3 Port Solenoid Valve

wire AWG#26) 3.5 27 6 26 23.5 20.5 3 9.5 28.5 3.5 4 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11 7 6 5 12 12.3 12 25 M5 0.8 3 (EXH) port M5 0.8 2 (OUT) port M5 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (lead wire AWG#26) 3.5 27 27.5 25 22

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

x 0.8 (5/32") 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 36 21 M5 x 0.8 6 35 35 82 62 20 93 48 14.5 6 22 50 7 39 36 21 M5 x 0.8 6 8 76 25 17.5 45 45 105.5 114 65 32 64 7 52 38.5 25 M5 x 0.8 6 499 Series LVD With flow rate adjustment (Max.

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

X 0.8 thread depth 10 P.C.D43 (Mounting thread) 80 120 15.5 120 C A 54 M5 X 0.8 Finger opening port M5 X 0.8 Finger closing port 14 M5 X 0.8 Finger opening port M5 X 0.8 Finger closing port 25 25 6-M5 X 0.8 thread depth 10 (A, B, C common view) 50 3-5 +0.02 0 depth 10 16h9 0 0.043 (A, B, C common view) 2 10 38.5 22 (76) 70 11 25 2 12 0 -0.05 5 0 0.03 5 0 0.03 4 Open: 37 Closed:19 2-M5 X

RQ

K ( across flats) YB-03 32, 40 11.5 depth 7.5 34 9 25 7 12 H (With locking) YB-05 50, 63 14.5 depth 8.5 42 11 32 9 12 YB-08 80 18 depth 12 52 13 38 11 16 d1 d2 YB-10 100 21 depth 14 62 17 50 14 19 L UT Weight (g) Bore size (mm) RS W T1 T2 V Part no. C UA Material: Chrome molybdenum steel (Nickel plated) YB-03 32, 40 9 50 80 18 6.5 10 Part no.

T

Color Color Page Page M Metric size (mm) Inch size (inch) Metric size (mm) Inch size (inch) 1 8 5 32 4 ( ") 5 16 8 ( ") " 3 16 " 3 8 " 1 2 " 1 4 1 8 5 32 4 ( ") 5 16 8 ( ") " 3 16 " 3 8 " 1 2 " 1 4 " (3.2) " (3.2) 6 10 12 16 6 10 12 16 General tubing 1.5 MPa max. at 20C Use in spatter generating atmosphere flame resistant material H Black Black 15-6-10 Nylon Tubing Series T White

Compact Cylinder with Air Cushion

O M J E D B K ( across flats) 11.5 depth 7.5 34 9 25 7 12 YB-03 32, 40 H (With locking) 14.5 depth 8.5 42 11 32 9 12 YB-05 50, 63 18 depth 12 52 13 38 11 16 YB-08 80 d1 d2 21 depth 14 62 17 50 14 19 YB-10 100 L UT Weight (g) Bore size (mm) Part no. RS W T1 T2 V C UA Material: Chrome molybdenum steel (nickel plated) 9 50 80 18 6.5 10 YB-03 32, 40 Part no.

REC

13 10 41 150 to 700 20 REA M10 X 1.25 25 6 37.5 5.5 22 19.5 17 32 10 13 10 45 150 to 700 26 M10 X 1.25 32 6 46.5 5.5 22 19.5 17 32 12 13 11 45 150 to 1000 26 REC M14 X 1.5 40 8 56.2 7 24 21 22 41 14 16 12.5 50 200 to 1000 32 20, 25 NA S TD TT TX TY TZ Z ZZ NN P N Bore size Stroke range RHC 1 8 1 8 1 8 1 4 30 20 M20 X 1.5 146 8 10 32 32 52 36 200 150 to 700 20 34.5 M26 X 1.5 25 146 9 10 40

Compact Cylinder with Air Cushion Series RQ

L UT C UA 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 12 9 32 11 42 14.5, depth 8.5 YB-05 50 mm Part no. Applicable bore size (mm) UA C d1 d2 H K L UT Weight (g) Weight (g) Bore size (mm) T1 T2 V W RS Part no.

Low Friction Cylinders Series MQ

B C D H NTJ-010A NTJ-015A NT-02 NT-03 SNKJ-016B SNLJ-016B SN-020B SN-032B 19.6 M12 x 1 4 8.1 M4 x 0.7 3.2 6, 10 6, 10 17 7 21.9 M14 x 1 5 9.2 M5 x 0.8 4 16 16 19 8 30 M20 x 1.5 8 15 M8 x 1.25 5 20 20 26 13 37 M26 x 1.5 8 19.6 M10 x 1.25 6 25 25 32 17 T-bracket 4 x TC TH 7 +0.2 0 TU -0.1 -0.3 TN TK TX TV 12 TD H10 TT TY TW Part no.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

U side 1 2 3 4 5 6 7 8 n 2-C10 R(EXH) port DIN rail clamping screw EXH EXH SMC SMC SMC SMC SMC SMC SMC 2-C10 P(SUP) port R R X B B B B B B B B X P 49 P 31.6 9.5 24.5 16 A A A A A A A A (12) (7.5) 23 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads 41 P = 16 Broken lines and dimensions inside ( ) indicate type [-D] (with

End Lock Cylinder Series CBG1

I J to 350 20 18 15.5 13 14 8 12.5 12 2 12 12 35 5 25.3 37 26 M4 x 0.7 depth 7 to 400 25 22 19.5 17 16.5 10 12.5 14 2 12 12 40 6 28.3 40 31 M5 x 0.8 depth 7.5 to 450 32 22 19.5 17 20 12 12 18 2 12 12 40 6 31.3 43 38 M5 x 0.8 depth 8 to 800 40 30 27 19 26 16 15 25 2 13 13 50 8 38.3 52.5 47 M6 x 1 depth 12 to 1200 50 35 32 27 32 20 16.5 30 2 14 14 58 11 44.5 58.5 58 M8 x 1.25 depth 16 to 1200

ASD

Millimeter Inch With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Thread _ Meter thread (M5) Unified thread (10-32 UNF) R(PT) N NPT Port size M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AS ASN AQ ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow

High-Precision Digital Pressure Switch

Compact: Max. 17.5 mm shorter Lightweight: Max. 21 g lighter (When an M5 female thread is used.) (When an M5 female thread is used.)

Prevents Micro-Bubbles

Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug Tubing size Plug Body class Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

5-0.03 0 5-0.03 0 24.5 12-0.05 0 Open: 37, Closed: 19 2 x M5 x 0.8 thread depth 10 (Thread for mounting attachment) 25 25 10 10 7 7 937

Electric Actuator Triple Axis P&P Unit

6 (26) 14 2-M5 x 0.8 Effective screw length 10 130 80 4-M6 x 1depth14 4-M8 x 1.25depth18 31 4H10depth5 92 5 4H10depth5 D (Stroke+145) 25 21 Stroke+191 D section detail (S=2/1) L Stroke+214 26 10 10 (92) 14 2-M5 x 0.8 Effective screw length 10 61 60 57 31 12 6 Reference plane 63.5 62.5 3 3 130 4-M5 x 0.8depth10 F-M5 x 0.8depth10 3-4H10depth5 4-6.5 20 20 12.5 C 31 63.5 13.5 E-100 4H10depth5

I

D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away

Rotary Cylinder Series MRQ Size: 32, 40 1

Manufacturers of Friction Fittings/Model Size 32 40 Size 32 40 ISEL Co., Ltd. (Mechanical lock) Adjusting angle per 1 rotation of angle adjusting screw 5.7 4.8 Miki Pully Co.,Ltd. (ETP bushing) Nabeya Kogyo Co., Ltd. (Clamp lock) MA12 x 26 ETP-K-12 CLH-12 x 18 MA14 x 28 ETP-K-14 CLH-14 x 23 Please consult with manufacturers concerning further information on specifications.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

2 x M5 x 0.8 (Vacuum port) 6.5 12 12 11 10 10 1 24 14 S O 20 46 24 30 K 15 (70) 10 24 24 12.5 4 12.5 4 10 30 When open F 17 17 54 4 x M6 x 1 through (Thread for mounting attachment) When open G (mm) J 32 68 88 H 176 276 316 G 138 238 278 F 98 158 178 E 38 80 100 D 87 129 149 B C 58 100 120 A MHL2-20D MHL2-20D1 MHL2-20D2 112211221122136 211 251 54 96 116 MHL2-25D 1122D A B C 12.5 +0.030 4H9

VCL

20 19 M5 8 24 76 46 66.5 101 66.5 68 99 VCB31 86 30 50 1/2 15 13.5 36.5 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 17 41 11 M5 36 22.5 23 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 M5 36 25 23 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 17.5 17 41 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 332 Direct Operated 2 Port Solenoid Valve For Steam Series