An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values. 

An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values. 

An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values. 

THERMO CHILLER, CHILLER, 729, 40.00000 lb

AC Servo Motor Driver (Network card type ）

TROUBLESHOOTING Alarm No.: 20 Name: Encoder normal communication error 1 Alarm content An error occurred in the communication between an encoder and driver. Detail No.

AC Servo Motor Driver (Pulse input type/Positioning type ）

TROUBLESHOOTING Alarm No.: 20 Name: Encoder normal communication error 1 Alarm content An error occurred in the communication between an encoder and driver. Detail No.

Table of Contents

20 20 1.

Table of Contents

20 25 25 28 36 24 17.5 25 20 18.5 21 16 16 20 20 25 30 Grooves (Except 12, 16, 20, 25) (mm) Use grooves section a and section b in the figure below of the cylinder body for firmly fixing in the following case.

Magnetically Coupled Rodless Cylinder

$2 are for 20 to 40.

LEC-OM071xx

The following graph shows an example of the detection of an overload warning when the overload warning level (Pn52B) is changed from 20% to 50%. An overload warning is detected in half of the time required to detect an overload alarm.

SY

stations 2 to 20 stations 20 C44 C46 Note 1) An asterisk () indicates order made products.

Table of Contents

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Table of Contents

ZS-20-5A-50 . 1 pc.

LEC-OM069xx

The following graph shows an example of the detection of an overload warning when the overload warning level (Pn52B) is changed from 20% to 50%. An overload warning is detected in half of the time required to detect an overload alarm.

ZP

With buffer 04 06 4 6 Vacuum inlet direction Direction Lateral Symbol Buffer stroke ( ) R Pad size Symbol Stroke Pad type Buffer specification 10 20 30 40 50 10 mm 20 mm 30 mm 40 mm 50 mm Symbol Size 3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 Symbol Specification 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Symbol W Type

Mechanically Jointed Rodless Cylinder Series MY1

20 1.

Table of Contents

SB) 4 7 7 5 5 5 3 7.5 5 MRHQ 3 5 3 90 90 5 90 5 AI Misc. 20 20 20 20 D(3-SA) 20 20 20Section SD SD MHSJ3-63D MHSJ3-80D 4 10 4 11 3 5 3 5 90 90 5 20 20 20 20 (mm) AI 54 57 70 79 93 L 2H9 3H9 4H9 6H9 8H9 J 20 21 24 28 32 HB 65 75 88 106 130 HA 76 86 103 125 158 FX 22 26 32 40 50 EO 15.5 19 24 31 41 EC 11.5 15 18 23 31 M 2 2 2 3 4 DO 35.5 40 48 59 73 DC 31.5 36 42 51 63 AE 36 37 46 50 57 NB

AC Servo Motor Driver (CC-Link Type ）

50 20 9 15 9.

ZP

With buffer 04 06 4 6 Vacuum inlet direction Direction Lateral Symbol Buffer stroke ( ) R Pad size Symbol Stroke Pad type Buffer specification 10 20 30 40 50 10 mm 20 mm 30 mm 40 mm 50 mm Symbol Size 3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 Symbol Specification 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Symbol W Type

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

B1 AWG 20 B2 Note.