Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32 M8 x 1.25 x 8L (Bolt holder) 1 40 45 45 3 3 330.2 330.2 330.2 42 20 8 8 6.5 counter bore 5.5 (Same on the opposite side) 3.4 through 2-M3 x 0.5 through 3 3 6.5 45 45 M4 x 0.7 x 14.5L (Hexagon bolt) and M4 x 0.7 (Hexagon nut) M3 x 0.5 x 10L (Hexagon socket head cap bolt) 2-M4 x 0.7 through Steel ball Steel ball (14+ST) (16) 4 2-M3 x 0.5 through 6 (mm) ST 10 20 30 40 50 14+ST 24 34 44 54 64
Width across Appropriate tightening torque [Nm] flats 32, 40 6 5.1 50, 63 8 11.0 2 4 80,100 14 15.2 to 21.1 Tie rod tightening order. Fig.10 Tightening of tie-rod nuts 25 - 4-4-2. Removal of seals 1) Rod seal and cushion seal Insert a precision screwdriver from the front of the cover to pull out the seal as shown in Fig. 11.
40 100 50 ZX 30 30 20 20 50 25 ZR 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.1 0.2 0.3 0.4 0.5 0.6 ZM Supply pressure (MPa) Supply pressure (MPa) ZMA Flow Characteristics Flow Characteristics Supply pressure: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 ZH 70 70 60 60 ZU 50 50 40 40 30 30 ZL 20 20 10 10 ZY 0 0 10 20 30 40 50 60 70 80 90 100
0 60 20 40 0 60 80 20 40 0 60 Moment (Nm) Moment (Nm) Moment (Nm) Vertical Operation Intermediate Stops The cushion effect (smooth start-up, soft stop) exists only before the stroke end in the stroke ranges indicated in the table below.
200 300 400 500 1000 1500 2000 3300 4000 4000 5700 7000 HAW2 5 HAW7 5 HAW22 17 HAW37 25 Maintenance 7000 8600 10 34.5 36 37 40 44 46 38 40 42.5 43 49 54 36 Caution HAW55 1.
A Insulation: Red (+) 2 x 4.2 (Mounting holes for manifold) 20 2 x 1/4" {A (4), B (2) port} 42 (14) 1.2 (52) (2 x 4.2 Mounting holes) 44 (For E type) (49.5) 0.3 mm2 (42.5) 40 40 14.7 125 (39.4) 123.3 L (Lead wire length) 1/4" {P (1) port} 2 x 1/8" {EA (5), EB (3) port} 39.4 0.9 18 2 1.2 (23.9) EB P EA 39.5 13 36 2 x 2.2 (Positioning for manifold gasket) (66) L plug connector with cover (
50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 46 55 66 59 71 82 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 18 18 18 12 15 15 44 50 56 138 150 171 4 5 5 1/4 1/4 1/4 to 1000 to 1000 to 1000 7 Series
13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 Revision history G: Revise Safety Instructions.
port) 3 (Breathing port) 5 x , 14 38 (Piping port) 5 x , 14 38 (Piping port) 3 position closed center/exhaust center/pressure center: VFA3 40-X1 3 4 5 02 03 2 x 4.3 2 x 18 (Mounting hole) (Pilot port) Breathing port 5 x , 38 14 (Piping port) 1766 5 Port Air Operated Valve Series VFA5000 How to Order Port size 02 03 1 4 3 8 Body ported VFA5 1 20 03 Base mounted VFA5 1 44 03 1(P) port location
35 22.5 32 22.5 43 61 49 98 65 14 23 55 55 55 103.5 10.5 19 58 58 58 103 17.5 40 25 36 25 46 63 50 101 68 14 23 61 61 61 111 The figures in parentheses are the normally open type. 22 23 Series VX21/22/23 For Water, Oil, Steam/Manifold Dimensions: Manifold/Base Material: Brass, Stainless Steel Normally closed (N.C.): VVX21/VVX22/VVX23 Normally open (N.O.)
Valve specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Flange (valve) size 16 25 40 50 63 80 Actuating type Double acting (Dual operation), Pressurize to open/close Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal
Safety Instructions 2~14 2. Application 15 3. Specifications 15~16 4. How to Order 17~21 5. Construction / Parts List 22~23 6. Assembly of Optional Parts 24 7. Working Principle 25 8. Trouble Shooting 26 9. Disassembly Drawing 27 10. Dimensions 28~33 -1- These safety instructions are intended to prevent hazardous situations and/or equipment damage.
32 59 17 6 8 VHK-B1A 44.5 14.5 27 22 16.5 26 9.7 7.2 1 4 22 46 73.8 30.5 43.3 76.3 31.5 44.8 21.5 4 20.8 21.8 14 3.2 49 68 19 63 70 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 17.5 16.1 18 41 62.4 24.3 38.1 66.2 26.2 40 16.5 3.5 16.8 18.7 11 1.2 41 56 17 40 60 6 8 VHK-B1A 44.5 11.5 27 22 16.5 26 9.7 7.2 3 8 22 46 74.8 30.5 44.3 77.3 31.5 45.8 21.5 4 20.8 21.8 14 3.2 51 68 19 64 71 22 10 12 VHK-B2A
Description Material Note 13 14 15 16 17 18 19 No.
Valve specifications Model XLF-16-2 XLF-25-2 XLF-40-2 XLF-50-2 XLF-63-2 XLF-80-2 Flange (valve) size 16 25 40 50 63 80 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material
Body pin hole Size Tightening torque 10 0.2 to 0.3Nm 15 0.3 to 0.5Nm 20 4.2 to 5.2Nm 30 4.2 to 5.2Nm 40 7.2 to 8.7Nm Size 10 , 15 Cover Assembly End cover Assembly Body pin hole Hexagon socket head bolt Fig.22 Size 20 , 30 , 40 (6) Perform operation test after assembling and check external leakage.
(NBR) (FKM, EPDM) 14 Aluminum Base The materials in parentheses are the seal materials.
Min. to Max. 1,000 L/min 10 to 1000 10 to 1050 Flow rate 2,000 L/min 20 to 2000 20 to 2100 Temperature 50 oC 0 to 50.0 -10.0 to 60.0 Pressure 1 MPa 0 to 1.000 -0.050 to 1.050 Accumulated flow 9,999,999,990 L 0 to 9,999,999,990 0 to 9,999,999,990 PD value Measured object Range Rated range Display/settable range A to B C to D 1,000 L/min 40 to 4000 40 to 4200 Flow rate 2,000 L/min 40 to 4000
Valve specifications Model XLC-16-2 XLC-25-2 XLC-40-2 XLC-50-2 XLC-63-2 XLC-80-2 Flange (valve) size 16 25 40 50 63 80 Actuating type Double acting (Dual operation), Pressurize to open/close Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal