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20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Origin Home Switch Infotmation LX series actuators are available with an optional photo micro sensor as an origin home switch to detect when the actuator is fully retracted. The LCOC seies positioning drjver requires an input from the origin home switch or some other sensor when homing the actuator.

An application which could have negative effects on people, property, or animals requiring special safety analysis. Use in an interlock circuit, which requires the provision of double interlock for possible failure by using a mechanical protective function, and periodical checks to confirm proper operation. 2.2 Installation 2 2 IDF100F~150F-W IDX-OM-M051 Air Dryer 2.

40 90 59 43 14 39 36 40 32 to 1200 3/4 M40 X 1.5 60 63 41 90 115 18.5 204 162 M18 X 1.5 20 17 23 45 70 48 39 44 50 40 to 1200 3/4 1 Lube Non-lube M45 X 1.5 60 63 90 115 18.5 46 20 226 182 M20 X 1.5 17 50 48 44 25 74 39 50 40 to 1200 M56 X 2 71 67 140 25 56 277 225 23 M24 X 1.5 110 60 60 20 55 30 86 49 63 50 to 1200 1 M64 X 2 80 76 65 140 30 330 270 M30 X 1.5 23 130 37 70 96 60 20 49 68 80

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

10 2 10 15 20 CXT 32 40 5 15 10 5 1 10 10 20 (mm) D-F7W D-J79W D-F7BAL D-F7NT D-F79F Auto switch model D-A7 D-A8 D-A73C D-A80C D-A7H D-A80H D-F7 D-J79 D-F7V D-J79C D-F7WV D-F7BAVL D-A79W Application No. of auto switches mounted 2 5 10 15 15 20 20 CXT 32 40 1 5 5 10 15 15 20 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

The following procedures are an example of how a test may be performed. It is intended as an overview and not as an all inclusive description. 1) Rotate the adjustment wheel counterclockwise (DECR) completely to relieve spring force.

Caution When using an exhaust cleaner, mount it downwards.

dew point) C -20 -10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 70 80 [Example] If air at 30C and 60% humidity is pressurized to 0.7MPa, the dew point of the air will be 62C. ( ) If this is cooled to 25C, the amount of condensed water generated will be 15.2g/m3. ( ) Therefore, with an air flow rate of 3m3/min (22kW equivalent compressor), the amount of condensed water per unit of time is 15.2

800) 258-9200-www.stevenengineering.com 5.5 5.5 5.5 6.5 1 pc. 2 pcs. 20 20 20 20 20 20 CNA The operating ranges are provided as guidelines including hystereses and are not guaranteed values (assuming approximately 30% variations).

The proper tightening torque for screws 0.3 to 0.4 Nm Rated voltage With indicator light VZ Voltage symbol Part no. 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC 24V 12V 100V 200V 110V 220V AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 VS (b) VFN Valve Mounting Circuit with Indicator Light After confirming the gasket is correctly placed under the

(Data can be rewritten for up to one million times, and data will be stored for up to 20 years.) 2. The accumulated flow rate is reset when power is turned off. Operating Environment Warning Mounting Warning 1. Never use in the presence of explosive gases. The switches do not have an explosion proof rating.

Example) Assume circuit C with an operating pressure of 0.5 MPa, load weight of 10 kg, fluctuation to 20 kg and a cylinder bore of 32 mm.

D-A9 30 Note 1) 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) 20 + 35 D-M9V 35 20 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) 15 + 35 D-A9V 25 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) 20 + 35 35 20 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-C7 D-C80 60 + 45 (n 2) 20 + 45 60 20 5 (n = 2, 3, 4, 5

20 20 21 H M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 MM 113 113 115 145 ZZ Bore size 8 8 12 13 Female thread MM 20 25 32 40 Thread depth A1 When female thread is used, use a thin wrench when tightening the piston rod.

MY2 H/HT MY3A MY3B MY3M Load Mass Allowable Moment MY1H/m3 MY1H/M3 MY1H/M1 MY1H/M2 q r w e t 30 40 50 50 40 30 40 50 30 40 50 30 20 20 20 20 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H32 Load mass kg MY1H32 Moment Nm Moment Nm Moment Nm 5 4 3 MY1H25 MY1H40 10 5 4 3 5 4 3 MY1H32 MY1H25 MY1H25 2 MY1H25 5 4 2 2 1 3 1 1 0.5 0.4 0.3 2 0.5 0.4 0.3 0.5 0.4 0.3 D0.2 1 0.2 0.2 0.1 -X 100 200 300 400

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

Action D Double acting Cylinder stroke (mm) Bore size (mm) Standard stroke (mm) Mounting style Bore size 10 10, 20, 30, 40 Through-hole/Both ends tapped common (Standard) Foot style Rod side flange style Head side flange style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100

Never use in an atmosphere of explosive gases. The structure of switches is not intended to prevent explosion. Never use in an atmosphere with an explosive gas since this may cause a serious explosion. 2. Mount switches in locations without vibration (98m/s or less) or impact (490m/s or less). 3. Do not use in an area where surges are generated.

20 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 16 16 12 12 0.1 0.1 0 40 60 80 100 120 140 160 180 200 20 20 0 40 60 80 100 120 140 160 180 200 Overhang L (mm) Overhang L (mm) Graph (20) Stroke: Up to 150 stroke Graph (16) Stroke: Up to 150 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 25 20 20 0.1 0 40 60 80 100 120 140 160 180