HEC-OM-S008

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0=Pump stop 1=Normal operation (Run) 2=Auto tuning start 3=Learning control 4=External tune control 0-2 Operation mode 3-15 Unused The operation mode with Modbus communication is displayed as the figure on the right (Mode 0 = Operation stopped).

CEx-OMI0064

No. , 15 No.120 No.2131 No. 1 2 3 4 5 1 1 2 3 4 5 2 6 7 8 9 10 3 11 12 13 14 15 4 16 17 18 19 20 20 - ,No.131(OUT 15), No. (:ON:OFF) No. 1 2 3 4 5 No. No.

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

LEF-OM006xx

5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 -15- 1 14 2 15 3 16 4 17 5 18 6 19 NBR 7 20 8 21 9 A 22 10 23 11 24 12 25 13 -16- 3. 3.1. 1 I/O LEC-CN5-* / PLC 1 2 DC24V CN5 1 LE-C*-*-* LE-C*-*S-* CN4 CN3 CN2 120.3 120.3 mm mm 200 200 mm/s mm/s 2

Fieldbus system PROFINET compatible SI Unit

ON US2 is present. 41 No.EX-OMW0011-B 6.4.4.

CYV

Laser marking Hexagon wrench Features 2 Rodless Cylinder for Vacuum Series CYV How to Order CYV 15 200 Rodless cylinder for vacuum Standard stroke Bore size 15 32 15mm 32mm Standard stroke (mm) 100, 150, 200, 250 300, 350, 400, 450 500, 600, 700 Bore size (mm) 15, 32 Specifications 15 32 Bore size (mm) Atmosphere to 1.3 x 10Pa (ABS) Operating environment pressure Air and inert gases Operating

Process Pump

AIR EXH FLUID IN Automatically operated type Performance Curve SUP: Pilot air pressure Flow Rate Characteristics Air Consumption 0.5 200 Air consumption (L/min [ANR]) SUP = 0.5 MPa Discharge pressure (MPa) SUP = 0.5 MPa 0.4 SUP = 0.4 MPa 150 SUP = 0.4 MPa 0.3 SUP = 0.3 MPa SUP = 0.3 MPa SUP = 0.2 MPa 100 SUP = 0.2 MPa 0.2 50 0.1 0 0 10 15 20 25 5 0 5 0 10 15 20 25 Discharge flow rate (L/

VM

15 N F.O.F.

End Lock Cylinder Series CBG1

63 35 32 27 38 20 16.5 32 2 14 14 58 11 45 59 72 M10 x 1.5 depth 16 to 1400 80 40 37 32 50 25 19 40 3 20 20 71 13 53.5 68 89 M10 x 1.5 depth 22 to 1500 100 40 37 41 60 30 20 50 3 20 20 71 16 64.5 79 110 M12 x 1.75 depth 22 Bore size (mm) K KA MM MO NA P RF S TA TC TDH9 TE TF TG WL ZZ 20 +0.08 0 5 6 M8 x 1.25 15 24 1/8 11 81 11 M5 x 0.8 8 4 0.5 5.5 15 118 25 5.5 8 M10 x 1.25 15 29 1/8 11

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Laser marking Hexagon wrench Features 2 Rodless Cylinder for Vacuum Series CYV How to Order CYV 15 200 Rodless cylinder for vacuum Standard stroke Bore size 15 32 15mm 32mm Standard stroke (mm) 100, 150, 200, 250 300, 350, 400, 450 500, 600, 700 Bore size (mm) 15, 32 Specifications 15 32 Bore size (mm) Atmosphere to 1.3 x 10Pa (ABS) Operating environment pressure Air and inert gases Operating

48

[mm] Bore size Allowable interval 12 (10 x 2) 15 16 (12 x 2) 15 20 (16 x 2) 15 25 (20 x 2) 10 32 (25 x 2) 5 40 (32 x 2) 0 50 (40 x 2) 0 63 (45 x 2) 0 80 (56 x 2) 0 100 (71 x 2) 0 Allowable interval Allowable interval View View 11 Prior to Use Auto Switch Connections and Examples Sink Input Specifications Source Input Specifications 3-wire, NPN 3-wire, PNP Input Input Brown Brown Black Black

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Note 3) Through-hole in case of 5 to 15 mm stroke.

MXF

Dimensions: Stroke Adjusting Bolt (mm) Applicable size Model Stroke adjustable range (mm) A B C M M C MXF-A827 MXF-A827-X11 MXF-A1227 MXF-A1227-X11 MXF-A1627 MXF-A1627-X11 MXF-A1627-X12 MXF-A2027 MXF-A2027-X11 MXF-A2027-X12 5 15 5 15 5 15 25 5 15 25 17 27 23.5 33.5 26.5 36.5 46.5 30 40 50 MXF8 M4 x 0.7 6 2 MXF12 M5 x 0.8 7 2.5 MXF16 M6 x 1 8 3 A B MXF20 M8 x 1 12 4 8-6-9 10 Series MXF Dimensions

LEC-OM036xx

Specifications .11 3. 1 Specifications.11 3. 2 Details of parts.13 3.3 Outside dimension diagram.14 (1) Screw mount type (LECG1).14 (2) DIN rail mount type (LECG1D).14 3.4 How to install.15 (1) How to install.15 (2) Installation location .15 4. Initial Setting.16 4. 1. Switch (NODE Address, B RATE) .16 4. 2. Setting the switch to change the communication (CN2SW).17 4. 3.

LEC-OM034xx

Specifications .11 3. 1 Specifications.11 3. 2 Details of parts.13 3.3 Outside dimension diagram.14 (1) Screw mount type (LEC-GPR1).14 (2) DIN rail mount type (LEC-GPR1D) .14 3.4 How to install.15 (1) How to install.15 (2) Installation location .15 4. Initial Setting.16 4. 1. Switch (Address, B RATE).16 4. 2. Setting the switch to change the communication (CN2SW).17 4. 3.

LEC-OM032xx

Specifications .11 3. 1 Specifications.11 3. 2 Details of parts.13 3.3 Outside dimension diagram.14 (1) Screw mount type (LECGE1).14 (2) DIN rail mount type (LECGE1D).14 3.4 How to install.15 (1) How to install.15 (2) Installation location .15 4.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. ASS ASR ASF 15-9-37 3 Construction Elbow type, Meter-out type Universal type Meter-out type (2) Meter-in type Meter-in type Component Parts No.

VXD21/22/23

Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

lPSMt

3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig. TO OPERATION SIGNAL RANGE INSTALLATION STYLE (REF.

lPSMt

3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig. TO OPERATION SIGNAL RANGE INSTALLATION STYLE (REF.