Cylinder with Lock

(n = 4, 8, 12, 16)2 100 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 2 (Different surfaces, same surface) 1 55 60 65 70 75 D-M9AV n 55 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 60 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 65 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 75 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 2 (Different surfaces, same surface) 1 70 75 80 85 95 D-A9 n 70 + 40 (n 4) 2 (n = 4

LVQ

T) View Z (mm) Dimensions A B C D M N T U V Model LVQ20-S-2 LVQ30-S-2 LVQ40-S-2 LVQ50-S-2 LVQ60-S-2 25.5 46 31.5 58 7 15 35.3 10.6 7 23.5 47 29.5 59 7 15 36.9 16.5 10 23.5 47 29.5 59 7 20 37.9 22 35 70 41 82 7 20 64 25 17 35 70 41 82 7 20 66 32 17-5-69 8 Series LVQ Dimensions With flow rate adjustment & by-pass High back pressure spec. with flow rate adjustment & by-pass N.C. valve M N

CV/MVGQ

Data Rubber plug 10-15-69 70 Series CVS1 Construction Lube type Non-lube type Long stroke Component Parts No. Description Material Note No.

CV/MVGQ

86 102 116 27 32 32 37 37 71 81 101 119 133 60 70 86 102 116 80 90 105 130 150 42 50 59 76 92 100 110 130 160 180 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 The minimum stroke of the one with rod boot is 20 mm or more.

CQM

75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 110 x 135 M3 x 25 x 30 x 35 x 40 x 45 x

Floating Joint

70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07 2.8 9 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 55000 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 8 9 9 13 13 13 15 15 18 24 24 24 42 32.5 36 36 49 49 49 61.5 61.5 76.5 94 94 106 152 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 8 10 10 12 12 12 16 16 20 24 27 27 33 19

2–4

75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 110 x 135 M3 x 25 x 30 x 35 x 40 x 45 x

VFR

or less VFR450 VFR451 VFR454 Pressure center 3 70 or less Note 1) EA, EB port: Rc 3/8 Note 2) [ ]: Normal position Note 3) Min. operating frequency is once in 30 days.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83

High Vacuum Angle Valve

70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 H B A G *1 The E dimension applies when the heater option is included.

CL

Fine lock series (Series CLJ2/CLM2/ CLG1) Maximum load at horizontal mounting: 70% or less of the holding force (Maximum static load) for spring lock Maximum load at vertical mounting: 35% or less of the holding force (Maximum static load) for spring lock Lock-up series (Series CL1) Maximum load at horizontal mounting: 50% or less of the holding force (Maximum static load) Maximum load at

100

rate Air consumption Air consumption 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Supply pressure [MPa] Supply pressure [MPa] Standard supply pressure: 0.33 MPa (Without valve) 0.35 MPa (With valve) Time to Reach Vacuum Tank capacity: 1 L Flow Rate Characteristics 100 90 80 70 60 50 40 30 20 10 0 90 Vacuum pressure reached 80 kPa Vacuum pressure in tank [kPa] 80 Vacuum pressure [kPa] 66 kPa 70 60 53 kPa

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

The load factor for each direction can be found as follows. x = 0/400 = 0 y = 50/250 = 0.2 z = 200/1500 = 0.13 5. x + y + z = 0.33 1 1000 1000 1000 Lz 800 800 800 600 600 600 L1 [mm] L3 [mm] L2 [mm] 400 400 400 Lx Ly 200 200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work load [kg] 8 LEKFS Series Battery-less Absolute (Step

99

100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-04 {Rc1/2} FGH200-04 {Rc1/2} FGH300-04 {Rc1/2} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100

Compressed Air Preparation Filter

50 70 11 20 8 60 80 Size 60 2 1 191.2 45 93.1 30 45 70 50 70 11 20 8 60 80 Number of components Model Combination example r A N F J M Pressure Relief 3-port Valve VHS30-03-D 1 pc.

CLA

MM I Bore 81ze (mm) 40 BQ DC eO eE F GA GB GC GO GL GR J K LV -500 20 500 27 30 70 60 96 Yo %, 44 16 32 10 85 15 26 54 10 10 M8X l .25 6 76.5 ' 50 63 , 80 , 100 M14X1.5 M1 8 Xl .5 M18X 1.5 M22 X l.5 M26Xl .5 -'00 20-600 32 35 81 70 108 y.

Air Cylinder

135 95 160 120 185 25 Up to 200 38.5 3.5 4 6 22 3 36 49 10 15 7 52 70 140.5 95 165.5 120 190.5 145 215.5 32 Up to 200 45 3.5 4 7 25 3 44 58 10 16 8 53 70 142.5 95 167.5 120 192.5 145 217.5 40 Up to 200 54.5 4 4 7 30 3 54 71 10 16.5 8.5 63.5 76 160 101 185 126 210 151 235 CM3 CG1 CG1 CG3 JMB Rod flange: CG1FN MB 4 x FD FT F MB1 CA2 FX0.15 B E 0 0.05 CS1 CS2 B FX0.15 H 4 x FD Head flange:

JIS Standard Hydraulic Cylinder

1800 Rod series (mm) B-series rod C-series rod Bore size (mm) MM A MA D E K G H ZZ MM A MA D E K G H ZZ 32 34 M16 x 1.5 25 22 18 7 14 55 207 0.025 0.064 40 40 36 M20 x 1.5 30 27 22.4 9 19 60 212 M16 x 1.5 25 22 18 7 14 55 207 0.025 0.064 50 46 40 M24 x 1.5 35 32 28 11 24 65 231 M20 x 1.5 30 27 22.4 9 19 60 226 63 55 46 M30 x 1.5 45 42 35.5 13 30 80 257 M24 x 1.5 35 32 28 11 24 70

CNA

27 81 108 1/4 1/8 52 20 40 10 9 12 70 90 50 110 95 17 56.5 20 13 15 12 11 Up to 600 35 32 86 27 101 115 1/4 1/4 64 20 40 10 11.5 15 86 105 59 130 102 17 67 20 18 12 15 11 Up to 600 40 37 102 32 119 139 1/4 1/4 78 25 52 14 13.5 18 102 130 76 160 123 21 83 20 23 18 17 13 Up to 750 40 37 116 41 133 160 1/4 1/4 92 30 52 14 13.5 18 116 150 92 180 144 21 98 22 25 20 19 16 Up to 750 Bore size (

CNA

27 81 108 1/4 1/8 52 20 40 10 9 12 70 90 50 110 95 17 56.5 20 13 15 12 11 Up to 600 35 32 86 27 101 115 1/4 1/4 64 20 40 10 11.5 15 86 105 59 130 102 17 67 20 18 12 15 11 Up to 600 40 37 102 32 119 139 1/4 1/4 78 25 52 14 13.5 18 102 130 76 160 123 21 83 20 23 18 17 13 Up to 750 40 37 116 41 133 160 1/4 1/4 92 30 52 14 13.5 18 116 150 92 180 144 21 98 22 25 20 19 16 Up to 750 Bore size (