10-my1b-z-e

Seal kit includes a grease pack (10 g). When !4 and !5 are shipped independently, a grease pack is included. (10 g/1000 mm stroke) Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) Note) For the replacement procedure of replacement parts/seals, refer to the Operation Manual. 94

10-my1c-e

Seal kit includes a grease pack (10 g). When !5 and !6 are shipped independently, a grease pack is included. (10 g per 1000 strokes) Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) Note) Two kinds of dust seal bands are available.

10-my1m-e

Seal kit includes a grease pack (10 g). When !6 and !7 are shipped independently, a grease pack is included. (10 g per 1000 strokes) Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) Note) Two kinds of dust seal bands are available.

10-my1w-e

Seal kit includes a grease pack (10 g). When !2 and !3 are shipped as single units, a grease pack (10 g per 1000 strokes) is included. Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) 102

10-my2c-e

Seal kit includes a grease pack (10 g). When !4 and !5 are shipped as single units, a grease pack (10 g per 1000 strokes) is included. Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) 103

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

AMP

10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 13 16 19 20 22 25 108 155 221 1/4, 3/8 3/8, 1/2 1/2, 3/4 3 Series AMP Model Selection Selection Caution Caution 1.

VHS20/30/40/50

I 10 I G H F E X H .

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Filter Regulator AW30, 40

-02 Round Square embedded type Round Square embedded type G46-10-02 G36-10-01 1.0MPa Note 3) GC3-10AS Note 2) GC3-10AS GC3-10AS 1 4 1 8 1 4 Note 1) Pressure gauge G46-2-02 G36-2-01 G46-2-02 Set pressure + 0.05MPa (at relief flow rate of 0.1l/min(ANR)) 5 to 60C (With no condensation) 5m 0.2MPa Note 3) GC3-2AS GC3-2AS GC3-2AS Note 4) AD48 N.O.

Electro-Pneumatic Valve NVEP/NVEF Series

UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

I 10 I G H F E X H .

PSxx-OME0003CN

IP40 050 -1070 () 3585% RH() AC1000 V50/60Hz1 5 M(DC500 V) 2%F.S.(25 ) 3 2.7 3 m / 2 0.15 mm 0.8 mm CERoHS M5 R06 R07 M50.8 6 1/4 inch ONBR SUS304 PBT (3 m) 41 g 38 g 7 g 3.8 g -12No.PS-OME0003CN-F [V] A B C 0-101kPa 0 -101 kPa 10.1 kPa -101101kPa -100 kPa 101 kPa 0101kPa 0 101 kPa -10.1 kPa -01MPa 0 1 MPa -0.1 MPa -13No.PS-OME0003CN-F PSE53-M5 PSE53R06 R07 (D) PSE53-

Mechanically Jointed Rodless Cylinder/Basic Type Series MY1B-Z

Seal kit includes a grease pack (10 g). When !4 and !5 are shipped independently, a grease pack is included. (10 g/1000 mm stroke) Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) Note) For the replacement procedure of replacement parts/seals, refer to the Operation Manual. 94

NVEPA|VEFseies

Specifications )haracterislica vEA130 VEA250 iupply Power 1 10/220V + 10% (50/60H2) DC24V +2V tower Consumption sOVA 29W )utput Current Range 0-0.75A 0-1A mpedance ol E/P rroportional Valve 26-36s2 (0.75AF.S.) 13-18.5() (1A F-S.)

AS-FPQ/AS-FPG

Note) Metric sizes 04 06 08 10 12 4 6 8 10 12 Elbow Control type 0 1 Meter-out Meter-in Note) For applicable tubing O.D. selection, refer to the Model on page 711.

AS-FPQ/AS-FPG

Note) Metric sizes 04 06 08 10 12 4 6 8 10 12 Elbow Control type 0 1 Meter-out Meter-in Note) For applicable tubing O.D. selection, refer to the Model on page 711.

CJ1

C85 C95 CP95 NCM Symbol S Z 5 16.5 10 25.5 5 29 10 38 Stroke Bore size (mm) 2.5 NCA DBore size: 4/CJ1B4-SU4 -X 204/2.5 polyurethane tubing (TU0425) or Data Soft nylon tubing (TS0425) are used. Symbol S Z 5 19.5 10 28.5 15 37.5 20 46.5 5 40 10 49 15 58 20 67 Bore size (mm) Stroke 4 6-2-5

MLGC

model Bore size (mm) 40 32 25 20 D-B7/B80 D-B73C/B80C D-C7/C80 D-C73C/C80C D-B5/B64 8 10 9 10 8 10 9 10 8 13 8 10 13 10 9 14 9 10 14 10 D-B59W D-G79/K79/K79C D-H7BAL D-H7/H7W/H7NF 4 4 4.5 5 7 8.5 9 10 D-H7C D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL 4 4 4.5 5 6 45 D-G59F D-G5NBL 5 35 5 40 5.5 40 Since this is a guideline including hysteresis, not meant to be guaranteed.

MLGC

model Bore size (mm) 40 32 25 20 D-B7/B80 D-B73C/B80C D-C7/C80 D-C73C/C80C D-B5/B64 8 10 9 10 8 10 9 10 8 13 8 10 13 10 9 14 9 10 14 10 D-B59W D-G79/K79/K79C D-H7BAL D-H7/H7W/H7NF 4 4 4.5 5 7 8.5 9 10 D-H7C D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL 4 4 4.5 5 6 45 D-G59F D-G5NBL 5 35 5 40 5.5 40 Since this is a guideline including hysteresis, not meant to be guaranteed.