1) Differs depending on the operating conditions such as pressure, etc. Note 2) Value on option V (Non-leak, Vacuum).
VEX SRH VY1A00 1 , VY1B00 1 (Pilot valve: VY1D00-00) Working principle The supply [1(P) to 2(A)] valve of valve y and the exhaust [2(A) to 3(R)] valve close due to the balance between actuating forces F1 and F2.
IN OUT r M30 x 1.5 Panel cut dimension 30.5 q t Component Parts No.
The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
If the piping diameter is reduced, it may lead to insufficient flow of supply air, reduction of suction flow and reduction in the vacuum pressure. 1 The values indicating characteristics are representative values, and may vary depending on the atmospheric pressure (weather, altitude, etc.). 2 Supply pressure: 0.45 MPa Construction Model Selection Caution q t w r e y 1.