2/3 Port Valve for Various

AC VXR21 DC 50 45 20 60 40 15 AC VXR22 DC 50 60 25 60 50 20 AC VXR23 DC Operating Fluid and Ambient Temperature Operating fluid temperature (C ) Ambient temperature (C ) Temperature conditions Power source Water (Standard) Oil (Standard) High temperature oil (2) High temperature water (2) (D) (D) 80 80 40 60 AC DC AC/DC 60 40 1 60 40 Maximum Minimum 10 5 (1) Note 1) 50 cSt or less Note

PFxx-OMS0001CN

min(PFMC7202) [ 25] 25 L/min(PFMC7501) [ H_1] OUT1 [ 50] 50 L/min(PFMC7102) [ 100] 100 L/min(PFMC7202) [ CoL] OUT1 [SoG] ONOFF [ oU2] OUT2 2 [ HYS] [ 2ot] OUT2 2 [ 2_P] [ 250] 250 L/min(PFMC7501) [ P_2] OUT2 2 [ 500] 500 L/min(PFMC7102) 37 [F 2] [ 1000] 1000 L/min(PFMC7202) [ 25] 25 L/min(PFMC7501) [ H_2] OUT2 2 [ 50] 50 L/min(PFMC7102) [ 100] 100 L/min(PFMC7202) [F 3] [ rES] [ 1. 0] 1

PF-OMN0009_C

A 154 46 77 57.6 23 77 63 28 18 3.5 14 32 30 A 146 56 91 71.6 28.5 73 60.5 25 27.5 3.5 14 38 S T U V W Y Z 25 A 59 36 48 58 70 7 2 -46No.PF-OMN0009CN-F M8 (ZS-40-A) ()4 ()3 1() -47No.PF-OMN0009CN-F EPDM EPDM 11 11 PVC 420 mA 2 420 mA 11 PVC -48No.PF-OMN0009CN-F Revision history A B C D E F Note: Specifications are subject to change without prior notice and any obligation on

AMX-OM-Q015E

50 100 200 300 500 25 50 100 200 300 500 6 12 25 50 60 86 3 6 11 22 29 50 Purge air flow rate L/min(ANR) *Note3 Inlet air pressure MPa 0.7 Inlet air temperature oC 25 Inlet air saturation temperature oC 25 Ambient temperature oC 25 Dew point indicator purge air flow rate 1 L/min (ANR) {In the case of inlet air pressure 0.7MPa} *Note4 Regulator construction (about Type V) Relief type Port

AMX-OM-Q018E

50 100 200 300 500 25 50 100 200 300 500 Outlet air flow rate L/min(ANR) 6 12 25 50 60 86 3 6 11 22 29 50 Purge air flow rate L/min(ANR) *Note3 Inlet air pressure MPa 0.7 Inlet air temperature oC 25 Inlet air saturation temperature oC 25 Ambient temperature oC 25 Dew point indicator purge air flow rate 1 L/min (ANR) {In the case of inlet air pressure 0.7MPa} *Note4 Regulator construction

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Rubber seal 16.2 (0.9) VQZ332 33 or less 25 or less 92 VQZ300 Metal seal 13.5 (0.75) VQZ322 22 or less 17 or less N.O.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Main line flow control M/C M/C M/C Flow control for each branch line Remote control is possible with accumulated pulse. Digital display allows visualization of flow rate. 2-color display Improved visibility Refer to the Best Pneumatics No. 3, page 1467 for details of multi-counter CEU5.

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Applicable bore size (mm) Snap ring l A1 NDH10 MM NX R1 U1 Dd9 t d L m Dd9 t d L m l +0.048 0 0.030 0.060 0.030 0.060 I-J010SUS 10 CD-J010 10 CD-J010 10 3.3 3.3 3.3 C type 3.2 C type 3.2 8 21 M4 x 0.7 3.1 8 9 3 15.2 12.2 1.2 0.3 3 15.2 12.2 1.2 0.3 0.030 0.060 +0.048 0 0.030 0.060 I-J016SUS CD-Z015SUS IY-J015SUS 16 16 16 5 5 5 C type 5 C type 5 8 25 M5 x 0.8 6.4 12 14 4.8 22.7 18.3 1.5 0.7

VXR21/22/23

AC VXR21 DC 50 45 20 60 40 15 AC VXR22 DC 50 60 25 60 50 20 AC VXR23 DC Operating Fluid and Ambient Temperature Operating fluid temperature (C ) Ambient temperature (C ) Temperature conditions Power source Water (Standard) Oil (Standard) High temperature oil (2) High temperature water (2) (D) (D) 80 80 AC DC AC/DC 60 40 1 60 40 40 60 Maximum Minimum 10 5 (1) Note 1) 50 cSt or less Note

Modular Style Regulator with Built-in Pressure Gauge Series ARG

C C C U U U U O O O O S S S S H H H H L L L L to to to to Mounting angles other than 45, 135, 225 and 315 are available through the Made to Order (page 29).

DOC1003626

Fig.1-3 shows the location of the communication port. 14 1 Contact input / output signal connector D sub 25 female pin (socket) type 25 13 1 6 Serial communication connector D sub 9 female pin (socket) type 9 5 Fig.1-3 Communication port HRS400-A-46 1.3 Communication port 1-5 DOC1003626 Chapter 1 Read before using 1.4 Touch panel flow Press the [Comm.

VCB

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 L L VXA K VN K Conduit terminal: T LVC LVA F (Q) 34 LVH LVD LVQ 25 U LQ R C LVN G1/2 TI/ TIL E B A H D 2-P Port size (S) PA 2-M Thread depth N PAX L PB K (mm) Electrical entry P Port size B C A D E F H K L M N Grommet:G Conduit:C Conduit terminal:T Model Q R Q R Q R S U 13.5 28 64 1/8 31 6.5

IZx-OMP0064

Detecting port Installation Detection range distance mm mm 10 45 25 100 50 180 M3 screw Unit: mm A B 10 20 20 40 25 45 30 55 40 65 50 75 Mount a metal plate directly beneath the ionizer so that the metal plate faces the ionizer. Offset voltage may vary depending on the installation environment.

Digital Flow Switch (Remote type monitor unit)

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM510--1 10 (5) PFM510--2 10 (5) PFM525--1 25 (12.5) PFM525--2 25 (12.5) PFM550--1 50 (25) PFM550--2 50 (25) PFM511--1 100 (50) PFM511--2 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 -55No.PF-OMJ0018-F Dimensions PFM3 Panel cut-out dimensions Panel thickness: 0.5 to 6.0 mm Individual Two or more in a row (n: The number of products

Mechanically jointed rodless cylinder Basic type With Slide bearing guide type With cam follower guide type With linear guide type With High rigidity/ Linear guide type With Protective Cover type

(mm) Unit Tightening torque MY1B/M/C MY1H Tube I.D. (mm) 10 0.4 20 H 1.2 16 0.7 0.7 25 L 1.2 20 1.8 1.8 H 3.3 25 3.5 1.8 32 L 3.3 32 5.8 3.5 H 10.0 40 13.8 5.8 40 L 3.3 50 13.8 H 10.0 63 27.5 Table-3 List of Tightening Torque Stroke adjustment of the shock absorber (Lock plate type) Adjust the stroke by rotating the shock absorber after loosening the two lock plate retaining screws.

OMR0031

CN5: Parallel I/O Connector . 25 7.1 Parallel I/O connector specifications . 25 7.2 Parallel I/O specifications . 25 7.3 Parallel I/O circuit (NPN, PNP) . 25 (1) Parallel I/O input circuit . 25 (2) Parallel I/O output circuit . 26 7.4 Parallel I/O signals (Step Data input type) . 27 7.5 Parallel I/O signal cable (Step Data input type) . 31 7.6 Parallel I/O connector wiring (example) . 32

Digital Flow Switches, Series PF2A, Series PF2W

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

LUBRICATOR

Port thread Port thread Rc Rc G G NPT C2SL-6(Z)-A NPT C2SL-36(Z)-A C2SL-6-A C2SL-36-A Semi-standard Semi-standard C Semi-standard 3C Part no. Part no. Port thread Port thread Rc Rc G G NPT C2SL-C(Z)-A NPT C2SL-3C(Z)-A C2SL-C-A C2SL-3C-A B B External appearance drawing and part no. Semi-standard 6C Semi-standard 36C Part no. Part no.

KT10

How to Order Port Number e r KT10 R C 4P 4 1 0 0 Installation option Delivery pressure Code Installation Panel installation Delivery pressure Code 5 to 500 psig (0.034 to 3.4 MPa) 5 to 800 psig (0.034 to 5.5 MPa) 10 to 1500 psig (0.07 to 10.3 MPa) 15 to 2500 psig (0.1 to 17.2 MPa) 25 to 4000 psig (0.17 to 27.6 MPa) 50 to 6000 psig (0.34 to 41.4 MPa) 100 to 10 psig (0.7 to 69 MPa) 1) No code

PFxx-OMP0001CN

[] 2 [F 0] 2 F0 F1 F99 2 -24No.PF-OMP0001CN-F [F 0][rEF] [rEF] [Anr] 26 1 [ L] L/min [Uni] [oU1] OUT1 [HYS] [1ot] OUT1 [1_P] [ 250] 250 L/min(PFMB7501) [P_1] OUT1 [ 500] 500 L/min(PFMB7102) [F 1][oU1] [1000] 1000 L/min(PFMB7202) 28 [ 25] 25 L/min(PFMB7501) [H_1] OUT1 [ 50] 50 L/min(PFMB7102) [100] 100 L/min(PFMB7202) [CoL] OUT1 [SoG] ONOFF [oU2] OUT2 2 [HYS] [2ot] OUT2 2 [2_P