Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

16 20 25 12 16 20 25 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 M5 x 0.8 M5 x 0.8 Double acting Single rod 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Suction flow rate L/min (ANR) Bore size (mm) 12/16/20/25 Size 5 12/16/20/25 Item Proof pressure 1.5

Rotary Table Series MSU

x 0.8 (10-32 nominal) M3 x 0.5 Port size Top ports M3 x 0.5 M5 x 0.8 (10-32 nominal) Deflection accuracy 0.03mm or less (0.0012") 2.

Digital Gap Checker ( compatible)

The tightening torque of the mounting screw must be 0.45 Nm 10%. When the product is mounted using the bracket, fix with M5 screws (2 pcs.) or equivalent. The Bracket thickness is approx. 1.6 mm.

Compact Rotary Actuator Rack & Pinion Style Series CRQ2 How to Order CRQ2B S 20 90 Without auto switch CDRQ2B S 20 90 M9BW With auto switch Built-in magnet Number of Shaft type auto switches S Single shaft 2 pcs. Nil W Double shaft S 1 pc. ∗ Refer to p

Combination of simple specials and Made to Order Size Refer to pages 256 to 270 for details. 10 15 20 30 40 Suffix symbol 10 15 20 30 40 Symbol Size Cushion Without cushion Rubber bumper Air cushion Nil C Port type Made to order Refer to page 247 for details.

FILTER REGULATOR

-01 G46-10-01 G36-4-01 G46-4-01 1 0.2MPa setting G36-10-N01 G46-10-N01 G36-4-N01 G46-4-N01 1 0.2MPa setting Round type pressure gauge NPT G36-P10-N01-X30 G46-P10-N01-X30 Z Imperial unitMPa, psi 0.2MPa setting 1Z G36-P4-N01-X30 G46-P4-N01-X30 Imperial unitMPa, psi G G36-10-01 G46-10-01 G36-4-01 G46-4-01 1 0.2MPa setting Rc G36-10-01-L G46-10-01-L G36-4-01-L G46-4-01-L 1 0.2MPa

Electro-Pneumatic Proportional Valve

: 0.12 10% or less 3% or less 1MPa 12, 24VDC 0 to 2W 0 to 4W Class B Series PVQ How to Order P V Q 13 5 L 03 M5 Valve type Body materials Symbol A Nil Body Brass C37 Note for PVQ13 for PVQ31, 33 13 31 33 N.C.

Compact Guide Cylinder ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 MGP Series

Bore size 12 12 mm 40 40 mm 16 16 mm 50 50 mm 20 20 mm 63 63 mm 25 25 mm 80 80 mm 32 32 mm 100 100 mm Auto switch Nil Without auto switch (Built-in magnet) *: For applicable auto switches, refer to the table below. Port thread type Nil M5 x 0.8 Rc TN NPT TF G Cylinder stroke [mm] Refer to Standard Strokes on page 433. *: For bore sizes 12 and 16, only M5 x 0.8 is available.

Digital Pressure Switch

For detecting fine pressures, warm up the product for 10 to 15 minutes. Check if the product satisfies the specified accuracy after 10 minutes warm up time.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Specifications Model PSE530-M5 PSE531-M5 101 to 101kPa PSE532-M5 PSE533-M5 Rated pressure range 0 to 1MPa 0 to 101kPa 0 to 101kPa Proof pressure 1.5MPa 500kPa Air, Non-corrosive gas Fluid 12 to 24VDC (Ripple 10% or less) Power supply voltage Current consumption 15mA or less Output specification Analog output (1 to 5V, Output impedance: Approx. 1k) Accuracy 2% F.S. or less (within rated pressure

Air Gripper Unit for Collaborative Robots

less at 10 mA (2 V or less at 40 mA) Leakage current 100 A or less at 24 VDC Indicator light Red LED illuminates when turned ON.

Plug-in Unit

stations M5 (M5 threads) S kit 1 to 8 stations: EX500 1 to 12 stations: EX250 1 to 8 stations: EX126 C10 (For 10) Options Direct outlet with built-in silencer Branch type C12 (for 12) F Kit: D-sub connector 1051 (Single) C4 (For 4) VQC200-5 P Kit: Flat cable VQC2000 VV5QC21C6 (For 6) Side 1144 (Double, 3P) T Kit: Terminal block box VQC201-5 C8 (For 8) S Kit: Serial transmission L Kit

V

M5 (10-32NOM) -0.00015 -0.0014 (0.2) M3 -0.00045 3/16 0.47 NCDRB1BW15 0.71 0.73 0.39 0.02 0.59 50 1.14 0.16 1.34 0.94 0.98 0 5-40 M5 (10-32NOM) -0.01 -0.0017 (0.2) M3 -0.00017 15/64 9/16 NCDRB1BW20 0.79 0.98 0.39 0.02 0.79 50 1.42 0.18 1.65 1.32 1.00 0 8-32UNC 10-32UNF -0.00015 -0.0016 (0.28) -0.00045 5/16 5/8 NCDRB1BW30 0.87 0.98 0.47 0.04 1.18 50 1.69 0.20 1.97 1.79 1.00 0 10-24UNC 10-

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

0X: M5 x 0.8 0XY: M6 x 1.0 ISG 0X: M5 x 0.8 0XY: M6 x 1.0 ZSM Connector type ZSE3-0X-C 7 50.6 Vacuum supply port Vacuum pad connection port 20.5 RESET button DOWN button SET button Pneumatic circuit UP button Lead wire length 600 50 (3000) 10 58 PV 18 10.2 8 6.5 10.25 10 22.6 5.75 ZSE3-0X-C-D Vacuum pad connection port 2 x 3.3 Mounting hole Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1.0 0X

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Standard strokes (mm) Bore sizes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 50, 63 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Example) For CQ2XB40-57D, an 18mm spacer is installed inside a standard stroke CQ2XB40-75D cylinder. Specific Product Precautions Be sure to read before handling. Refer to pages 15 to 24 for safety instructions and precautions.

Ｍ agnet Gripper Unit for Collaborative Robots

Auto switch Auto Switch Specifications D-M9(With indicator light) Auto switch model D-M9N D-M9P Electrical entry direction In-line Wiring 3-wire Output NPN type PNP type Applicable load IC circuit,Relay,PLC Power supply voltage DC51224V(4.5 to 28V) Current consumption 10 mA or less Load voltage DC28V or less Load current 40 mA or less Internal voltage drop 0.8 V or less at 10 mA (2 V or less

Low-Speed Compact Rotary Actuator Rack & Pinion Type CRQ2X Series Size: 10, 15, 20, 30, 40

Size Port type 10, 15 M5 Rc 1/8 G 1/8 NPT 1/8 NPTF 1/8 Nil Made to Order specifications TF TN TT 20, 30, 40 Refer to page 309 for details. Rotation angle 90 180 80 to 100 170 to 190 Applicable Auto Switches/Refer to pages 797 to 850 for detailed auto switch specification.

VZ1000

Cylinder Speed Chart Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VK VZ1120--M5 (Piping: 4 x 1 m) VZ VF AS1301F-M5-04/AN120M5 AS1301F-M5-04/AN120-M5 Speed controller/Silencer VFR

PEEK

(Symbol 1) IN (Symbol 2) OUT 6 10 2 Wetted part material 20R4 N.O.

ZSE3/ISE3

port Vacuum pad connection port 20.5 RESET button DOWN button Pneumatic circuit SET button UP button Lead wire length 600 50 (3000) 10 58 PV 18 10.2 8 6.5 10.25 10 22.6 5.75 Vacuum pad connection port Vacuum supply port 2-3.3 Mounting hole 0X: M5 x 0.8 0XY: M6 x 1.0 0X: M5 x 0.8 0XY: M6 x 1.0 16-4-8

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

: 10 8-6: 5; 8-8: 5, 8-10: 5 Max. operating frequency (cycle/sec) 8-6: 10; 8-8: 10, 8-10: 20 8-6: 3; 8-8: 3, 8-10: 2 Lubrication Not required Manual override Non-locking push type Enclosure Dusttight Coil rated voltage 100 VAC, 110 VAC, 200 VAC, 220 VAC, 24 VDC Allowable voltage range (%) 15 to +10% of rated voltage Coil insulation Class B or equivalent 50 Hz 5.6 Apparent Inrush 60 Hz 5.0