ZP

(mm) 02 04 2 4 Nil -X19 With lock ring Without lock ring (10 or larger) 1 2 10 to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 ZM N S NBR Silicon rubber 13 13 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 20 or large are manufactured upon receipt of order

Compact Cylinder with Lock Series CLQ

Joint YB-03 32, 40 12 7 25 9 34 11.5 depth 7.5 K ( across flats) YB-05 50, 63 12 9 32 11 42 14.5 depth 8.5 H (With locking) YB-08 80 16 11 38 13 52 18 depth 12 d2 d1 YB-10 100 19 14 50 17 62 21 depth 14 L UT Mass (g) Bore size (mm) C UA T1 RS T2 V W Part no. Material: Chromium molybdenum steel D(mm) YB-03 32, 40 80 9 6.5 10 18 50 Part no.

TABLE OF CONTENTS

50 50 40 150 125 75 45 50 30 25 1/32 3/64 1/16 1/16 3/32 1/16 3/32 1/32 3/64 1/16 3/32 3/32 1/8 1/8 .020 .048 .075 .075 .156 .075 .156 .022 .055 .075 .156 .156 .230 .230 ** MODEL E55 3 Way Directional Control E55GG8XCCM E55HH8XCCM E55JJ8XCCM E55KJ8XCCM E55KK8XCCM E55NJ8XCCM E55NK8XCCM 300 200 100 75 75 65 45 200 100 50 25 40 20 20 1/32* 3/64* 1/16* 3/32* 3/32* 1/8* 1/8* 1/32 3/64 1/16 1/16

SFOD-OMT0010

Note 1) 3 AREA2 32 Load AREA3 13 N.C. Note 1) 23 Load AREA4 33 N.C. Note 1) 4 Load INP1 14 Load N.C. Note 1) 24 INP2 34 Load N.C. Note 1) 5 INP3 15 Load N.C. Note 1) 25 INP4 35 Load ALARM1 16 N.C. Note 1) 6 Load ALARM2 36 N.C. Note 1) 26 Load ALARM3 17 Load N.C. Note 1) 7 ALARM4 37 Load N.C. Note 1) 27 -COM3 18 N.C. Note 1) 8 -COM3 19 -COM3 38 N.C. Note 1) 28 -COM4 20 N.C.

Compact Manifold Regulator

IN/OUT Piping Position IRV Metric size Inch size Position IN side OUT side VEX IN side Straight 4 6 OUT side IN side Straight OUT side Mounting position Mounting position Bottom Top Bottom Top Symbol Elbow Straight Elbow 4 6 Elbow Straight Elbow Fitting type Symbol Fitting type Symbol 1 2 3 4 4 6 4 6 5/32 1/4 5/32 1/4 5/32 1/4 5/32 1/4 SRH 06 07 08 18 19 20 25 26 27 32 33 34 56 57 58 68 69

VQ7-6/7-8

: VQ7-6-FHG-D-SC Exhaust center : VQ7-6-FJG-D-SC Pressure center : VQ7-6-FIG-D-SC 145 86.5 155 68.5 76.5 50 50 68.5 50 50 Manual override 13 (port A) 13 (port B) Manual override 13 (port A) 13 (port B) B A B A 62 38 50 38 50 62 A B A B Prewired connector (M12) (L approx. 500) R1 R2 P Prewired connector (M12) (L approx. 500) R1 R2 P 42.5 42.5 42.5 42.5 2-6.5 Mounting hole Indicator light 2

Compact Cylinder with Air Cushion

Double clevis bracket material: Carbon steel 6 Series RQ Dimensions/32, 40, 50 Refer to pages 13 and 14 for proper auto switch mounting positions and height.

HRX-OM-S004

Table 5.20-32 Operation setting when "Power stoppage" alarm is generated Set value Explanation Initial value (Default setting) This alarm is not detected.

LEH_C

5m 5m 10%(15m 20%) 4) 5) () 6) () 7) () 452000Hz 1 () 8) () 9) 2 - 3.2 LEHF 10 K 16 6N 1 2 1 R 2 10 10 DIN 2 0 2 0 D D 32 32 1DIN I/O (m) 40 40 1.5 1 1.5 1 K K 3 3 3 3 5 5 5 5 (mm) LECP6 LECP6 ( NPN NPN 32 16 16 32 10 10 PNP PNP 48 20 24 20 24 48 LECP1 1 LECP1 ( 1 NPN NPN 64 32 32 32 32 64 PNP PNP 1P 1P 80 40 40 40 40 80 AN LECPA ( AN LECPA NPN NPN AP AP PNP PNP (m)

SFOD-OMT0009CN

DRIVE ON No.Bit No. 11 OUT2 DRIVE ON 31 OUT3 12 OUT4 32 OUT5 (1) RESET ON OFF (2) 13 OUT6 33 OUT7 14 OUT8 ON (BUSY1BUSY4OR) Bit No. BUSY 34 (OUT9) 3) ON (AREA1AREA4AND) Bit No.

Environment

20 44 45.5 101 to 400 263 299.9 258.4 299.5 161.5 32 20 to 100 262.7 88.2 17.1 291.3 116.8 17.1 251.1 76.6 17.1 290.6 116.1 17.1 156 13 25 51 56.5 101 to 500 292.7 321.3 281.1 320.6 186 Size Stroke range [mm] H J K L M O1 R PA PB V S T U PC Y 25 15 to 100 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 15.4 8.2 40 45 46.5 1.5 15.9 71.5 101 to 400 32 20 to 100 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 15.4

HRX-OM-X037

Setting range and default settings are shown in Table 5.4-13 Pump operation mode setting. (1) (2) (3) (4) (5) Pump operation mode setting Table 5.4-13 Pump operation mode setting No.

17

+ L2 x 0.0016) [mm] 6 Series MGP High Precision Ball Bushing/MGPA Plate Displacement Amount (Reference Values) Load from lateral direction Displacement MGPA12 0.4 MGPA32/40 0.8 Plate displacement amount (mm) Plate displacement amount (mm) MGPA12-250 MGPA -400 32 40 0.35 0.7 0.3 0.6 MGPA -300 32 40 MGPA12-150 MGPA12-100 MGPA12-75 0.25 0.5 MGPA -200 32 40 MGPA -150 32 40 MGPA -100 32 40 0.2

ML2B

-X 20Data 10-13-6 10-13-7 5 Stroke Reading Rodless Cylinder with Brake Series ML2B 25, 32, 40 How to Order ML2B 25 500 L Y7BW Number of auto switch Applicable counter/Controller Basic type Series CEU1 Series CEU5 Series CEU2 Nil S n 2 pcs. 1 pc. n pcs.

ML2B

-X 20Data 10-13-6 10-13-7 5 Stroke Reading Rodless Cylinder with Brake Series ML2B 25, 32, 40 How to Order ML2B 25 500 L Y7BW Number of auto switch Applicable counter/Controller Basic type Series CEU1 Series CEU5 Series CEU2 Nil S n 2 pcs. 1 pc. n pcs.

44

17 13 17 22 26 31 35 38 58 61 71 70 74 83 1/8" (3.18) 0.086" (2.18) 2 10 8 13.5 5 1.5 LQ L1 M L1 M 0.098" (2.5) 5/32" (4) 3 10 8 13.5 5 1.8 d MQR 1/4" (6.35) 5/32" (3.95) 10 10 12 15.2 6 3.3 A L2 T H2 16 H2 0.236" (6) 5/16" (8) 12 14 17.4 6.6 5.3 25 H1 IDK Connection thread 18 3/8" (9.53) 1/4" (6.35) 15 17 20.4 7.6 5.6 28 2 x Applicable tubing 36 1/2" (12.7) 3/8" (9.53) 17 19 23.3 8.5 8.5

MXS Series Air Slide Table

32 32 Shock absorber at extension end A Stroke 75 to 125 A Max. 25 Shock absorber at retraction end Other dimensions not indicated are the same as basic model.

Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

Electric Rotary Table

-bit), Windows7 (32-bit and 64-bit).

VFR

Refer to page 3-13-4.)