XM, XY

196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 70 P.C.D 58.7 6 x 6.6 114 P.C.D 92.1 8 x 8.4 95 110 XYA/In-line type C D XLA G Fd C XL (K flange) XLQ XM XY XM XY B DXSA XVD H 45 XGT A CYV E Fn (KF flange) (mm) Model A 79.5 106

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

ZHP ZHP Male thread 5/16-18UNC F 3/8-16UNC G Female thread 5/16-18UNC H 3/8-16UNC ZU VQD-V Ejector Specifications Recommended Work Load [N] ZHP-07l ZHP-10ZHP-12ZHP-15 Nozzle nominal size [mm] 0.7 1.0 1.2 1.5 ZHP63 ZHP80 Horizontal lifting 66 106 Vertical lifting 33 53 Max. suction flow rate [L/min (ANR)] 30 51 62 77 Air consumption [L/min (ANR)] 24 40 58 87 Use this product with the recommended

ZP

2 (Initial value) Static friction ratio Pad type Operating temperature range (C) Visual checking Vapor method 3 Mark-free NBR (Specially treated 4) Mark-free NBR pad 5 to 40 0.6 1 NBR + Stuck fluororesin 5 to 60 Stuck fluororesin pad 0.2 Standard Mark-free Pad Series 2 Fluororubber + Stuck fluororesin 5 to 100 PEEK Resin attachment 0.2 5 to 40 3 Conductive PEEK (Volume resistivity: 1 x 106

•

-lL I tube 0.0 P ro~/ ~ LL-.q r ~ II~B 1'L ~, I IL (mm) (mm) l:iI.16Xl I:MaXl y oA .8 Model D E F C oL oK IL G H "U 47,S 58,3 76,1 ZPR40B 40 43 34 92 24A 16 48 25 ~ 15 ZPRSOB 50 53 38 60.1 106 ,96 57 5t5,62.3 32.4 It/ Applicable tube Applicable tube 0.0 "P Q R .5 IS 6 24.3 16.8 12.8 .8 8 26.2 18.7 15.2 19 Series ZPR/Without Buffer Connection One-Touch Tube Fitting Pad Type Flat, Flat with

MY2

C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A B A B A B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C D C D C D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

32 14.2 20 12.5 (mm) JC JD JJ JK JU Q S SD SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 70 100 200 M12 x 1.75 18 M8 x 1.25 10 M20 x 1.5 53 170 18 79 34.2 75 32.5 5H9 5.5 M8 x 1.25 12.5 67 54 5H9 3.5 39 5H9 3.5 M8 x 1.25 M20 x 1.5 M10 x 1.5 M12 x 1.75 18 10 59 189 22 90 34.3 86 37.5 6H9 6.5 14.5 77 59 6H9 4.5 49 6H9 4.5 M16 x 2 M12 x 1.75 M27 x 1.5 M12 x 1.75 25 13 74 240 29 108 40.2 106

Table of Contents

Weight (g) Vane type Single vane Double vane CRB2BW15-S CRB2BW20-S CRB2BW30-S CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D 90 Model CRB2BW40-D CRB2BW10-S 90 180 180 100 270 180 90 270 270 180 270 180 90 90 90 270 90 100 90 100 90 100 90 100 Rotating angle Body of rotary actuator 26.3 26.0 376 400 446 25.7 49 387 365 48 105 103 198 50 106 203 193 42 43 57 60 121 144 223 243 Flange

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Weight (g) Vane type Single vane Double vane CRB2BW15-S CRB2BW20-S CRB2BW30-S CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D 90 Model CRB2BW40-D CRB2BW10-S 90 180 180 100 270 180 90 270 270 180 270 180 90 90 90 270 90 100 90 100 90 100 90 100 Rotating angle Body of rotary actuator 26.3 26.0 376 400 446 25.7 49 387 365 48 105 103 198 50 106 203 193 42 43 57 60 121 144 223 243 Flange

CC

size (mm) Piston area (mm2) Rod size (mm) Operating direction Operating pressure (MPa) (N) 0.2 62.8 52.8 98.2 82.4 161 138 252 220 392 330 624 560 1010 908 1570 1430 2460 2260 3080 2880 4020 3760 5080 4780 6280 5900 9820 9260 14100 13400 0.3 94.2 79.2 147 124 241 207 378 330 588 495 936 840 1510 1360 2360 2150 3690 3390 4620 4320 6030 5640 7620 7170 9420 8850 14700 13900 21200 20 0.4 126 106

CE2

clevis Double clevis Center trunnion Bore size (mm) 40 50 63 80 100 J CD H10 Z TZ TX CZ BB Z B FX U FD FV RR FZ FT CX L TDe8 FY 224.5 117 15 10 15 85 29.5 299.5 71 80 16 9 60 10 100 12 30 42 76.5 + 0.058 0 + 0.3 + 0.1 0.032 0.059 D248.5 127 18 12 15 95 38 328.5 81 90 19 9 70 12 110 12 35 50 88.5 + 0.070 0 + 0.3 + 0.1 0.032 0.059 263 148 25 16 18 110 49 352 101 105 23 11.5 86 16 130 15 40 59 106

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

CE2 IN 84.8 59 42 25 CQSY16-PS 12 6 OUT 113 79 57 34 CQSY20-PS ML2B IN 151 106 75 45 CQSY25-PS 16 8 OUT 201 141 101 60 When only grease for maintenance is necessary, please order by the following part numbers.

RSH/RS1H

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CT CT Y V U FT CD Conveyor lower limit position T R H Stroke 2-Rc P G D A Q Rear pressure port Front pressure port B WB W (width across corners I) E (mm) Bore size (mm) N CD CT CZ D E FT FX FZ G H I L O P Q R B A Stroke 50 30 225.5 103.5 20 8 35.5 32 64 20 73 93 16 122 85 44 9 1/8 10 36 14 depth 5 63 246 106

MQQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com TV TW 2-TC RHC ZZ + Stroke MK(2) Bore size (mm) BB CD CX GB H NB R U Z ZZ S RS Q G 6 12 3.3 3.3 17.5 27.5 22 8 106 117 70.5 5 10 12 3.3 3.3 19 28 24 8 101 112 65 5 RS H A 16 18 5 6.6 24 30 30 10 114 128 74 8 RZQ T-bracket Dimensions Note) Applicable bore

MVGQ

with plug) 4-MM depth ML Solenoid valve: Series VZ5000 4-NN through Speed controller RS Q G RS H A RZQ Rc 1/8 P port MI W S CEP1 CE1 CE2 Rc 1/8 R port C + Stroke B + Stroke A + Stroke ML2B C J G5-S MVGQM, MVGQL Common Dimensions CV Applicable solenoid valve B C DA F G H J K L MM ML NN PW Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) MVGQ 40 124 38 M8 x 1.25 20 M8 x 1.25 27 30 106

ARM10/11

B C D E F G H I J K L M N O P Symbol Model A ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 Dimensions by the Number of Stations Manifold stations 10 Model Symbol 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294 252 210 168 126 84 L1 592

CQM

Unit: N Theoretical Output Weight Bore size (mm) Operating direction Operating pressure (MPa) Unit: g Without Auto Switch 0.3 0.5 0.7 Bore size (mm) Cylinder stroke (mm) IN 25 42 59 12 5 10 100 40 45 50 75 15 20 25 30 35 OUT 34 57 79 12 44 52 60 69 77 86 IN 45 75 106 16 16 56 67 77 87 97 108 OUT 60 101 141 20 183 198 213 227 92 107 122 137 152 167 IN 71 118 165 20 25 234 252 270 288

CXS

-X Theoretical Output 20(N) Data Operating pressure (MPa) Rod size (mm) Bore size (mm) Operating direction Piston area (mm2) 0.15 0.7 0.6 0.5 0.4 0.3 0.2 0.1 8.4 39.2 33.6 28.0 22.4 16.8 11.2 56 OUT CXS6 4 4.6 21.7 18.6 15.5 12.4 9.3 6.2 31 IN 110 94.2 78.5 62.8 47.1 31.4 15.7 157 OUT CXS10 6 70.0 60.0 50.0 40.0 30.0 20.0 10.0 100 IN 247 212 177 141 106 70.6 35.3 353 OUT CXS15 8 176

CXT

Theoretical Output (N) IN OUT Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.7 0.5 0.3 84.8 IN 59 42 25 12 113 OUT 79 57 34 151 IN 106 75 45 16 201 OUT 141 101 60 236 IN 165 118 71 20 314 OUT 220 157 94 378 IN 264 189 113 25 491 OUT 344 245 147 603 IN 422 302 181 32 804 OUT 563 402 241 1056 IN 739 528 317 40 1257 OUT 880 628 377 8-27-3 4 Series CXT Weight

CNS

35 14 180 28 30 30 M14 x 1.5 18.5 Up to 1400 56 53 182 290 1/2 3/8 144 144 40 90 63 43 14 215 35 35 35 M16 x 1.5 Bore size (mm) K KA LD LH LS LT LX LY MM MA N P Q R S T V VA X Y H ZZ 125 140 160 15 31 19 85 393 8 100 M12 x 1.75 M30 x 1.5 35 1/2 25 303 20 23 45 20 110 478 87.5 157.5 85.5 15 31 19 100 433 9 112 M12 x 1.75 M30 x 1.5 35 1/2 25 343 20 28 45 30 110 528 95 180.5 93.5 17 36 19 106

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120 53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 x 1 M8 x 1.25 14 372 354 186 190 124 158 118 116.5 73 106