Bore Size: 40mm, Thread Type: Bore 12-25: M Thread; Bore 32-40: Rc, Stroke: 25mm, Cushion: 2 pcs. Adjuster Bolt, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Bearing: L (Ball Bushing), Bore Size: 20mm, Thread: ø6-ø20 Bore: M Thread; ø25,32ø Bore: Rc 1/8, Stroke: 25mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Bore Size: 20mm, Stroke: 25mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Bearing: L (Ball Bushing), Bore Size: 25mm, Thread: ø6-ø20 Bore: M Thread; ø25,32ø Bore: Rc 1/8, Stroke: 25mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

KK/KK13

62 25 48 20 13 15 27.2 D D Width across flats 21 Applicable hose I.D. 1/4" Effective area mm Min. bore Weight g Model Applicable hose I.D. 1/4" Effective area mm Min. bore Weight g Model D D 81 17 KK13P-07B KK13S-07B 4.1 8.0 10.6 4.1 7.5 7.5 5/16" 5/16" 18 -09B -09B 6 16.1 22.6 6 9.5 9.4 83 3/8" 3/8" 21 -11B -11B 8 25.4 11.5 11.5 35.3 7.5 88 1/2" 1/2" 25 -13B -13B 10.2 31.9 14.5 14.5 Refer

VXA31/32

9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

Process Pump

50 100 200 300 500 12 25 50 75 125 Purge air flow rate (L/min (ANR)) Note 3) Inlet air pressure (MPa) 0.7 Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) Dew point indicator purge air flow rate Port size (Nominal size B) 25 25 25 1 L/min (ANR) Note 1) No freezing Note 2) ANR represents the flow rate converted to the value under 20C at atmospheric pressure

JXCx-OMT0032CN

a) RJ45 (8P) LEC-CG1LEC-CG1a) RJ45 (8P) a) RJ45 (8P) No 1 LEC-CG1CN1(LEC)C K 0.3m N4 L 0.5m 1 1m 2 LEC-CGD (LEC) 3 LEC-CG2(1m) 4 XS2C-D4 [] 120 1/4W 5 RJ45 CN1CN2RJ45 LEC-CAP-X22 24 - No a) RJ45 (8P) TM21P-88P b) M12 4pin HR24-8DJ4PE550A(73) XS2G-D4 [] c) M12 4pin HR24-8DP4S300(73) XS2C-D4 [] 25 - 8.2 CN1 CN1(LEC) (120 1/4W) 0V CN1 No.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Inlet pressure (MPa) 14-20-5 4 Series AMG Dimensions AMG150 to AMG650 Accessory D: With auto-drain (N.O.) Drain cock: Black One-touch fitting C: With auto-drain (N.C.)

AMH

Nil Rc Thread type F G N NPT Accessory/Option Combinations Available Not available Depends on model Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Accessory Option specifications C C D -J -R D J T AMH150 R AMH250 AMH350 AMH450 Applicable model Accessory (Option)

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

Rc(PT) Thread F G(PF) N NPT Accessories Options Table: Accessory/Option combinations Available Not available Depending on model L D J T AM150 R AM250 AM350 AM450 Applicable models Accessories /Options C C D -J -R AM550 AM650 AM850 Port size N.C. auto drain N.O. auto drain Accessories 06 3/4B 01 02 03 1/8B Drain guide 1/4B 10 14 20 1/4B 1B 11/2 B Options INOUT reversal 3/8B Element service

AMG

AFF Port size 3/4B 1/8B 01 02 03 06 10 14 AMl 1B 1/4B Note) Please refer to p.4.7-7 about "How to Order" case assembly. 3/8B 11/2B Related products 2B 20 04 1/2B Option combinations Available Not available D J R AMG150 AMG250 AMG350 AMG450 Applicable model Accessories Options C C D J R Accessories/Optional specification AMG550 AMG650 AMG850 Symbol N.C. auto drain N.O. auto drain Drain guide