S070

Grommet type 16.5 3 7 15 21 2-3.4 mounting hole Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

(mm) Dimensions G H J K A B C D E F L M N P Q R V Model LVD1m-Sm LVD2m-Sm LVD3m-Sm LVD4m-Sm LVD5m-Sm 4 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 (5/32") 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 36 21 M5 x 0.8 6 35 35 82 62 20 93 48 14.5 6 22 50 7 39 36 21 M5 x 0.8 6 8 76 25 17.5 45 45 105.5 114 65 32 64 7 52

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Dust Cover Without dust seal With dust seal Note 1) Dust seal material: Polyurethane Consult P/A for details. Note 2) Measures for use in an mist environment are not provided. Also, depending on the environment, it may not be possible to use the dust seal. Consult P/A. TSUBAKI CABLEVEYOR Specification (-X40) Parts list Able to compactly arrange supporting guides for cables and hoses.

Modular Type Air Filter Series AF

Contact P/A regarding the bowl assembly supply for PSI and F unit specifications.

Compressed Air Cleaning Filter Series

P Q S R Drain cock Gray: N.C.

Manifold Specifications

Series VZ1000 Manifold Specifications Manifold Standard Manifold Specifications Type 20 Single base/B mount Common SUP/Common EXH 2 to 20 stations Valve Rc 1 8 M5 x 0.8 Model Manifold type P(SUP)/R(EXH) Valve stations A, B port location VK VZ VF 1(P), 3(R) port 4(A), 2(B) port Port size Valve Note) effective area (mm2) VFR VZ1120 1 4: 0.48, 4 3: 0.85 VP4 Note) Value at manifold base mounted

KC

(mm) <M5> <M5> Weight (g) Applicable tubing KCH04-M5 KCH04-01S KCH06-M5 KCH06-01S KCH06-02S KCH08-01S KCH08-02S KCH08-03S KCH10-02S KCH10-03S KCH12-03S KCH12-04S 2.1 2.6 2.4 M5 x 0.8 9.8 30.8 26.1 32.4 37.4 28.9 42.4 45.7 34 50.5 51.5 54.2 41.6 27.3 22.1 28.9 33.4 22.9 38.4 39.7 27.5 44.5 45 47.7 33.6 18 2.1 2.6 2.4 4 8 1 8 10 11.8 12 14 M5 x 0.8 10 16 14 20 27 25 34 43 48 41 Reference dimensions

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

PSE540/560

M5 female thread, through type M3 M3 x 0.5 ISA2 IM5 M5 M5 x 0.8 IS Option/Part No. M5 female thread, through type (With mounting hole) 01 R 1/8 (With M5 female thread) IM5H Note Description Part no. N01 NPT1 /8 (With M5 female thread) ZSM Connector for PSE200 1 pc. ZS-26-E-4 R04 4 plug-in reducer Connector for PSE300 1 pc.

JXCx-OMU0026

Refer to 9.1 Profile parameter (P.52) for details.

Auto Switch Guide

Type P. 7-9-15 Band, Rail, Tie-rod Mounting MU D-X 20Data P. 7-9-16 Solid State Switches General Purpose Type P. 7-9-17 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 7-9-23 Direct Mounting 2-color Indication Type P. 7-9-25 Band, Rail, Tie-rod Direct Mounting 2-color Indication Type with Diagnostic Output P. 7-9-29 Band, Rail, Tie-rod Mounting Water Resistant 2-color

Auto Switch Guide

Type P. 8-30-18 Band, Rail, Tie-rod Mounting D-X 20Data P. 8-30-20 Solid State Switches General Purpose Type P. 8-30-21 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 8-30-31 Direct Mounting 2-color Indication Type P. 8-30-33 Band, Rail, Tie-rod Direct Mounting 2-color Indication Type with Diagnostic Output P. 8-30-39 Band, Rail, Tie-rod Mounting Water Resistant 2-

Auto Switch Guide

Type P. 8-30-18 Band, Rail, Tie-rod Mounting D-X 20Data P. 8-30-20 Solid State Switches General Purpose Type P. 8-30-21 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 8-30-31 Direct Mounting 2-color Indication Type P. 8-30-33 Band, Rail, Tie-rod Direct Mounting 2-color Indication Type with Diagnostic Output P. 8-30-39 Band, Rail, Tie-rod Mounting Water Resistant 2-

Auto Switch Guide

Type P. 8-30-18 Band, Rail, Tie-rod Mounting D-X 20Data P. 8-30-20 Solid State Switches General Purpose Type P. 8-30-21 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 8-30-31 Direct Mounting 2-color Indication Type P. 8-30-33 Band, Rail, Tie-rod Direct Mounting 2-color Indication Type with Diagnostic Output P. 8-30-39 Band, Rail, Tie-rod Mounting Water Resistant 2-

Plug-in Unit

, 3P) VQC101-5 T kit 1 to 10 stations M5 (M5 threads) S kit 1 to 8 stations: EX500 1 to 12 stations: EX250 1 to 8 stations: EX126 C10 (For 10) Options Direct outlet with built-in silencer Branch type C12 (for 12) F Kit: D-sub connector 1051 (Single) C4 (For 4) VQC200-5 P Kit: Flat cable VQC2000 VV5QC21C6 (For 6) Side 1144 (Double, 3P) T Kit: Terminal block box VQC201-5 C8 (For 8) S Kit

VCW

P-77.5 (JT)

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Grommet typeConnector typeCompliant with CE marking

10%, Ripple (P-P) 10% or less (With power supply polarity protection)17 mA or less at 24 VDC5 ms or less?1% F.S. or lessIP40Operating: 0 to 60C, Stored: ?

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

10%, Ripple (P-P)10% or less (With power supply polarity protection)1 output: 17 mA or less at 24 VDC, 2 output: 25 mA or less at 24 VDC5 ms or less?1% F.S. or lessIP40Operating: 0 to 60C, Stored: ?