PROFINET Compatible Fieldbus System (M3 thread) (It is recommended to ground with resistance of 100 ohms or less) Accessories Hexagon socket head cap screw (M3 x 30): 2 pcs. Connects the SI unit and the valve manifold. Seal cap: 1 pc.
(M3 screw) 5 Output connector Output signal interface for valve manifold. 6 LED and switch LED display to indicate the status of the SI unit 2 7 Mounting hole Mounting hole for connection to the valve manifold. Accessories Hexagon socket head cap screw 2 pcs. M3 x 30 screw for connection to the valve manifold.
(M3 thread) (It is recommended to ground with resistance of 100 ohms or less) Accessories Hexagon socket head cap screw (M3 x 30): 2 pcs. Connects the SI unit and the valve manifold. Seal cap: 1 pc.
Part number Description Note ZS-40-A Lead wire with M8 connector Length: 3 m ZS-42-A Bracket With mounting screws for PFMC7501/7102 (M3 x 5, 2 pcs.)
Option Note ZS-40-A Lead wire and M8 connector Length: 3 m ZS-42-A Bracket Mounting screw for PFMC7501/7102 (M3 x 5, 2 pcs.) ZS-42-B Bracket Mounting screw for PFMC7202 (M3 x 5, 2 pcs.) 4 Series PFMC For Flow Switch Precautions, refer to Handling Precautions for SMC Products on SMC website. For Specific Product Precautions, refer to the Operation Manual on SMC website.
PF3W Panel mount adapter Panel mount adapter Lead wire With power supply/output connection lead wire (2 m) T Mounting screw (M3 x 8 L) (accessory) Waterproof seal (accessory) Panel Power supply/output connection lead wire ZS-40-W Nil Front protective cover + Panel mount adapter Panel mount adapter Front protective cover N Without power supply/output connection lead wire Mounting screw (M3
BUS IN BUS OUT DRAIN 1 1 1 5 4 3 2 5 4 3 2 V+ 2 2 2 0 0 0 Bit No. 6 4 6 4 3 VSolenoid on side A Output No. 0 2 4 6 8 16 28 30 CAN_H 4 Side D 5 CAN_L (SI unit side) To obtain more detailed information about operating this product, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly. 4 5 Solenoid on side B 1 3 5 7 9 17 29 31 Output No.
M3 hexagon screw Tightening torque 0.6 Nm Troubleshooting If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system. Check the product regularly for proper operation.
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7 1 2 3 4 AMC520 102 173.5 193.5 3.2 Depth 8 20 20 30 70 176.5 , 40 70 On the type for the AMC220, an R 1/4 fitting can be attached by removing the drain cock.
Tightening the threaded portion of an M3 fitting For KJS02-M3 (one-touch fitting), tighten it with a tightening tool by approx. 1/6 rotation after screwing it in by hand. Screwing the fitting in too far will cause air leakage due to thread breakage and gasket deformation. Screwing the fitting not far enough will also cause air leakage due to the loose screw. 1.
Max. air flow rate (m3/min (ANR)) JIS Symbol P . 14-20-55 Inlet pressure (MPa) Caution Be sure to read before handling.
Install the product (with bracket) using the M3 screws (4 pcs.). Bracket thickness is approximately 1.2 mm. Turn the power off and turn it on again. System error An internal data error has occurred. Press the UP button continuously to keep increasing the set value.
ERR 00: CPU Hung up ERR 01: CPU Check Failure ERR 03: Back-up Data Error ERR 04: EEPROM Writing Error ERR 05: EEPROM Input Over Times Error ERR 11: DC Power Voltage Failure ERR 12: Internal Sensor Value is High ERR 13: Internal Sensor Value is Low ERR 14: Thermostat Alarm ERR 15: Output Failure Alarm (Abnormal output) ERR 17: Cutoff/Short of Internal Sensor ERR 18: Cutoff/Short of External
Bore size Hexagon socket head Appropriate tightening (mm) cap screw (mm) torque (Nm) 6, 10 M3 1.0810% 16 M4 2.4510% Do not use compressed air containing a lot of condensate, which 20, 25 M5 5.1010% can cause the operating failure of the product and other pneumatic 32 M6 8.0410% equipment. Ensure that fluid and ambient temperature are within the specified range.
Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, Speed Controller, One Touch, FLOW CONTROL, 10 lb
Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, Speed Controller with Indicator, FLOW CONTROL, 14 lb
Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, Speed Controller with Indicator, FLOW CONTROL, 14 lb
Available in thread sizes from M3 to 1/2 in both inch (NPT) and metric R(PT) and with tube sizes from 3.2mm to 12mm OD (metric) and 1/8 to 1/2 OD (inch) and with optional elbow and universal style (increased flexibility) and meter-in and meter-out, these speed controls are designed to meet most applications.
Silencer Compact Resin Type/Male Thread Series AN05 to 40 RoHS How to Order 02 AN 20 Body size Thread connection port size Symbol Port size Symbol Applicable model AN05 AN10 AN15/20 AN30 AN40 Thread type M5 01 02 03 04 05 10 15 20 30 40 M5 x 0.8 M thread 1/8 Nil R 1/4 N NPT 3/8 1/2 Specifications Fluid Compressed air Max. operating pressure Note 1) 145psi (1.0 MPa) 30 dB(A) Note 2) Noise