Soft Start-up Valve AV2000/3000/4000/5000 1

ITV IC 1 2 Proper tightening torque (Nm) Tightening Torque when Piping VBA Connection threads Rc 1/4 12 to 14 VE Rc 3/8 22 to 24 Terminal 1 2 Rc 1/2 28 to 30 DIN terminal + VY1 Rc 3/4 28 to 30 Rc 1 36 to 38 G Lubrication 4. Piping to products When piping to products, avoid making an error of supply port, etc., by referring to the instruction manuals. 5.

Drain Separator for Vacuum Series AMJ 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Drain cock Nil Metal bowl 2 ZL Thread type Port size Nylon bowl 6 Drain guide (Rc 1/4) 02 1/4 Nil J Rc ZY 03 3/8 F Flow: Right Left R G 04 1/2 N If ordering two options or more, indicate symbols numerically and alphabetically.

Series SYJA300 3 Port Air Operated Valve

Base mounted (With sub-plate) 75 (Without sub-plate 45) Rc(PT)1 /8 4.5 (0.25) SYJA524-01 N.O. SYJA712-01 N.C. Rc(PT)1 /8 9 (0.5) 80 Body ported SYJA722-01 N.O. Base mounted M5 X 0.8 Rc(PT) 1 /8, 1 /4 01 02 01 02 SYJA714N.C. Base mounted (With sub-plate) 130 (Without sub-plate 80) SYJA724N.O.

VCB

Proper tightening torque N m Tightening torque for piping Connection threads 7 to 9 Rc 1/8 12 to 14 Rc 1/4 22 to 24 Rc 3/8 28 to 30 Rc 1/2 28 to 30 Rc 3/4 5. Connection of piping to products When connecting piping to a product, refer to its instruction manual to avoid mistakes regarding the supply port, etc.

Special Specifications:

One-touch fitting applicable tube size In case that the type of thread is Rc, G: 10 In case that the type of thread is NPT: 3/8 63 76 90 106 122 160 134 150 250 350 450 550 650 148 161 187 202 229 259 147 173 188 215 245 8B 11B 22B 37B Size: AFF75B, AM850 (220) (220) 266 266 (344) 379 23 (58) 3/8 female thread Drain Rc 3/8 Drain 14-20-60 Bowl Assembly Series AFF-CA, AM-CA Series AME, AMF

Series KP/KPQ/KPG

SUS316 SR3000 SR4000 Clean Gas Filter Series SF Cartridge type 0.01mm particles 100% eliminated Principal materials Port size Thread type Element Housing Seal M5 1/4 Series SFA Series Type 100 200 300 Disk PTFE + Polyethylene Rc NPT TSJ UOJ SFA SUS316 (electropolished) Fluoro rubber (FPM) Series SFB PTFE membrane SFB100 Straight Disposable type Series Principal materials Port size Thread

Series KP/KPQ/KPG

SUS316 SR3000 SR4000 Clean Gas Filter Series SF Cartridge type 0.01mm particles 100% eliminated Principal materials Port size Thread type Element Housing Seal M5 1/4 Series SFA Series Type 100 200 300 Disk PTFE + Polyethylene Rc NPT TSJ UOJ SFA SUS316 (electropolished) Fluoro rubber (FPM) Series SFB PTFE membrane SFB100 Straight Disposable type Series Principal materials Port size Thread

KP/KPQ/KPG

SUS316 SR3000 SR4000 Clean Gas Filter Series SF Cartridge type 0.01mm particles 100% eliminated Principal materials Port size Thread type Element Housing Seal M5 1/4 Series SFA Series Type 100 200 300 Disk PTFE + Polyethylene Rc NPT TSJ UOJ SFA SUS316 (electropolished) Fluoro rubber (FPM) Series SFB PTFE membrane SFB100 Straight Disposable type Series Principal materials Port size Thread

Air Cooled Aftercooler Series HAA 1

(mm) Cooler Port size for inlet/outlet air Port size for drain outlet piping (Auto-drain) Weight (kg) Coating color Applicable compressor (kW)(2) 300 255 400 Aluminum plate tube with fins 350 x 2 pcs. Rp 3/4 socket 1B union 1 1/2B union Rc 3/8 (Rc 3/8) 24 Rc 1/2 (Rc 3/8) 55 36 18 Munsell N-8 (White), Munsell 2.5PB5/8.5 (Blue) 37 22 15 7.5 Thermometer for outlet air temp. (1 pc.)

PFxx-OMO0007CN

. -14No.PF-OMO0007CN 90270 IN OUT M4(4) 1.6 mm (39) -15No.PF-OMO0007CN 1.0 MPa IN8 IN IN OUT D D8 () () Rc(NPT)1/8 79 Nm Rc(NPT)1/4 1214 Nm Rc(NPT)3/8 2224 Nm Rc(NPT)1/2 2830 Nm PF2A710 PF2A750 24 mm PF2A711 30 mm PF2A721 PF2A751 -16No.PF-OMO0007CN FG PF2A7 1 DC(+) 2 OUT2 3 DC(-) 4 OUT1 -17No.PF-OMO0007CN PF2A7 NPN2(2) PF2A7--27DC(+) OUT1 OUT2 DC1224V DC(-) Max.30 V80 mA 1

CG1-SMV13_en

Rc 1/8 7 ~ 9 Rc 1/4 12 ~ 14 Fluid Compressed Dry Air 7 Limitations of Use Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury.

MIW/MIS

RB RA RC RF RE RD RJ SC SB SA Model MIS20-30 MIS20-20 MIS20-10 MIS12-30 MIS12-20 MIS12-10 8 6 6 M5 x 0.8 14 18 1.8 2.5 8 24 22.5 12 34 26 2.2 4 12 9 M8 x 1 10.5 11 12 Series MIW/MIS Auto Switch Mounting When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the bottom.

F

Applicable Connection Model T H1 H2 L1 L2 Mounting M Minimum Tube OD Thread UNF (Width (Width Hole Hole Applicable Connection Model T (M) H1 H2 L1 L2 Mounting M Effective Tube OD mm Thread (Width (Width Hole Orifice (mm 2) Inch Rc(PT) Across Flats) Across Flats) Diameter Rc(PT) Across Flats)Across Flats) Nylon/Ureth 1/8 1/4 KQE01-35 1/2-20 17.46 17.46 31.5 15 14 15.5 2.5 3.2 14 KQE23-02 M12x1

Escapements Series MIW/MIS

RB RA RC RF RE RD RJ SC SB SA Model MIS20-30 MIS20-20 MIS20-10 MIS12-30 MIS12-20 MIS12-10 8 6 6 M5 x 0.8 14 18 1.8 2.5 8 24 22.5 12 34 26 2.2 4 12 9 M8 x 1 10.5 11 Series MIW/MIS Auto Switch Mounting When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the bottom.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow Type (Metal Body) Flow rate and effective area AS220M-02 Model AS120M AS220M-01 R 1/4 Cylinder side Tubing side M5 x 0.8 10-32UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Rc 1/8 l/min (ANR) {Nl/min} Flow rate 38 7 12 Controlled flow Effective area mm 0.6 0.1 0.2 l/min (ANR) {Nl/min} 420 Flow rate 105 280 Free flow 6.5 1.6 4.3 Effective area mm Note) Flow rates are values measured with

Compact End Lock Cylinder Series CBQ2

1/8 7 49.5 14 40 7 40 5.5 9 Rc 1/8 7 57 14 50 8 50 6.6 11 Rc 1/4 8 71 19 63 8 60 9 14 Rc 1/4 10.5 84 19 Series CBQ2 Dimensions Foot type/CBQ2L, CDBQ2L (mm) Foot type B + Stroke L With rear lock With front lock Bore size (mm) L L1 LD A B LS A B LS 89.7 65.5 49.5 82.2 58 42 17 38.5 6.6 32 Special cap bolt 99.2 75 59 88.7 64.5 48.5 17 38.5 6.6 40 LH LY 101.7 75.5 52.5 91.7 65.5 42.5 18 43.5

VFS4000-OMY0001

30m 11 No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 6 3 5G 7 1) 2)()() 3)3 , 12 12 12 12 2 Nm M5 1.52 Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 12 No.VFS4000-OMY0001 8 1EXH 260 9 () 1 ISO VG 32 0 10 1) SUP (AM)(AF) 2) SF4-*-* Nm M3 0.450.6 Nm M3 0.81.2 M4 1.42.5 13 No.VFS4000-OMY0001 11 1 2 3 14 No.VFS4000-OMY0001 EXH.

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 240, Outlet Open Air Pressure Dew-Point(°C): -40, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/2, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: [Freezing] Refrigerating type (air-cooling specification), Shape: Standard, Outlet Flow Rate(l/min): 200 ～ 235, Outlet Open Air Pressure Dew-Point(°C): 10, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 35, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type

Types: Dryers, Method: [Freezing] Refrigerating type (air-cooling specification), Shape: Standard, Outlet Flow Rate(l/min): 200 ～ 235, Outlet Open Air Pressure Dew-Point(°C): 10, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 35, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type