VFR5000-OMN0001

() A-(1) B+(3) B-(4) A B VFR510 A COM A B VFR520 A COM B 3 A COM B VFR5 40 5 8 VFR5000-OMN0001 VFR5000 Series/ (VFR500) (VFR510) VFR500 VFR510 () () 2.8Nm ) AC DC24V 3 (AB) (N.C.)

0.01

Dimensions SFD100 different diameters SFD200 different diameters One-touch fitting dimensions(A, B) One-touch fitting dimensions(A, B) Port size q Port size w Port size q Port size w 4 8 4.5 5.5 SMC 6 10 Basic dimension 114.5 Basic dimension 72 5.5 4.5 Fitting dimension A Fitting dimension B Fitting dimension A Fitting dimension B 8 12 5.5 5 Total length 81 (A + 72 + B) 76.5 (72 + A) 81.5

Soft Start-up Valve AV2000/3000/4000/5000

The pressure difference generated at this time opens check valve and the residual pressure on the A port side is quickly exhausted from R port. 2 1(P) OFF 2(A) 1 3(R) 3 Soft Start-up Valve AV2000/3000/4000/5000 Construction B ON OFF B-B 1(P) 2(A) B 3(R) Parts list No. 1 2 3 Description Material Body Cap Cover ADC ADC ADC Replacement parts Description No. Part no.

CYV

x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide Central axis

VF1000-OMP0001

A(CYL2) B(CYL1) A B EA EB R1(EXH2) R2(EXH1) R1 R2 (B)2 4(A) (B)2 4(A) (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) 3(R2) 1(P) 5(R1) JIS () Z (B)2 (A)4 1:P 2:B 3:R2 4:A 5:R1 1:P(SUP) 2:B(CYL.1) 3:R2(EXH.1) 4:A(CYL.2) 5:R1(EXH.2) 1:P 4:A 2:B 5:R1 3:R2 EZTZDZLZMZ DC24V ) 8 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 (VF1000/3000 (VF1000/3000 (VF1000/3000 (VF1000

VFR3000-OMJ0001

B-+COM-COM 1.25-31.25-3S1.25Y-3N1.25Y-3S G DC ++(-) DIN 2 1 SOLA 1 A B B + SOLB 2 3 COM B (COM) A DC AC A B + + + + A B 70 8 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 2 2 2 2 3 3 3 3 (A,B) ( ( ( (VFR3 VFR3 VFR3 VFR3 00 00 00 00) ) ) ) ( ( ( (VFR3 VFR3 VFR3 VFR3 10 10 10 10) ) ) ) ( ( ( (VFR3 VFR3 VFR3 VFR3 40) 40) 40) 40) VFR3 VFR3 VFR3 VFR3

Rodless Cylinder for Vacuum Series CYV ø15, ø32

x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide Central axis

•

I Wear ring Plastic I C 1 A040-07-305 W Cushion packing A NSR f1j Cushion packing B NBR MC-20 CM-050-16-128 CM-063-16-129 C 1 AQ50-07 -306 C 1 A063-07-307 MC-25 MC-20 I MC-25 @) Gasket for cushion valve NSR CK40-1697 @I Gasket for speed controller NBR iii) Detecting rod packing NSR CK40-1697 DYR5K 14(1.

Large Flow Air Filter AF800/900 Series

Dimensions Option Port size A D OUT IN C B Metal bowl Metal bowl with level gauge Without drain cock B B B Drain cock barb fitting Drain cock thread piping With drain guide E Maintenance space B B B 1/4 Barb fitting Applicable tubing T0604 1/4 Width across flats 17 Option/Dimensions N.O N.C B (With auto drain) Model A B C D N.O N.C E AF800 AF900 150 200 408 488 33 46 140 170 448 528 448 528

VSA4

C [dm3/(sbar)] 12 15 13 15 14 17 15 17 Note) Weight (kg) Valve model Body size Function Port size Rc A/B EA/EB Pilot port size VA C [dm3/(sbar)] 13 16 13 16 13 16 13 17 b 0.24 0.32 0.24 0.32 0.26 0.25 0.18 0.30 Cv 3.3 4.2 3.3 4.2 3.2 4.2 3.0 4.3 b 0.15 0.31 0.15 0.31 0.22 0.27 0.18 0.39 Cv 3.0 4.1 3.0 4.1 3.5 4.2 3.6 4.6 1 2 VSA4140-04 VSA4140-06 VSA4240-04 VSA4240-06 VSA4340-04 VSA4340-

Rotary One-touch Fittings Manifold Series KM

Series KM Rotary One-touch Fittings Manifold Construction KM11 KM12 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: NPT or Rc (PT) female thread KM14 KM13 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: One-touch fitting, R(PT) male thread KM16 KM15 Port A: One-touch fitting Port B: One-touch fitting stud Port A:

VFR2000-OMM0001

B VFR2 1.25-31.25-3S1.25Y-3N1.25Y-3S VFR2000 A-B+B+COM -COM 1)8 2)+COM -COM 3)D U D 1 -12No.VFR2000-OMM0001 01F D COM A B 1)8 2)+COM -COM 3)D U D 1 -13No.VFR2000-OMM0001 () X () (R) () (PE) -14No.VFR2000-OMM0001 NO 1(ISO VG 32) [3(EB),5(EA),PE] X(30.20.9MPa0.10.9MPa) 1. 2. 3. 4. 5. 6. 7

Low Differential Pressure Sensor

P-1 = A (A B) / 4 H-1 = (A B) / 2 A = Maximum pressure value B = Minimum pressure value For low differential pressure For low pressure For compound pressure PSE533 PSE543 PSE563 For positive pressure For vacuum Pressure range C Display calibration function This function eliminates slight differences in the output values and allows uniformity in the numbers displayed.

Adsorption Plate

Manufacturable Range Recommended Body Thickness B Equivalent size Body area (cm2) Thickness (mm) Square board Configuration Circular board Diameter D (mm) Circular board (mm) Square board (mm) Perpendicular A (mm) (Dimension classification) Horizontal B (mm) 100 x 100 (Maximum dimensions) 14 100 or less 113 D A under 20 to 50 200 or less 190 x 190 16 361 or less 214 under 50 to 100 300 or

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv VP517Y G3/8 8.8 0.14 2 8.2 0.15 1.8 VP717Y G1/2 13.8 0.11 2.9 12.9 0.18 2.9 2 VP500/700 Series Spacer Center of F.R.L. body D C B Model A B C D Y300-A 4.2 43.4 21.7 57.9 Y400-A 5.2 53 26.5 68.5 A (Spacer width) Seal Y400-A Spacer with Bracket D K Center of F.R.L. body J H F G E E C B Seal A (Spacer width) Y400T-A Model A B C D E F G H J K Y300T-A 4.2

Miniature Tubing & Miniature Fittings Series TU/M

M Applicable tubing b Applicable tube a B A Reducer: M-32R-2, M-04R-2 Applicable tubing O.D. x I.D.

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa

Miniature Tubing & Miniature Fittings

M Applicable tubing b Applicable tube a B A Reducer: M-32R-2, M-04R-2 Applicable tubing O.D. x I.D.

SMC Pneumatic Clean Series

JIS B 8370: General rules for pneumatic equipment. JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment of machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. 2) Labor Safety and Sanitation Law, etc. Caution: Operator error could result in injury or equipment damage.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

B B For D-F8 Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch (Lm) 11-6-10