5 Port Solenoid Valve

(M12 plug) DIN rail clamping screw 60 (12) Plug-in Manifold Stacking Base 33.6 17.5 9.6 6.5 8.5 17.2 (7.5) 1(P) port C8: 8 (For A, B port metric size) N9: 5/16" (For A, B port inch size) 2n x C2, C3, C4, N1, N3 (4(A), 2(B) port) C2: 2 one-touch fitting C3: 3.2 one-touch fitting C4: 4 one-touch fitting N1: 1/8" one-touch fitting N3: 5/32" one-touch fitting Formula L1 = 8.5n + 31, L2 = 8.5n

ZP3

w q ZP3 T N 04 B5 e Connection thread (Female thread) M5 x 0.8 Width across flats D B5 M5 x 0.8 5 Model A B C2 D Vacuum inlet direction q Pad dia.

CRQ2

Q1= M L1 (3 x P) C1 = C C2 = C Y = C2 Y = L2 = C2 = C L2 = L2 (3 x P) L1 = X = Q2 = M D2 = (mm) (mm) (mm) Y 1 to 9 1 to 10 D2 Q1 M3, M4 M3, M4, M5 Q2 M3, M4 M3, M4, M5 L2 max Y Y Y 6 to 9 7.5 to 10 Size 10 15 Size 10 15 Size 10 15 L1 max X 2 X 2 X 8 to 18 9.5 to 20 L2 max Y Y 3.5 to 4.9 3.5 to 5.9 11-8-13 14 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA1 to -XA24: Shaft Pattern

Series ZB Compact Vacuum Unit

unit: kPa Option Note 12) Lead Wire with Connector for Vacuum Pressure Switch Without option Nil G Nil Without lead wire with connector (No need to specify for pressure sensor type. ) Lead wire with connector and connector cover, Lead wire length 78.7 inch (2 m) With bracket for single unit (Enclosed with the product for shipment without being assembled) B Vacuum (V) Port Note 11) Bracket C2

Compact Vacuum Unit

ZB1 PS 1 A o V-port assembly Pressure sensor specifications ZB1 VPN3 A C2 0 to 14.6 psi (0 to 101 kPa), output: 1 to 5 V, accuracy: 2% F.S. or less 1 3 14.5 to 14.5 psi (100 to 100 kPa), output: 1 to 5 V, accuracy: 2% F.S. or less One-touch fitting C2 C4 N1 N3 L2 L4 LN1 LN3 Straight 2 mm one-touch fitting Straight 4 mm one-touch fitting Straight 1/8" one-touch fitting Straight 5/32" one-touch

7.5

4(A) 2(B) KJL03-C2 5/32" one-touch fitting assembly (Elbow type) KJL02-C2 2 one-touch fitting assembly (Elbow type) SJ3000 4(A) 2(B) KJL07-C2 1/4" one-touch fitting assembly (Elbow type) KJL04-C2 4 one-touch fitting assembly (Elbow type) KJW01-C2 1/8" one-touch fitting assembly (Long elbow type) KJL06-C2-N 6 one-touch fitting assembly (Elbow type) KJW03-C2 5/32" one-touch fitting assembly

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(If not specifying dimension C2, indicate instead.)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(If not specifying dimension C2, indicate instead.)

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

BM Bellows type with groove UM Flat type with groove KJH C2 06 Pad diameter Applicable tubing O.D. 63 63 80 80 04 4 06 6 03 5/32" 07 1/4" When changing the pad diameter, replace also the plate together. !

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

C2 SJ3l60-C2 SJ2l60-C2 2 onetouch fitting 2 onetouch fitting 3 position 4 position 3 position 4 position 71 65 73 46 41 44 2 position 2 position C4 C4 SJ3l60-C4 SJ2l60-C4 4 onetouch fitting 4 onetouch fitting 3 position 4 position 3 position 4 position 77 48 73 61 69 44 39 42 2 position 2 position C6 SJ3l60-C6 SJ2l60-M3 6 onetouch fitting M3 x 0.5 3 position 4 position 3 position 4 position

Compact 5-Port Solenoid Valve

C2: 2 (SMC) C4: 4 (SMC) 9.1 (C6) 10.3 (C2, C4) D D 3/5 B 2 E 3/5 B 2 B 2 B 2 E B 2 27 (C2, C4) 25.8 (C6) A 4 A 4 A 4 1 P P 1 4 A 4 A S (Pitch of C2, C4) P = 6.5 One-touch fitting [1(P), 3/5(E) port] Applicable tubing: 8 (SMC) (Pitch of C6) P = 9 * Refer to page 97 for dimensions of external pilot and built-in silencer. * Refer to pages 65 to 68, 79, and 80 for dimensions when L6, b, and

Table of Contents

(If not specifying dimension C2, indicate instead.)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(If not specifying dimension C2, indicate instead.)

Micro Mechanical Valve Series VM1000

EXH.1 (C1) 2 (C2) 4 93.7 23 19 VH 18.5 18.5 12 CYL.2 CYL.1 14 12 21 20 3 (E1) 1 (S) 5 (E2) VHS 0.5 MPa supply 30.5 26.4 3 x 1/4 VHS T.T.

I

[VF323O (B) (A) ct c2 #\ilIrb Compact size and lisht weighi 1.04inch wide Large flow capaci$ -CvI.o(%) Shgb !|vF3l3O (B) (A) ' 0 1 c 2 Clo6td C.l49r rd d#{Ft ffi# E I S E 2 {R2XPXB1) Low power consumption -1.8WDc (F2)(P)(F1l NVF3S3O Exh.Bt C.ii.. i{VF3,(3O (B) (A) c1 c2 ryffTfl-TTrl,* Er\llt'lll/'Es) EI SE2 Pr.aqa ConL.

Possible to transfer a workpiece at low-speed.

(If not specifying dimension C2, indicate instead.)

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection C2 thread N S U F GN GS B3 M3 x 0.5 3 11 6 6 10 15 25 ZP T 10 13 16 UT Vacuum inlet: One-touch fitting J K A8 Applicable tubing O.D. J B5 M5 x 0.8 5 13 8 Width across flats H Dimensions Per Vacuum Inlet: One-touch Fitting G Model G H J Fitting part min. hole size Vacuum inlet direction q Pad dia.

SMC Pneumatic Clean Series

MM Relief port FX 20, 25 Eh8 D FZ I 20 to 32 Standard port Relief port Width across flats NA 4-FD 45 1.5 AL 32, 40 A F N K N S + Stroke FT H FY Z + Stroke ZZ + Stroke 40 (mm) 4 7 FD E 20-0.033 0 52 40 40 34 B FX FZ FY G FT 13 8 AL D K MM NA NN B1 B2 Bore size ZZ Z H H2 H1 S P N I F C2 A 66 60 60 60 75 75 75 11 8 8 8 40 32 25 20 24 22 22 18 50 45 45 41 8 8 8 6 6 5 22 17 17 13 41 32 32 26

Rotary Actuator/Vane Style Series CRB2

(If not specifying dimension C2, indicate instead.)

Rotary Actuator

(If not specifying dimension C2, indicate instead.)