IDX-OM-W023

T 100 2 () 100 IDU Series 4-1 4 1 IDX-OM-W023 4 4-2-3 0 OFF 50 1015 ( 1 INOUT IDU Series 4-2 4 2 IDX-OM-W023 4 30 (2) 30 () O IDU Series 4-2 4 3 IDX-OM-W023 4 AD48-A 1 IDU8E/11E/15E1 ) 20193 20192SERIAL No.XPAD48 SMC WEB IDF-S0002 1 IDU8E/11E/15E1 C42FP-260S 1 IDU8E/11E/15E1 IDF-S1933 1 IDU8E/11E/15E1 2 IDU Series 4-2 4 4 IDX-OM-W023 5 5 5-1 3 ON OFF () 3 2

Peltier-type Chiller Thermo-con/ Compact Type

40 50 60 70 Circulating fluid temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the cooling capacity decreases by approx. 20 W.

AN

Rc(PT) 3 8 28 to 30 Rc(PT) 1 2 28 to 30 Rc(PT) 3 4 36 to 38 Rc(PT)1 AN103-KM6 AN103-X233 AN103-X235 VEX 40 to 42 Rc(PT)1 1 4 AN203-KM8 1 2 48 to 50 Rc(PT)1 48 to 50 Rc(PT)2 3 Make sure not to apply a lateral load to the body during or after the installation.

VHS20/30/40/50

VHS20/30 VHS40/40-06/50 2-10 I 10 I G H F E X H .

Compact Vacuum Unit

Note 2) Fixed unit: kPa A ZB1 FE3 Mounting screw M2 x 1.18 inch (30 mm) 2 pcs., O-ring 1 pc. are included. Nominal filtration rating using suction filter: 30 m !2 Sound absorbing material (10 pcs. in 1 set) If only the lead wire with connector is required, order using the following part number.

PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

Compact Direct Operated 2 Port Solenoid Valve for Water and Air SeriesVDW10/20/30 VX2 How to Order Valves (Single Unit) VXD VD W 2 1 1 G 2 01 VXZ For Water, Air, Vacuum VXE Made to Order (Refer to page 244.) Series VXP 1 10 Valve type Option 2 20 VXR

(C) 10 to 50 Fluid temperature (C) 1 to 50 (No freezing) Location without corrosive or explosive gases Environment Valve leakage (cm3/min) 0 (with water pressure) 1 or less (Air) Unrestricted Mounting orientation Vibration/Impact (m/s2) Note 4) 30/150 24 VDC, 12 VDC, 6 VDC, 5 VDC, 3 VDC, 100 VAC, 110 VAC, 200 VAC, 220 VAC (50/60 Hz) Rated voltage 10% of rated voltage Allowable voltage fluctuation

Rotary Table Series MSU

Basic weight Size 22.5 Single vane 162 90 1 Positioning pin hole 25 161 180 261.5 90 Adjustment bolt (A) Adjustment bolt (B) 3 30 259.5 180 For 90 rotation Single vane (S): 80 to 100 adjustable 440 90 7 50 436 180 675 90 20 Adjustment bolt (A) adjustment range Adjustment bolt (B) adjustment range 60 670.5 180 180 Allowable Loads Do not permit the load and moment applied to the table to exceed

Electric Actuator Triple Axis P&P Unit

Ball screw allowable rotation X axis specifications in-line mount (side mount) 200 20 40 W mm Motor Ball screw lead Guide Maximum work load Maximum speed Repeatability 400 750 20 40 4000 Allowable rotation rpm 20 40 3000 High rigidity direct acting guide 2000 kg mm/s mm 30 1000 15 2000 50 1000 25 2000 100(75) 1000 50(37.5) 2000 1000 0.05 (897) 1) When axes are combined, select each axis considering

Multi-channel Digital Sensor Monitor

Set the sub display (left) from the selection list on page 50. [dUAL] 2 value display/ [LinE] character string display is not selected Press the SET button to set. Press the SET button to set. Move to sub display (right) setting. Sub display (right) setting Set the sub display (right) from the selection list on page 50.

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

Rubber bumper Rod end thread Male thread +1.0 0 mm Stroke length tolerance Standard Stroke Standard stroke (mm) Bore size (mm) JIS Symbol Double acting, Single rod 5, 10, 15, 20, 25, 30 6, 10, 16 5, 10, 15, 20, 25, 30, 40, 50 20, 25, 32 For "Long Stroke", refer to page 516.

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

17.5 NPT 3/8 35.5 41.8 49.6 55.6 30 22.2 NPT 1/2 37.6 45.8 49.6 55.6 30 15-13-4 Flow Control Equipment Precautions Be sure to read before handling.

ZPT/ZPX

width across flats 17 M22 x 1.5 Hexagon width across flats 30 9.5 10 50 9.5 Width across flats 19 H 70 Width across flats 60 4-M5 x 0.8 G 11 F E Y 4 40 C A B D Dimensions (mm) A B C D E F G H Y Model ZPT100HBJ25-B01-A22 104.5 178.5 50-B01-A22 140.5 214.5 100 103.1 68.6 106.7 47.5 60.5 35.5 75-B01-A22 180.5 254.5 100-B01-A22 215.5 289.5 ZPT125HBJ25-B01-A22 113 187 50-B01-A22 149 223 125 128.5

3 Port Solenoid Valve Series VQ100 1

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in connection (Mounting hole) Model A 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 70.5 30.5 18 12 29 5 50 70.5 30.5 18 12 29 5 50 86.5 39 23 14 35

3 Port Solenoid Valve Series VQ100

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

3 Port Solenoid Valve Series VQ100 1

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

Vacuum Gripper

The flow rate characteristics correspond to the standard supply pressure (0.5MPa). -90 -80 -70 Vacuum pressure [kPa] -60 -50 -40 -30 -20 -10 0 0 5 10 15 20 25 Suction flow [L/min(ANR)] Flow rate characteristics Exhaust characteristics * The actual suction flow at the point of suction varies depending on the piping conditions to the vacuum port.

PSxx-OMU0008CN

No.PS-OMU0008CN-D // ZSE20C(F) ISE20C(H) 2 9 11 12 16 16 19 21 [] 24 25 3 26 28 30 30 30 F0 32 F1 OUT1 33 F2 OUT2 36 F3 38 F4 39 F5 FUNC 41 F6 43 F10 44 F11 50 F80 51 F81 52 F82 54 F90 55 F96 57 F97 58 F98 60 F99 62 63 67 67 68 77 77 79 -1No.PS-OMU0008CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems